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Author:

Ma, Yuan-Xiao (Ma, Yuan-Xiao.) | Han, Chuan-Yu (Han, Chuan-Yu.) | Lai, P. T. (Lai, P. T..)

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Abstract:

Pentacene organic thin-film transistor (OTFT) using Pd as gate electrode is proposed, with high-k LaZrO as gate dielectric. The Pd film is prepared by e-beam evaporation and then the LaZrO film is deposited by reactive sputtering in Ar/O-2 ambience followed by an annealing in N-2 at 400 degrees C. The OTFT achieves an obvious increase in carrier mobility (to 1.02 cm(2)/V.s), as compared with its counterpart with heavily-doped silicon gate (0.23 cm(2)/V.s). Moreover, both samples with LaZrO gate dielectric show higher carrier mobility than a sample with La2O3 gate dielectric and Pd gate electrode.

Keyword:

high-k dieletrie metal gate organic thin-film transistor

Author Community:

  • [ 1 ] [Ma, Yuan-Xiao]Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong Isl, Hong Kong, Peoples R China
  • [ 2 ] [Lai, P. T.]Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong Isl, Hong Kong, Peoples R China
  • [ 3 ] [Han, Chuan-Yu]Xi An Jiao Tong Univ, Sch Microelect, Xian, Shaanxi, Peoples R China

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Source :

2016 13TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)

Year: 2016

Page: 974-977

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

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