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Abstract:
Pentacene organic thin-film transistor (OTFT) using Pd as gate electrode is proposed, with high-k LaZrO as gate dielectric. The Pd film is prepared by e-beam evaporation and then the LaZrO film is deposited by reactive sputtering in Ar/O-2 ambience followed by an annealing in N-2 at 400 degrees C. The OTFT achieves an obvious increase in carrier mobility (to 1.02 cm(2)/V.s), as compared with its counterpart with heavily-doped silicon gate (0.23 cm(2)/V.s). Moreover, both samples with LaZrO gate dielectric show higher carrier mobility than a sample with La2O3 gate dielectric and Pd gate electrode.
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2016 13TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)
Year: 2016
Page: 974-977
Language: English
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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