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学者姓名:韦学勇

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Design of SAW sensor for longitudinal strain measurement with improved sensitivity EI Scopus SCIE
期刊论文 | 2019 , 25 (1) , 351-359 | Microsystem Technologies
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Abstract :

This paper presents the design of a highly sensitive surface acoustic wave (SAW)-based sensor with novel structure for the longitudinal strain measurement. The sensor utilizes thin lithium niobate (LiNbO3) diaphragm as the sensing element rather than the bulk substrate. The application of the diaphragm effectively decreases the cross-sectional area of the strain sensitive element, and meanwhile reduces the resistance between the sensor and the specimen. The newly designed strain sensor is to operate around a frequency of 50 MHz. The insertion loss of − 12 dB and quality factor of 63 are obtained analytically from impulse-response model. The sensor performance with tensile testing of the steel beam is predicted by the finite element method. The prestressed eigenfrequency analysis is conducted with the COMSOL commercial software. The simulation shows the resonance frequency of the sensor shifts linearly with the strain induced in the testing beam. For the SAW sensor with traditional configuration applying 1 mm thick substrate, the strain sensitivity is obtained as 0.41 ppm/μΕ. For the sensor with the novel design employing thin diaphragm with the thickness of 200 μm, the strain sensitivity is increased to 0.83 ppm/μΕ. With the availability of the bulk micromachining of LiNbO3, the application of the piezoelectric diaphragm as sensing element in SAW strain sensor can be an alternative way to enhance the sensor sensitivity. © 2018 Springer-Verlag GmbH Germany, part of Springer Nature

Keyword :

Bulk- micromachining Commercial software Cross sectional area Eigenfrequency analysis Impulse response model Piezoelectric diaphragms Resonance frequencies Surface acoustic wave (SAW)

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GB/T 7714 Ren, Juan , Anurakparadorn, Kanat , Gu, Hairong et al. Design of SAW sensor for longitudinal strain measurement with improved sensitivity [J]. | Microsystem Technologies , 2019 , 25 (1) : 351-359 .
MLA Ren, Juan et al. "Design of SAW sensor for longitudinal strain measurement with improved sensitivity" . | Microsystem Technologies 25 . 1 (2019) : 351-359 .
APA Ren, Juan , Anurakparadorn, Kanat , Gu, Hairong , Zhao, Minghui , Wei, Xueyong . Design of SAW sensor for longitudinal strain measurement with improved sensitivity . | Microsystem Technologies , 2019 , 25 (1) , 351-359 .
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Micromechanical vibration absorber for frequency stability improvement of DETF oscillator SCIE
期刊论文 | 2019 , 29 (4) | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Abstract :

This article explores a novel way to improve the frequency stability of micromechanical double-ended tuning fork (DETF) resonators. The aim of this work is to use a non-linear vibration absorber to improve the frequency stability of the oscillator. A vibration absorption device is set up on the oscillator to absorb part of the energy of the oscillator. The influence of the vibration absorber on the frequency stability is studied. The short-term frequency stability of the DETF oscillator can be improved from 378 ppb to 202 ppb by coupling it to a mechanical vibration absorber.

Keyword :

frequency stability coupled resonators oscillator micromechanical resonator MEMS

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GB/T 7714 Du, Jianshu , Wei, Xueyong , Ren, Juan et al. Micromechanical vibration absorber for frequency stability improvement of DETF oscillator [J]. | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2019 , 29 (4) .
MLA Du, Jianshu et al. "Micromechanical vibration absorber for frequency stability improvement of DETF oscillator" . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING 29 . 4 (2019) .
APA Du, Jianshu , Wei, Xueyong , Ren, Juan , Wang, Jiuhong , Huan, Ronghua . Micromechanical vibration absorber for frequency stability improvement of DETF oscillator . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2019 , 29 (4) .
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Multiphysics vibration FE model of piezoelectric macro fibre composite on carbon fibre composite structures EI SCIE
期刊论文 | 2019 , 161 , 376-385 | Composites Part B: Engineering
WoS CC Cited Count: 2
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Abstract :

This paper presents a finite element (FE) model developed using commercial FE software COMSOL to simulate the multiphysical process of pieozoelectric vibration energy harvesting (PVEH), involving the dynamic mechanical and electrical behaviours of piezoelectric macro fibre composite (MFC) on carbon fibre composite structures. The integration of MFC enables energy harvesting, sensing and actuation capabilities, with applications found in aerospace, automotive and renewable energy. There is an existing gap in the literature on modelling the dynamic response of PVEH in relation to real-world vibration data. Most simulations were either semi-analytical MATLAB models that are geometry unspecific, or basic FE simulations limited to sinusoidal analysis. However, the use of representative environment vibration data is crucial to predict practical behaviour for industrial development. Piezoelectric device physics involving solid mechanics and electrostatics were combined with electrical circuit defined in this FE model. The structure was dynamically excited by interpolated vibration data files, while orthotropic material properties for MFC and carbon fibre composite were individually defined for accuracy. The simulation results were validated by experiments with <10﹪ deviation, providing confidence for the proposed multiphysical FE model to design and optimise PVEH smart composite structures. © 2018 Elsevier Ltd

Keyword :

Carbon fibre composites COMSOL CRFP Industrial development Multi-physics Orthotropic material properties Smart-composite structures Vibration energy harvesting

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GB/T 7714 Jia, Yu , Wei, Xueyong , Xu, Liu et al. Multiphysics vibration FE model of piezoelectric macro fibre composite on carbon fibre composite structures [J]. | Composites Part B: Engineering , 2019 , 161 : 376-385 .
MLA Jia, Yu et al. "Multiphysics vibration FE model of piezoelectric macro fibre composite on carbon fibre composite structures" . | Composites Part B: Engineering 161 (2019) : 376-385 .
APA Jia, Yu , Wei, Xueyong , Xu, Liu , Wang, Congsi , Lian, Peiyuan , Xue, Song et al. Multiphysics vibration FE model of piezoelectric macro fibre composite on carbon fibre composite structures . | Composites Part B: Engineering , 2019 , 161 , 376-385 .
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Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator EI SCIE
期刊论文 | 2018 , 28 (12) | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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In this paper, the effect of nonlinearity on axial force sensitivity is investigated in a T-shaped micromechanical tuning fork resonator. Firstly, a unified model of this resonator for both in-phase and anti-phase modes is established, in which the quadratic and cubic nonlinearities are considered. The validity of this proposed model is verified by the experimental results. Then, the effects of the axial force on the frequency shift and of the nonlinearity on the axial force sensitivity are analyzed theoretically and experimentally. The sensitivity to frequency shift caused by the axial force is observed to be slightly enhanced by soft spring nonlinearity. These results can be used to provide reference for some practical applications, e.g. electrometers, force sensors, etc.

Keyword :

anti-phase mode axial force sensitivity in-phase mode nonlinearity tuning fork resonator

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GB/T 7714 Wang, Xuefeng , Huan, Ronghua , Pu, Dong et al. Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator [J]. | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2018 , 28 (12) .
MLA Wang, Xuefeng et al. "Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator" . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING 28 . 12 (2018) .
APA Wang, Xuefeng , Huan, Ronghua , Pu, Dong , Wei, Xueyong . Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2018 , 28 (12) .
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Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1 EI SCIE Scopus
期刊论文 | 2018 , 112 (1) | APPLIED PHYSICS LETTERS
WoS CC Cited Count: 5 SCOPUS Cited Count: 5
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Abstract :

In this Letter, synchronization of micromechanical oscillators with a frequency ratio of 3:1 is reported. Two electrically coupled piezoresistive micromechanical oscillators are built for the study, and their oscillation frequencies are tuned via the Joule heating effect to find out the synchronization region. Experimental results show that the larger coupling strength or bias driving voltage is applied and a wider synchronization region is obtained. Interestingly, however, the oscillator's frequency tunability is dramatically reduced from -809.1 Hz/V to -23.1 Hz/V when synchronization is reached. A nearly 10-fold improvement of frequency stability at 1 s is observed from one of the synchronized oscillators, showing a comparable performance of the other. The stable high order synchronization of micromechanical oscillators is helpful to design high performance resonant sensors with a better frequency resolution and a larger scale factor. Published by AIP Publishing.

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GB/T 7714 Pu, Dong , Wei, Xueyong , Xu, Liu et al. Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1 [J]. | APPLIED PHYSICS LETTERS , 2018 , 112 (1) .
MLA Pu, Dong et al. "Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1" . | APPLIED PHYSICS LETTERS 112 . 1 (2018) .
APA Pu, Dong , Wei, Xueyong , Xu, Liu , Jiang, Zhuangde , Huan, Ronghua . Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1 . | APPLIED PHYSICS LETTERS , 2018 , 112 (1) .
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Phase switch in the stochastic response of a micromechanical beam resonator EI SCIE Scopus
期刊论文 | 2018 , 229 (5) , 2177-2187 | ACTA MECHANICA
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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Abstract :

In this paper, the phase switch in the stationary stochastic response induced by random disturbance is investigated in a micromechanical clamped-clamped beam resonator. First, a reduced-order stochastic dynamic model of the resonator involving the main sources of nonlinearities is developed based on the Galerkin decomposition method. Using stochastic averaging, a Fokker-Planck-Kolmogorov equation governing the stationary stochastic response is derived, from which the stationary probability density (SPD) is obtained analytically. Based on the qualitative change of the shape of SPD, the phase switch in the stationary motion of the resonator is observed for the first time. Then, the effects of various parameters including AC voltage, nonlinearity strength and random excitation intensity on the phase switch are examined. Furthermore, the critical values of the phase switch in the parameter plane are detected.

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GB/T 7714 Huan, R. H. , Pu, D. , Wei, X. Y. . Phase switch in the stochastic response of a micromechanical beam resonator [J]. | ACTA MECHANICA , 2018 , 229 (5) : 2177-2187 .
MLA Huan, R. H. et al. "Phase switch in the stochastic response of a micromechanical beam resonator" . | ACTA MECHANICA 229 . 5 (2018) : 2177-2187 .
APA Huan, R. H. , Pu, D. , Wei, X. Y. . Phase switch in the stochastic response of a micromechanical beam resonator . | ACTA MECHANICA , 2018 , 229 (5) , 2177-2187 .
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A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement EI SCIE PubMed Scopus
期刊论文 | 2018 , 18 (3) | SENSORS
WoS CC Cited Count: 2 SCOPUS Cited Count: 1
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Abstract :

With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor's sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm x 0.1 mm x 2 mu m and copper electrodes of 2 mu m thick are sputtered sequentially on the substrate, and a 25 mu m thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa(-1). The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.

Keyword :

detonation pressure manganin thin film MEMS technology microscale measurement ultra-high pressure sensor

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GB/T 7714 Zhang, Guodong , Zhao, Yulong , Zhao, Yun et al. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement [J]. | SENSORS , 2018 , 18 (3) .
MLA Zhang, Guodong et al. "A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement" . | SENSORS 18 . 3 (2018) .
APA Zhang, Guodong , Zhao, Yulong , Zhao, Yun , Wang, Xinchen , Wei, Xueyong , Ren, Wei et al. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement . | SENSORS , 2018 , 18 (3) .
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Sensitivity enhancement of a resonant mass sensor based on internal resonance EI SCIE
期刊论文 | 2018 , 113 (22) | APPLIED PHYSICS LETTERS
WoS CC Cited Count: 2
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There exist numerous vibration modes in a resonant structure, and these modes can interact with each other. Here, the internal resonance between the fundamental mode and higher order modes is observed in a polyvinylidene fluoride piezoelectric membrane as a resonant mass sensor. Higher order modes draw energy from the fundamental one and vibrate at integer times of the fundamental mode's frequency. The resonance frequency shift of the fundamental mode can thus be magnified integer times through internal resonance. The sensitivity of the resonant mass sensor, defined by the resonance frequency shift caused by mass change, is enhanced based on this mechanism. The sensing characteristics are experimentally studied with a concentrated mass load attached to the sensor. The sensitivity improvement of directly using higher order modes and detecting the internal resonance response is tested and compared in our experiment. An 11 times sensitivity magnification is achieved with the internal resonance method, which has an obvious advantage over the higher order method. Published by AIP Publishing.

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GB/T 7714 Zhang, Tianyi , Wei, Xueyong , Jiang, Zhuangde et al. Sensitivity enhancement of a resonant mass sensor based on internal resonance [J]. | APPLIED PHYSICS LETTERS , 2018 , 113 (22) .
MLA Zhang, Tianyi et al. "Sensitivity enhancement of a resonant mass sensor based on internal resonance" . | APPLIED PHYSICS LETTERS 113 . 22 (2018) .
APA Zhang, Tianyi , Wei, Xueyong , Jiang, Zhuangde , Cui, Tianhong . Sensitivity enhancement of a resonant mass sensor based on internal resonance . | APPLIED PHYSICS LETTERS , 2018 , 113 (22) .
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基于表面声波的微流控技术研究进展 PKU CA
期刊论文 | 2018 , 36 (16) , 8-19 | 科技导报
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近年来,基于表面声波的微流控技术因为表面声波的产生与控制方式简单高效、表面声波与流体介质相互作用的形式多样,以及声波器件制备工艺简单、易于集成和检测等特点引起了广泛关注和研究。目前,基于表面声波的微流控技术在生化分析与疾病检测等领域中主要围绕细胞等微粒的排布、分离、混合与汇聚现象、声波加热、声波雾化、生物传感等方面展开研究,部分技术已接近成熟,具有发展成为便携式设备的巨大潜力,市场应用前景广阔。本文总结了近20年来表面声波微流控技术在微粒的排布、分离、混合与汇聚现象、声波加热、声波雾化、生物传感等方面的研究进展,并指出了相关研究正在由声力、声热、声电等单效应向多物理场效应转变,由二维、微米级操纵向三维、纳米级操纵转变、由平面型器件向柔性器件转变的趋势。

Keyword :

表面声波 微流控 排列与分离 混合与汇聚 生物传感

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GB/T 7714 韦学勇 , 金少搏 , 刘振 et al. 基于表面声波的微流控技术研究进展 [J]. | 科技导报 , 2018 , 36 (16) : 8-19 .
MLA 韦学勇 et al. "基于表面声波的微流控技术研究进展" . | 科技导报 36 . 16 (2018) : 8-19 .
APA 韦学勇 , 金少搏 , 刘振 , 于克阳 , 蒋庄德 . 基于表面声波的微流控技术研究进展 . | 科技导报 , 2018 , 36 (16) , 8-19 .
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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees EI SCIE PubMed Scopus
期刊论文 | 2018 , 18 (2) | SENSORS
WoS CC Cited Count: 1 SCOPUS Cited Count: 2
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Abstract :

In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002 degrees in the whole measurement range from 0 degrees to 360 degrees.

Keyword :

double-ended tuning fork MEMS oscillator resonator tilt sensor

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GB/T 7714 Wang, Shudong , Wei, Xueyong , Weng, Yinsheng et al. A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees [J]. | SENSORS , 2018 , 18 (2) .
MLA Wang, Shudong et al. "A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees" . | SENSORS 18 . 2 (2018) .
APA Wang, Shudong , Wei, Xueyong , Weng, Yinsheng , Zhao, Yulong , Jiang, Zhuangde . A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees . | SENSORS , 2018 , 18 (2) .
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