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A high-resolution resonant torque sensor based on MEMS quartz resonator EI SCIE
期刊论文 | 2021 , 320 | Sensors and Actuators, A: Physical
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Abstract :

Due to the continuous miniaturization of Micro-Electro-Mechanical System (MEMS) devices, investigations on the mechanical properties of micro-scale materials, especially the torsion properties, have attracted increasing attention. This paper reports a resonant torque sensor based on MEMS quartz resonator for torsion test of micro-scale materials. The sensor consists of an ICP etched silicon structure and two quartz double-ended tuning fork (Q-DETF) resonators. An experiment system with the functions of microscopic observation and precise positioning has been built, which can be used for the calibration of the torque sensor and the torsion experiment of micro-scale materials. In the atmosphere at room temperature (25), the frequency stability of the sensor was up to 11.68 ppb. The scale factor of the sensitive direction of the sensor reached 253.3 mHz/μN, and the cross-sensitivity was minimized to 2.1 %. The experimental results showed that the resolution of the torque sensor was higher than 35.82 pN m. The electrolytic pure copper foil was used to carry out torsion tests in the range of 0°-8°. The loading and unloading tests proved our sensor owned high repeatability and low hysteresis of less than 1%. © 2021 Elsevier B.V.

Keyword :

Unloading Torque meters Resonators Torsion testing Crystal resonators Quartz MEMS Torque Torsional stress

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GB/T 7714 Ding, Yanyu , Ren, Ziming , Wang, Shudong et al. A high-resolution resonant torque sensor based on MEMS quartz resonator [J]. | Sensors and Actuators, A: Physical , 2021 , 320 .
MLA Ding, Yanyu et al. "A high-resolution resonant torque sensor based on MEMS quartz resonator" . | Sensors and Actuators, A: Physical 320 (2021) .
APA Ding, Yanyu , Ren, Ziming , Wang, Shudong , Jing, Weixuan , Jiang, Zhuangde , Wei, Xueyong . A high-resolution resonant torque sensor based on MEMS quartz resonator . | Sensors and Actuators, A: Physical , 2021 , 320 .
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Capacitance Detection Based on High Order Synchronization Sensing EI SCIE
期刊论文 | 2021 , 21 (15) , 16780-16789 | IEEE SENSORS JOURNAL
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Abstract :

Synchronization is a ubiquitous phenomenon first discovered by Christiaan Huygens and has been observed in a variety of systems. However, little work has been done to utilize the synchronization effect for sensing applications. Here, we demonstrate a new concept of exploring synchronization effects for capacitive sensing. This paper presents a novel validation of high sensitivity capacitive readout method based on high order synchronization sensing technique for the first time. A high order synchronization of 11:1 is realized between the micromechanical oscillator and the electrical oscillator, considering the trade-offs of sensitivity, noise floor and synchronization bandwidth. The theoretical analysis is validated by the experimental results. With the harmonic amplitude V-p = 500mV, the measured sensitivity (404Hz/nF) indicates an improvement of 11 times in comparison with that of the unsynchronized capacitance detection method. In addition, the frequency stability and noise floor of the unsynchronized RLC circuit are 400ppm and 18.5fF/root Hz@0.021Hz, and reduced to 10ppm(1.01pF) and 0.13fF/root Hz(1.37ppb) @0.013Hz when the bi-domain coupled synchronization is active. The proposed capacitive readout method opens up the new possibilities for more advanced integrated solutions relying on synchronization for readout circuits of capacitive seismic sensors.

Keyword :

Capacitive readout micromechanical oscillator synchronization RLC circuits

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GB/T 7714 Zhang, Hongcai , Xu, Liu , Ding, Yanyu et al. Capacitance Detection Based on High Order Synchronization Sensing [J]. | IEEE SENSORS JOURNAL , 2021 , 21 (15) : 16780-16789 .
MLA Zhang, Hongcai et al. "Capacitance Detection Based on High Order Synchronization Sensing" . | IEEE SENSORS JOURNAL 21 . 15 (2021) : 16780-16789 .
APA Zhang, Hongcai , Xu, Liu , Ding, Yanyu , Jiang, Zhuangde , Wei, Xueyong . Capacitance Detection Based on High Order Synchronization Sensing . | IEEE SENSORS JOURNAL , 2021 , 21 (15) , 16780-16789 .
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A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter EI CPCI-S
会议论文 | 2021 , 1157-1160 | 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS)
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Abstract :

For the requirements of high sensitivity and long-term stability of a MEMS gravimeter. This paper presents a tunable quasi-zero stiffness mechanism by a complementary quasi-zero stiffness structure of the pre-shaped bistable beam and conventional folded springs. The V-beam actuators are used to drive a voltage controlled bulking compression for stiffness compensation. The system is theoretically modeled by Galerkin method based on the first buckling mode, and the behavior of nonlinear spring is discussed. The performance result shows that the value and interval of the negative stiffness are determined by the as-fabricated height-to-width and height-to-length ratios, and actively tuned by the effective axial load. The behavior of this mechanism shows a promising potential of realizing a highly stable gravimeter.

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GB/T 7714 Zhang, Xiaopeng , Wei, Xueyong , Gao, Yang et al. A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter [C] . 2021 : 1157-1160 .
MLA Zhang, Xiaopeng et al. "A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter" . (2021) : 1157-1160 .
APA Zhang, Xiaopeng , Wei, Xueyong , Gao, Yang , Zhao, Minghui , Qi, Yonghong , Zhao, Libo et al. A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter . (2021) : 1157-1160 .
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Phase-delay induced variation of synchronization bandwidth and frequency stability in a micromechanical oscillator SCIE
期刊论文 | 2021 , 105 (4) , 2981-2994 | NONLINEAR DYNAMICS
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Abstract :

Phase feedback is commonly utilized to set up a synchronized MEMS oscillator for high performance sensor application. It is a consensus that the synchronization region varies with phase delay with an 'Anti-U' mode. In this paper, phase-delay induced variation of synchronization bandwidth and frequency stability in a micromechanical oscillator is investigated analytically and experimentally. The analytical expression for predicting the synchronization bandwidth with phase delay is derived based on the mathematic model. An additional dynamic extreme point of synchronization bandwidth actuated by nonlinearity is observed, which leads to three different types ('U', 'Anti-U' and 'M') of variation pattern of synchronization bandwidth as feedback tuning. The variation of frequency stability along phase delay is also studied. The synchronization bandwidth and the frequency stability have exactly opposite variation pattern with phase delay in linear oscillators while they are totally consistent in nonlinear oscillators. Experimental results validate the analytical observations. Our work provides a precise way for achieving best performance of a synchronized MEMS oscillator in the sensor application.

Keyword :

Feedback tuning Micromechanical oscillator Nonlinear dynamics Synchronization Frequency stability

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GB/T 7714 Shi, Zhan , Pu, Dong , Wang, Xuefeng et al. Phase-delay induced variation of synchronization bandwidth and frequency stability in a micromechanical oscillator [J]. | NONLINEAR DYNAMICS , 2021 , 105 (4) : 2981-2994 .
MLA Shi, Zhan et al. "Phase-delay induced variation of synchronization bandwidth and frequency stability in a micromechanical oscillator" . | NONLINEAR DYNAMICS 105 . 4 (2021) : 2981-2994 .
APA Shi, Zhan , Pu, Dong , Wang, Xuefeng , Huan, Ronghua , Jiang, Zhuangde , Wei, Xueyong . Phase-delay induced variation of synchronization bandwidth and frequency stability in a micromechanical oscillator . | NONLINEAR DYNAMICS , 2021 , 105 (4) , 2981-2994 .
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Design and simulation of a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity EI SCIE Scopus
期刊论文 | 2020 , 29 (8) | Smart Materials and Structures | IF: 3.585
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Abstract :

Cross-axis sensitivity is important as same as resolution and sensitivity for accelerometer especially in the high precision application field, such as crustal movement, earthquake monitoring, and mineral exploration. This paper proposed a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity. The origin of the cross-axis sensitivity for the proposed accelerometer was analyzed. To reduce the cross-axis sensitivity, a novel separated mass-spring structure whose proof mass includes four anti-roll masses and a sensing mass was designed, the anti-roll masses can isolate the x and y direction acceleration from being transmitted to the central sensing mass, and the mechanism was studied and verified through theoretical and simulation technology. The performance of the accelerometer was evaluated by simulation, and the results indicated that the bandwidth, spring stiffness, sensitivity, and cross-axis sensitivities are 45.16 Hz, 35.4 N m-1, 15.789 μm g-1, 0.0041% (x/z axis) and 0.0045% (y/z axis), respectively. © 2020 IOP Publishing Ltd.

Keyword :

Springs (components) Mineral exploration Accelerometers Fabry-Perot interferometers

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GB/T 7714 Zhao, Minghui , Wei, Xueyong , Bai, Hongwu et al. Design and simulation of a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity [J]. | Smart Materials and Structures , 2020 , 29 (8) .
MLA Zhao, Minghui et al. "Design and simulation of a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity" . | Smart Materials and Structures 29 . 8 (2020) .
APA Zhao, Minghui , Wei, Xueyong , Bai, Hongwu , Wang, Hairong . Design and simulation of a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity . | Smart Materials and Structures , 2020 , 29 (8) .
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A vibrating membrane working electrode for highly sensitive anodic stripping voltammetry EI SCIE
期刊论文 | 2020 , 311 | Sensors and Actuators, B: Chemical
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Anodic stripping voltammetry (ASV) is an effective electrochemical method for quantitative determination of ions in solution. In this work, we present a new vibrating working electrode for the ASV detection of copper ion. This working electrode is a thin multilayer membrane consisting of a gold film working electrode evaporated on a piezoelectric resonant diaphragm. Chemical vapor deposition and electron beam evaporation methods are used to form multiple functional layers in the membrane. Vibrational and electrochemical properties of the membrane working electrode are experimentally investigated. In the ASV measurement, the vibration of the piezoelectric diaphragm can enhance the mass transfer rate during the metal deposition step. The sensitivity of sensors under vibration is improved by 4 times, compared with those at static conditions. The detection limit with and without vibration are 0.37 and 1.66 μg/L respectively at a deposition time of 5 min. In addition, the experimental results in this study also indicate the stripping peak current is influenced by the vibrating velocity and mode shape of the piezoelectric diaphragm. The vibrating membrane electrode presented in this study can be potentially used to different types of electrochemical sensing applications limited by the mass transfer rate of the analyte. © 2020

Keyword :

Chemical vapor deposition Electrochemical electrodes Piezoelectricity Voltammetry Metal ions Mass transfer Membranes

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GB/T 7714 Zhang, Tianyi , Liu, Qingyuan , Wei, Xueyong et al. A vibrating membrane working electrode for highly sensitive anodic stripping voltammetry [J]. | Sensors and Actuators, B: Chemical , 2020 , 311 .
MLA Zhang, Tianyi et al. "A vibrating membrane working electrode for highly sensitive anodic stripping voltammetry" . | Sensors and Actuators, B: Chemical 311 (2020) .
APA Zhang, Tianyi , Liu, Qingyuan , Wei, Xueyong , Jiang, Zhuangde , Cui, Tianhong . A vibrating membrane working electrode for highly sensitive anodic stripping voltammetry . | Sensors and Actuators, B: Chemical , 2020 , 311 .
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Fluorescent labeling based acoustofluidic screening of Japanese encephalitis virus EI SCIE Scopus
期刊论文 | 2020 , 322 | Sensors and Actuators, B: Chemical
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The Japanese encephalitis virus (JEV) as one of the main causes of encephalitis in Asia has resulted in tens of thousands of deaths. Early and efficient diagnosis of the virus is essential to prevent the spread of JEV. Here, we present a fluorescent labeling based acoustofluidic method for JEV screening. The carboxy-functionlised polystyrene (PS) microspheres were conjugated with monoclonal anti-JEV antibody (mAb) and then captured JEV in a complex biological samples. The composites of PS-mAb-JEV were separated in the microfluidic device via travelling surface acoustic (TSAW) force. The separated composites were labelled with FITC-conjugate anti-JEV antibody 2H4 and then were detected by the fluorescent signal. Experimental results proved the highly efficient separation and specific detection of JEV in the biological sample. Also, the acoustic-wave based separation method can separate efficiently almost all types of particles and has little effect on the subsequent genetic testing and fluorescence detection of JEV. Meantime, the fluorescence labeling method for JEV detection doesn't need the laborious pretreatment and capable of offering a rapid and reliable detection approach. This is the first time to detect virus based on acoustofluidic driving and fluorescent labeling, which is a promising method for screening virus in the future biomedical applications. © 2020 The Authors

Keyword :

Medical applications Antibodies Fluorescence Separation Viruses

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GB/T 7714 Liu, Zhen , Lei, Yingfeng , Yu, Ziyi et al. Fluorescent labeling based acoustofluidic screening of Japanese encephalitis virus [J]. | Sensors and Actuators, B: Chemical , 2020 , 322 .
MLA Liu, Zhen et al. "Fluorescent labeling based acoustofluidic screening of Japanese encephalitis virus" . | Sensors and Actuators, B: Chemical 322 (2020) .
APA Liu, Zhen , Lei, Yingfeng , Yu, Ziyi , Meng, Zhijun , Jin, Shaobo , Qu, Xiaoli et al. Fluorescent labeling based acoustofluidic screening of Japanese encephalitis virus . | Sensors and Actuators, B: Chemical , 2020 , 322 .
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Intra-droplet particle enrichment in a focused acoustic field EI SCIE Scopus
期刊论文 | 2020 , 10 (20) , 11565-11572 | RSC ADVANCES | IF: 3.361
WoS CC Cited Count: 2
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Abstract :

Particle enrichment is an important preparation or collection process in biomedical and biochemical experiments, but the enrichment process in droplets is harder to realize than in continuous fluid. Here we demonstrate an on-chip, label-free and controllable intra-droplet particle enrichment realized in a focused acoustic field. In this process, droplets containing microparticles are trapped, merged together and split off in the focused acoustic region, resulting in droplets with particles of high concentration. By changing the experimental conditions, the degree of enrichment of this method can be tuned up to 26 times, which enables it to meet requirements for sample preparation in various applications.

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GB/T 7714 Qin, Xianming , Wang, Hairong , Wei, Xueyong . Intra-droplet particle enrichment in a focused acoustic field [J]. | RSC ADVANCES , 2020 , 10 (20) : 11565-11572 .
MLA Qin, Xianming et al. "Intra-droplet particle enrichment in a focused acoustic field" . | RSC ADVANCES 10 . 20 (2020) : 11565-11572 .
APA Qin, Xianming , Wang, Hairong , Wei, Xueyong . Intra-droplet particle enrichment in a focused acoustic field . | RSC ADVANCES , 2020 , 10 (20) , 11565-11572 .
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Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network EI SCIE Scopus
期刊论文 | 2020 , 316 | Sensors and Actuators, A: Physical | IF: 3.407
WoS CC Cited Count: 4 SCOPUS Cited Count: 6
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Abstract :

Temperature compensation with high accuracy is crucial for improving the performance of MEMS resonant accelerometers. In this paper, we propose an effective temperature compensation method based on the backpropagation neural network (BP-NN). First, we analyzed the relationship among the input acceleration, the environmental temperature, the output frequencies, and the scale factor of a MEMS resonant accelerometer through the traditional polynomial fitting method. After that, we introduced the BP-NN improved by genetic algorithm (GA). Numerous experiments were performed to train the BP-NN model and establish the relationships between the input layer and the output layer. Comparison between single-beam working mode and symmetrical double-beam working mode of the MEMS resonant accelerometer proved that the latter had a better temperature compensation effect due to its minimized error caused by temperature measurement. Experimental results show that the maximum error of our approach is 0.017 % over the whole temperature range from -10°C to 80°C, which is 173-times better than the traditional polynomial fitting method. © 2020

Keyword :

Accelerometers Neural networks Genetic algorithms Error compensation Backpropagation Temperature distribution Temperature measurement

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GB/T 7714 Wang, Shudong , Zhu, Weilong , Shen, Yajing et al. Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network [J]. | Sensors and Actuators, A: Physical , 2020 , 316 .
MLA Wang, Shudong et al. "Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network" . | Sensors and Actuators, A: Physical 316 (2020) .
APA Wang, Shudong , Zhu, Weilong , Shen, Yajing , Ren, Juan , Gu, Hairong , Wei, Xueyong . Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network . | Sensors and Actuators, A: Physical , 2020 , 316 .
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Programmable synchronization enhanced MEMS resonant accelerometer EI SCIE Scopus PubMed
期刊论文 | 2020 , 6 (1) | Microsystems and Nanoengineering
WoS CC Cited Count: 12 SCOPUS Cited Count: 11
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Abstract :

Acceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms. Herein, we present a synchronized oscillator-based enhancement approach to realize a fivefold resolution improvement of a microelectromechanical resonant accelerometer. Through the unidirectional electrical coupling method, we achieved synchronization of the sensing oscillator of the microelectromechanical resonant accelerometer and an external reading oscillator, which remarkably enhanced the stability of the oscillation system to 19.4 ppb and the resolution of the accelerometer to 1.91 μg. In addition, the narrow synchronization bandwidth of conventional synchronized oscillators was discussed, and hence, we propose a novel frequency automatic tracking system to expand the synchronization bandwidth from 113 to 1246 Hz, which covers the full acceleration measurement range of ±1 g. For the first time, we utilized a unidirectional electrical synchronization mechanism to improve the resolution of resonant sensors. Our comprehensive scheme provides a general and powerful solution for performance enhancement of any microelectromechanical system (MEMS) resonant sensor, thereby enabling a wide spectrum of applications. © 2020, The Author(s).

Keyword :

MEMS Accelerometers Electromechanical devices Military applications Acceleration measurement Oscillators (electronic) Bandwidth Synchronization

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GB/T 7714 Xu, Liu , Wang, Shudong , Jiang, Zhuangde et al. Programmable synchronization enhanced MEMS resonant accelerometer [J]. | Microsystems and Nanoengineering , 2020 , 6 (1) .
MLA Xu, Liu et al. "Programmable synchronization enhanced MEMS resonant accelerometer" . | Microsystems and Nanoengineering 6 . 1 (2020) .
APA Xu, Liu , Wang, Shudong , Jiang, Zhuangde , Wei, Xueyong . Programmable synchronization enhanced MEMS resonant accelerometer . | Microsystems and Nanoengineering , 2020 , 6 (1) .
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