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Abstract:
The composition and microstructures of the Al2O3-SiO2 system coatings fabricated by chemical vapor deposition using AlCl3-SiCl4-H-2-CO2 were investigated. The results show that completely compositional homogenization between silica and alumina does not occur under CVD conditions. The products deposited all were the transition Al2O3 attached amorphous SiO2. The size of the Al2O3-SiO2 particles declined with CVD temperature increasing in the range of 550degreesC to 850degreesC. Dense and crystalline 3Al(2)O(3)(.)SiO(2)-alpha-Al2O3-iota-Al2O3-SiO2 coating was obtained by CVD at 1050degreesC.
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RARE METAL MATERIALS AND ENGINEERING
ISSN: 1002-185X
Year: 2004
Issue: 6
Volume: 33
Page: 609-611
0 . 4 3 7
JCR@2004
0 . 5 0 6
JCR@2020
ESI Discipline: MATERIALS SCIENCE;
JCR Journal Grade:3
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 1
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 0
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