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Abstract：
AFM images are distorted representations of sample surfaces due to the dilation produced by the AFM tip shape in micro/nano-scale profile measurement. It is necessary to obtain the tip shape information in order to correct such distortion in micro/nano metrology. Ordered nano porous alumina templates have attracted increasing attention in recent years due to their possible utilization as templates for the organization of nanosize structures or others. Porous anodic alumina membrane is used as an AFM tip characterizer to estimate the AFM tip shape and scanning direction-based characterization method is used to estimate the AFM tip shape. © 2011 IEEE.
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NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
ISSN： 9781612847757
Year： 2011
Publish Date： 2011
Page： 1060-1063
Language： English
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WoS CC Cited Count： 0
SCOPUS Cited Count：
ESI Highly Cited Papers on the List： 0 Unfold All
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30 Days PV： 6
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