The　transport　properties　including　electron　diffusion　coefficient,　viscosity,　thermal　conductivity,　and　electrical　conductivity　of　CF4,　C2F6,　and　C3F8plasmas　are　obtained　by　using　the　Chapman-Enskog　method　expanded　up　to　the　third-order　approximation　(second-order　for　viscosity).　The　most　recent　data　on　potential　interactions　and　elastic　differential　cross　sections　for　interacting　particles　were　utilized.　The　calculations,　which　assume　local　thermodynamic　equilibrium,　are　performed　at　atmospheric　pressure　in　the　temperature　range　from　300　to　30　000　K.　Our　results　can　provide　reliable　reference　data　for　the　further　simulation　to　study　the　relevant　plasmas　behavior.　©　2011　IEEE.