Full　aperture　rapid　planar　polishing　(RPP)　equipment　has　been　widely　used　in　the　field　of　optical　processing,　which　requires　high　precision　and　stability　of　the　polishing　shaft.　With　high　stability　and　sustainability　of　precision,　the　aerostatic　bearing　is　the　potential　technology　for　RPP　machine.　To　meet　the　needs　of　RPP　machine,　Fluent　was　used　to　analyze　the　load-bearing　characteristics　of　high-precision　aerostatic　bearing.　Based　on　the　simulated　results,　the　parameter　optimization　design　for　porous　aerostatic　bearing　was　conducted　to　get　better　load-bearing　characteristics,　including　bearing　capacity,　static　stiffness　and　gas　consumption.　The　influence　of　air　supply　pressure,　porous　material　thickness　and　film　thickness　on　bearing　characteristics　were　studied,　and　the　simulation　analysis　was　performed　to　get　the　optimal　design　parameters　for　aerostatic　bearing.　The　simulated　results　show　that　the　designed　high-precision　aerostatic　bearing　can　satisfy　the　requirements　of　RPP　machine.　©　COPYRIGHT　SPIE.　Downloading　of　the　abstract　is　permitted　for　personal　use　only.