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Author:

Huang, Linya (Huang, Linya.) | Zhao, Libo (Zhao, Libo.) | Tan, Renjie (Tan, Renjie.) | Lu, Dejiang (Lu, Dejiang.) | Yang, Ping (Yang, Ping.) | Jiang, Zhuangde (Jiang, Zhuangde.)

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Abstract:

This paper presents a micromachined piezoelectric resonator based on microcantilever with out-of-plane vibration for liquid density and viscosity determination. The microcantilever mainly contained a T-beam and four piezoresistive beams, which has significantly different vibration modes in liquid compared with fundamental plate microcantilever. The focus was set on 2nd out-of-plane vibrational mode, excited in a novel wave-shaped operation mode in liquid media. Finite element simulations were performed to optimize the operation mode and analyze the resonance characteristics. A high quality factor of 223 was achieved in cyclohexane at 71 kHz, and the sensitivity was calculated by four organic liquids, and 34 Hz/$\left(\mathbf{k g} \cdot \mathbf{m}^{-3}\right)$ was achieved. The results indicated that the proposed novel resonator with wave-shaped mode reached high quality factor as well as high sensitivity in liquids measurements. © 2020 IEEE.

Keyword:

Crystal resonators Density of liquids Liquids Piezoelectricity Resonators Vibrations (mechanical) Viscosity Viscosity measurement

Author Community:

  • [ 1 ] [Huang, Linya]Xi'An Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an, China
  • [ 2 ] [Zhao, Libo]Xi'An Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an, China
  • [ 3 ] [Tan, Renjie]Xi'An Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an, China
  • [ 4 ] [Lu, Dejiang]Xi'An Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an, China
  • [ 5 ] [Yang, Ping]Xi'An Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an, China
  • [ 6 ] [Jiang, Zhuangde]Xi'An Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an, China

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Year: 2020

Page: 313-316

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

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Chinese Cited Count:

30 Days PV: 1

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