Indexed by:
Abstract:
A diamond-based field effect transistor with LaB6/Al2O3 bilayer has been fabricated. Al2O3 and LaB6 layer were deposited by atomic-layer-deposition and electron beam evaporation system, respectively. The LaB6/Al2O3 bilayer shows a high dielectric constant (29.8). The leakage current density of LaB6/Al2O3 diamond metal-insulator-semiconductor field effect transistor keeps lower than 1 × 10−6 A cm−2 when the gate bias changed from 5 V to −5 V. This device operates in a p-type depletion mode, whose maximum drain-source current, threshold voltage, maximum transconductance, effective mobility and sheet hole density are determined to be −73.8 mA·mm−1, 2.2 V, 10.4 mS·mm−1,128 cm2·V−1·s−1, and 3.2 × 1013 cm−2, respectively. © 2021
Keyword:
Reprint Author's Address:
Email:
Source :
Diamond and Related Materials
ISSN: 0925-9635
Year: 2021
Volume: 120
3 . 3 1 5
JCR@2020
ESI Discipline: MATERIALS SCIENCE;
ESI HC Threshold:36
CAS Journal Grade:3
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 3
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1