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Author:

He, Shi (He, Shi.) | Wang, Yan-Feng (Wang, Yan-Feng.) | Chen, Genqiang (Chen, Genqiang.) | Zhang, Minghui (Zhang, Minghui.) | Wang, Wei (Wang, Wei.) | Chang, Xiaohui (Chang, Xiaohui.) | Li, Qi (Li, Qi.) | Zhang, Qianwen (Zhang, Qianwen.) | Zhu, Tianfei (Zhu, Tianfei.) | Wang, Hong-Xing (Wang, Hong-Xing.)

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Abstract:

A diamond-based field effect transistor with LaB6/Al2O3 bilayer has been fabricated. Al2O3 and LaB6 layer were deposited by atomic-layer-deposition and electron beam evaporation system, respectively. The LaB6/Al2O3 bilayer shows a high dielectric constant (29.8). The leakage current density of LaB6/Al2O3 diamond metal-insulator-semiconductor field effect transistor keeps lower than 1 × 10−6 A cm−2 when the gate bias changed from 5 V to −5 V. This device operates in a p-type depletion mode, whose maximum drain-source current, threshold voltage, maximum transconductance, effective mobility and sheet hole density are determined to be −73.8 mA·mm−1, 2.2 V, 10.4 mS·mm−1,128 cm2·V−1·s−1, and 3.2 × 1013 cm−2, respectively. © 2021

Keyword:

Alumina Aluminum oxide Atomic layer deposition Diamonds Drain current Hole mobility Hydrogen Lanthanum compounds Leakage currents Metal insulator boundaries MOSFET devices Threshold voltage

Author Community:

  • [ 1 ] [He, Shi]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 2 ] [He, Shi]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 3 ] [Wang, Yan-Feng]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 4 ] [Wang, Yan-Feng]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 5 ] [Chen, Genqiang]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 6 ] [Chen, Genqiang]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 7 ] [Zhang, Minghui]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 8 ] [Zhang, Minghui]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 9 ] [Wang, Wei]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 10 ] [Wang, Wei]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 11 ] [Chang, Xiaohui]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 12 ] [Chang, Xiaohui]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 13 ] [Li, Qi]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 14 ] [Li, Qi]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 15 ] [Zhang, Qianwen]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 16 ] [Zhang, Qianwen]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 17 ] [Zhu, Tianfei]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 18 ] [Zhu, Tianfei]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 19 ] [Wang, Hong-Xing]Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 20 ] [Wang, Hong-Xing]Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China

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Source :

Diamond and Related Materials

ISSN: 0925-9635

Year: 2021

Volume: 120

3 . 3 1 5

JCR@2020

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:36

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 3

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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