Glass-bonded　porous　silicon　carbide　ceramics　were　fabricated　by　conventional　method.　The　porosity　and　pore　size　could　be　tailored　by　changing　the　glass　content　and　particle　size　of　silicon　carbide　starting　powder.　The　influence　of　microstructure　on　the　gas　permeability　and　the　adsorption　force　between　chucking　work-pieces　and　porous　SiC　ceramic　vacuum　chuck　was　investigated.　The　permeability　increased　with　the　increase　of　porosity　and　average　pore　diameter.　High　permeability　(1.45-6.53　x　10(-12)　m(2))　of　the　porous　SiC　ceramics　with　a　porosity　of　32.1-64.7%　could　be　achieved.　Compared　with　porosity,　pore　size　had　a　dominant　effect　on　the　permeability　and　adsorption　force.　The　samples　with　the　same　porosity　but　smaller　average　pore　size　exhibited　lower　permeability　and　much　higher　adsorption　force.　The　adsorption　force　of　porous　SiC　ceramics　was　dependent　on　both　microstructure　and　permeability.　The　P1000V70　sample　with　a　pressure　drop　(Delta　P)　of　0.055　MPa　and　permeability　of　1.94　x　10(-12)　m(2)　exhibited　the　highest　adsorption　force　of　196　N/cm(2).　(C)　2014　Elsevier　Ltd　and　Techna　Group　S.r.l.　All　rights　reserved.