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Author:

Wang, Xuewen (Wang, Xuewen.) | Cui, Jianlei (Cui, Jianlei.) | Yin, Hailong (Yin, Hailong.) | Wang, Zhijun (Wang, Zhijun.) | He, Xiaoqiao (He, Xiaoqiao.) | Mei, Xuesong (Mei, Xuesong.)

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SCIE Scopus Web of Science

Abstract:

Diffraction limit has been the constraint of the nanostructure fabrication. Because the scanning near-field optical microscopy (SNOM) can work in the evanescent near-field region, its application in nano-processing has received extensive attention from researchers globally. In this paper, we combined nanosecond laser with cantilevered SNOM probe. Utilizing the high precision of the confinement and enhancement effect of probe tip and the high instantaneous energy of the laser, we realized nanostructure fabrication and in situ detection on Au nano-film. Feature sizes down to 47 nm full width at half maximum were fabricated. We investigated the laser propagation through the SNOM tip aperture and the light field intensity distribution on the surface of substrate theoretically. The calculation results demonstrate that the laser is highly restricted within the SNOM aperture and enhanced on the exit plane at the rim of aperture. After the transmission, the light field intensity distribution on the surface of the Au nano-film was enhanced due to the localized surface plasmon resonance. The thermal distribution on the surface of Au nano-film indicates that the peak of the temperature distribution appeared at the surface right underneath the center of the aperture. It is proved that the simulation results are consistent with the experimental results.

Keyword:

cantilevered SNOM probe nanosecond laser nanostructure fabrication near-field processing

Author Community:

  • [ 1 ] [Wang, Xuewen]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 2 ] [Cui, Jianlei]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 3 ] [Yin, Hailong]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 4 ] [Mei, Xuesong]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 5 ] [Cui, Jianlei]Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Peoples R China
  • [ 6 ] [Wang, Zhijun]Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Peoples R China
  • [ 7 ] [He, Xiaoqiao]City Univ Hong Kong, Dept Architecture & Civil Engn, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China

Reprint Author's Address:

  • J. Cui;;State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, 710049, China;;email: cjlxjtu@mail.xjtu.edu.cn;;

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Source :

NANOTECHNOLOGY

ISSN: 0957-4484

Year: 2023

Issue: 7

Volume: 34

3 . 8 7 4

JCR@2020

ESI Discipline: MATERIALS SCIENCE;

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 1

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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