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Author:

Cheng, Rongjun (Cheng, Rongjun.) | Zhao, Yulong (Zhao, Yulong.) (Scholars:赵玉龙) | Li, Cun (Li, Cun.) | Li, Bo (Li, Bo.) | Zhang, Qi (Zhang, Qi.)

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Abstract:

A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self-excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short-term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short-term drift <14 ppm in the operating range of -10 approximate to 10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement.

Keyword:

crystal resonators diaphragms double enhancement beam electronics packaging finite element analysis finite element method micromachined diaphragm micromachined resonant pressure sensor micromachining micropressure measurement microsensors piezoelectric excitation piezoelectric sensor piezoelectric transducers pressure-10 kPa to 10 kPa pressure sensors Q-factor measurement quality factor quartz resonator self-excitation circuit design temperature 293 K to 298 K

Author Community:

  • [ 1 ] [Cheng, Rongjun; Zhao, Yulong; Li, Cun; Li, Bo; Zhang, Qi] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 2 ] [Cheng, Rongjun]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 3 ] [Zhao, Yulong]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 4 ] [Li, Cun]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 5 ] [Li, Bo]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 6 ] [Zhang, Qi]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China

Reprint Author's Address:

  • 赵玉龙

    Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China.

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Source :

MICRO & NANO LETTERS

ISSN: 1750-0443

Year: 2016

Issue: 6

Volume: 11

Page: 326-331

0 . 7 2 3

JCR@2016

1 . 1 0 2

JCR@2020

ESI Discipline: PHYSICS;

ESI HC Threshold:140

JCR Journal Grade:3

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 4

SCOPUS Cited Count: 6

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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