Indexed by:
Abstract:
A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self-excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short-term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short-term drift <14 ppm in the operating range of -10 approximate to 10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement.
Keyword:
Reprint Author's Address:
Email:
Source :
MICRO & NANO LETTERS
ISSN: 1750-0443
Year: 2016
Issue: 6
Volume: 11
Page: 326-331
0 . 7 2 3
JCR@2016
1 . 1 0 2
JCR@2020
ESI Discipline: PHYSICS;
ESI HC Threshold:140
JCR Journal Grade:3
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 4
SCOPUS Cited Count: 6
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 7
Affiliated Colleges: