For　the　purpose　of　measuring　the　mechanical　properties　of　MEMS　materials,　a　novel　integrated　instrument　called　the　Micro-load　and　displacement　tester　(MLDT)　characterized　by　long-range　and　high-resolution　is　developed.　The　loading　mechanism　of　the　tester　is　designed　to　be　a　monolithic　two-stage　flexure　hinged　structure　due　to　measurement　needs.　In　order　to　realize　maximum　output　displacement　more　than　50　mu　m　and　output　force　more　than　IN　of　the　first-stage,　a　flexure　hinged　micro-displacement　amplifier　driven　by　piezoelectric　(PZT)　actuator　is　designed,　whose　structural　parameters　are　determined　by　means　of　the　genetic　algorithm　(GA)　optimization　method.　A　finite　element　(FE)　model　about　the　amplifier　is　established　and　FE　analysis　was　performed.　Some　tests　are　carried　out　to　an　amplifier　prototype,　which　is　fabricated　with　Electro-discharge　machining　(EDM)　technique.　Experimental　results　show　that　the　maximum　output　displacement　can　reach　53.12　mu　m　and　the　displacement　resolution　is　less　than　10　nm,　which　is　consistent　closely　with　the　FE　prediction　and　satisfies　the　loading　requirements.