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Abstract:
A method to quantitatively evaluate the TEM (transmission electron microscopy) image quality is proposed by calculating the point spread function equivalent area (the area of independent variable region whose normalized point spread function value is not less than 0.7071). The tilt series of practical ultra-high-voltage TEM images for three-dimensional reconstruction is analyzed and the quantitative relationship between TEM image quality and specimen tilt angle is acquired. Followed the single-axis tilting projection collection, the image quality is worsened with the increase of the specimen tilt angle and especially for the tilt angle larger that 60° the quality declines acutely. The point spread function equivalent area at 30°, 60° and 70° is 2.5, 4.5 and 11.7 times as wider as that at 0°, respectively. This effect restricts to improve the three-dimensional reconstruction resolution by increasing the specimen tilt range and suggests an optimum tilt range for the specimen in the three-dimensional reconstruction form TEM images.
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Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University
ISSN: 0253-987X
Year: 2003
Issue: 10
Volume: 37
Page: 1063-1066
Cited Count:
WoS CC Cited Count: 1
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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Chinese Cited Count:
30 Days PV: 0
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