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Author:

Yang, Chao (Yang, Chao.) | Zhang, Haibo (Zhang, Haibo.) | Takaoka, Akio (Takaoka, Akio.)

Indexed by:

Scopus EI CSCD PKU SCOPUS

Abstract:

A method to quantitatively evaluate the TEM (transmission electron microscopy) image quality is proposed by calculating the point spread function equivalent area (the area of independent variable region whose normalized point spread function value is not less than 0.7071). The tilt series of practical ultra-high-voltage TEM images for three-dimensional reconstruction is analyzed and the quantitative relationship between TEM image quality and specimen tilt angle is acquired. Followed the single-axis tilting projection collection, the image quality is worsened with the increase of the specimen tilt angle and especially for the tilt angle larger that 60° the quality declines acutely. The point spread function equivalent area at 30°, 60° and 70° is 2.5, 4.5 and 11.7 times as wider as that at 0°, respectively. This effect restricts to improve the three-dimensional reconstruction resolution by increasing the specimen tilt range and suggests an optimum tilt range for the specimen in the three-dimensional reconstruction form TEM images.

Keyword:

Image quality Point spread function Three-dimensional reconstruction Transmission electron microscopy

Author Community:

  • [ 1 ] [Zhang, Haibo]Xi'an Jiaotong University, Department of Electronic Science and Technology,Xi'an,China
  • [ 2 ] [Takaoka, Akio]Osaka University, Research Center for Ultra-High Voltage Electron Microscopy,Suita,Japan

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Source :

Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

ISSN: 0253-987X

Year: 2003

Issue: 10

Volume: 37

Page: 1063-1066

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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