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Author:

Ma, Yuan-Xiao (Ma, Yuan-Xiao.) | Han, Chuan-Yu (Han, Chuan-Yu.) | Lai, P.T. (Lai, P.T..)

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Abstract:

Pentacene organic thin-film transistor (OTFT) using Pd as gate electrode is proposed, with high-k LaZrO as gate dielectric. The Pd film is prepared by e-beam evaporation and then the LaZrO film is deposited by reactive sputtering in Ar/O2ambience followed by an annealing in N2 at 400 °C. The OTFT achieves an obvious increase in carrier mobility (to 1.02 cm2/V·s), as compared with its counterpart with heavily-doped silicon gate (0.23 cm2/V·s). Moreover, both samples with LaZrO gate dielectric show higher carrier mobility than a sample with La2O3gate dielectric and Pd gate electrode. © 2016 IEEE.

Keyword:

E beam evaporation Gate electrodes Heavily doped silicons High- k Metal gate Organic thin film transistors Pd gates Pentacenes

Author Community:

  • [ 1 ] [Ma, Yuan-Xiao;Lai, P.T.]Department of Electrical and Electronic Engineering, University of Hong Kong, Hong Kong Island, Hong Kong
  • [ 2 ] [Han, Chuan-Yu]School of Microelectronics, Xi'an Jiao Tong University, Xi'an, China

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Source :

2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2016 - Proceedings

ISSN: 9781467397179

Year: 2016

Publish Date: July 31, 2017

Page: 974-977

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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