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Author:

Ren, Juan (Ren, Juan.) | Anurakparadorn, Kanat (Anurakparadorn, Kanat.) | Jiang, Zhuangde (Jiang, Zhuangde.) (Scholars:蒋庄德) | Wei, Xueyong (Wei, Xueyong.) (Scholars:韦学勇)

Indexed by:

CPCI-S Scopus EI

Abstract:

This paper evaluates the influence of the geometry design on the sensitivity of SAW (surface acoustic wave) pressure sensors. The SAW propagation characteristics on the pressurized ST-x quartz diaphragm are simulated through the finite element analysis. The pressure sensitivities for different sensor configurations are obtained by studying the resonance frequency over a wide range of the operating pressure. It is found that the estimated sensitivity is almost linear with the frequency and accordingly the pressure sensitivity can be improved effectively by increasing the resonance frequency of the SAW resonators. Meanwhile, the simulation results show that a higher sensitivity can be achieved by the proper design of the number of IDT fingers, and the selection of the resonator location.

Keyword:

finite element modeling resonance frequency SAW pressure sensor sensitivity ST-x quartz

Author Community:

  • [ 1 ] [Ren, Juan; Anurakparadorn, Kanat; Jiang, Zhuangde; Wei, Xueyong] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 2 ] [Ren, Juan]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 3 ] [Anurakparadorn, Kanat]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 4 ] [Jiang, Zhuangde]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 5 ] [Wei, Xueyong]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China

Reprint Author's Address:

  • 韦学勇

    Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China.

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Source :

2016 IEEE International Frequency Control Symposium (IFCS)

ISSN: 1075-6787

Year: 2016

Page: 421-424

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 5

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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