With　greater　optical　penetration　depth　and　lower　ablation　threshold　fluence,　it　is　difficult　to　directly　fabricate　large　scales　of　laser-induced　periodic　surface　structures　(LIPSSs)　on　indium-tin-oxide　(ITO)　films.　This　study　proposed　an　approach　to　obtain　optimized　LIPSSs　by　sputtering　an　Au　thin　film　on　the　ITO　film　surface.　The　concept　behind　the　proposal　is　that　the　upper　layer　of　the　thin　Au　film　can　cause　surface　energy　aggregation,　inducing　the　initial　ripple　structures.　The　ripples　deepened　and　become　clear　with　lower　energy　due　to　optical　trapping.　The　effective　mechanism　of　Au　film　was　analyzed　and　verified　by　a　series　of　experiments.　Linear　sweep,　parallel　to　the　laser　polarization　direction,　was　performed　using　a　Nd:　VAN　laser　system　with　10-ps　Q-switched　pulse,　at　a　central　wavelength　of　532　nm,　with　a　repetition　rate　of　1　kHz.　The　complete　and　clear　features　of　the　nanostructures,　obtained　with　the　periods　of　approximately　320　nm,　were　observed　on　ITO　films　with　proper　laser　fluence　and　scanning　speed.　The　depth　of　ripples　was　varying　in　the　range　of　15-65　nm　with　clear　and　coherent　ITO　films.　The　preferred　efficiency　of　fabricating　nanostructures　and　the　excellent　results　were　obtained　at　a　scanning　speed　of　2.5　mm/s　and　a　fluence　of　0.189　J/cm(2).　In　this　way,　the　ablation　and　shedding　of　ITO　films　was　successfully　avoided.　Thus,　the　proposed　technique　can　be　considered　to　be　a　promising　method　for　the　laser　machining　of　special　nonmetal　films.