Indexed by:
Abstract:
In this study, diamond pseudo-vertical architecture Schottky barrier diodes (PVSBDs) through the patterning tungsten growth method have been investigated. The forward current density is 16A/cm(2) at 5V, and a rectification ratio is more than 5 orders of magnitude at +/- 5V for diamond PVSBD. The reverse breakdown voltage is 640 V, and the corresponding electrical field is 4.57MV/cm. These results are obtained by patterning tungsten (W) on the diamond surface as a blocking layer and growing a diamond epitaxial layer on the uncovered zone. A W/diamond ohmic contact was formed during the diamond epitaxial layer growth process. An aluminum film was used as a Schottky contact. Overall, the results illustrate that W patterned growth to fabricate PVSBD is efficient. Published by AIP Publishing.
Keyword:
Reprint Author's Address:
Email:
Source :
APPLIED PHYSICS LETTERS
ISSN: 0003-6951
Year: 2018
Issue: 9
Volume: 112
3 . 5 2 1
JCR@2018
3 . 7 9 1
JCR@2020
ESI Discipline: PHYSICS;
ESI HC Threshold:103
JCR Journal Grade:1
CAS Journal Grade:3
Cited Count:
WoS CC Cited Count: 10
SCOPUS Cited Count: 15
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
Affiliated Colleges: