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Author:

Kang Yongfeng (Kang Yongfeng.) | Wei Momo (Wei Momo.) | Zhao Jingyi (Zhao Jingyi.)

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Abstract:

A Differential algebraic method is of an effective technique in computer numerical analysis. It implements conveniently differentiation up to arbitrary high order, based on the nonstandard analysis. In this paper, the differential algebra (DA) method has been employed to compute the high order aberrations up to the fifth order of electron lenses with quadrupole and octupole corrector whose electric/magnetic fields are in the forms of discrete arrays, for example, the files computed by FEM or FDM method. The quadrupole and octupole electro-magnetic fields of arbitrary point are obtained by local analytic expressions, and then field potentials are transformed into new forms which can be operated in the DA calculation. The program has been developed and tested as well. The geometric and chromatic aberrations coefficients up to fifth order of electron lenses with quadrupole and octupole corrector are calculated by the developed program.

Keyword:

Differential algebra High order aberration Octupole Quadrupole

Author Community:

  • [ 1 ] [Wei Momo;Zhao Jingyi]Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China.
  • [ 2 ] [Kang Yongfeng]Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China. Electronic address: yfkang@mail.xjtu.edu.cn.
  • [ 3 ] [Kang Yongfeng; Wei Momo; Zhao Jingyi] Xi An Jiao Tong Univ, Dept Elect Sci & Technol, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Shaanxi, Peoples R China
  • [ 4 ] [Kang Yongfeng]Xi An Jiao Tong Univ, Dept Elect Sci & Technol, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Shaanxi, Peoples R China
  • [ 5 ] [Wei Momo]Xi An Jiao Tong Univ, Dept Elect Sci & Technol, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Shaanxi, Peoples R China
  • [ 6 ] [Zhao Jingyi]Xi An Jiao Tong Univ, Dept Elect Sci & Technol, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Shaanxi, Peoples R China

Reprint Author's Address:

  • Xi An Jiao Tong Univ, Dept Elect Sci & Technol, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Shaanxi, Peoples R China.

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Source :

Ultramicroscopy

ISSN: 1879-2723

Year: 2018

Volume: 195

Page: 21-24

2 . 6 4 4

JCR@2018

2 . 6 8 9

JCR@2020

ESI Discipline: CHEMISTRY;

ESI HC Threshold:135

JCR Journal Grade:2

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 5

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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