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学者姓名：韦学勇
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Abstract ：
Joule heating is more widely existed in micromechanical resonators, and is also an innovative approach for the implementation of mechanical resonator in a broad range of fields such as timing applications, filters and sensors. However, the physical mechanism by which Joule heating affects the performance of resonator has not been thoroughly studied, and the ability to accurately control heat and suppress thermal noise in micro-and nanomechanical resonators remains a key challenge limiting practical applications as well. In this paper, we established the theoretical model based on temperature variation to explain the physical mechanism of the Joule heating effect on the performance of resonator. In the experiment, when the drain current increased from 3.35 mA to 11.62 mA, the dynamic range enhanced by 20.3 dB, which verified that the drain current can be conducive to enhance the signal-to-noise ratio (SNR) of resonator. Intuitively, adding Joule heating will make more thermal noise for the system, which will deteriorate the frequency stability of oscillator. However, there was a counterintuitive phenomenon in piezoresistive oscillator. Contrary to the capacitive oscillator, for a self-sustained mechanical oscillator based on piezoresistive detection method, the frequency stability of oscillator will be improved as the drain current increases. The experimental result showed that the Allan deviation have improved with a slope of -11.22ppb/mA. Our finding revealed the potential of joule heating for applications in high dynamic range sensors and time reference oscillators, as well as the fundamental study of the temperature variation and energy dissipation in micro and nano systems. (c) 2021 Elsevier B.V. All rights reserved.
Keyword ：
Drain current Dynamic range Frequency stability Joule heating effect Piezoresistive oscillator
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| GB/T 7714 | Xu, Liu , Ren, Juan , Jiang, Zhuangde et al. Effect of Joule heating on the performance of micromechanical piezoresistive oscillator [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 333 . |
| MLA | Xu, Liu et al. "Effect of Joule heating on the performance of micromechanical piezoresistive oscillator" . | SENSORS AND ACTUATORS A-PHYSICAL 333 (2022) . |
| APA | Xu, Liu , Ren, Juan , Jiang, Zhuangde , Jia, Yu , Wei, Xueyong . Effect of Joule heating on the performance of micromechanical piezoresistive oscillator . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 333 . |
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Abstract ：
This paper presents a new type of wide bandwidth real-time micromechanical optical power meter based on a micro silicon disk resonator. The resonant frequency of micromechanical resonator is ultrasensitive with its heat absorption, which is verified by both simulation and experiment, including the open-loop and closed-loop testings. The resonant frequency of both the elliptical mode and contour mode of the disk resonator will shift when lasers of 488 nm and 1550 nm with different power are irradiated. The detector shows different heat absorption efficiency depending on the wavelength of the measured optical signal. The heat absorption efficiency was tested with 488 nm and 1550 nm laser irradiation in our experiments. According to our closed-loop experiments, the resolution of our detector could reach 78 nW, and a high linearity of R-2 = 0.99605 for the 488 nm target optical signal.
Keyword ：
MEMS Micromechanical resonator Optical power meter Sensors
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| GB/T 7714 | Chen, Xuan , Wang, Hairong , Wei, Xueyong . A wide bandwidth real-time MEMS optical power meter with high resolution and linearity [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
| MLA | Chen, Xuan et al. "A wide bandwidth real-time MEMS optical power meter with high resolution and linearity" . | SENSORS AND ACTUATORS A-PHYSICAL 339 (2022) . |
| APA | Chen, Xuan , Wang, Hairong , Wei, Xueyong . A wide bandwidth real-time MEMS optical power meter with high resolution and linearity . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
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Abstract ：
Synchronization, as a unique phenomenon, has been extensively studied in biology, chaotic systems, nonlinear dynamics, quantum information, and other fields. Benefiting from the characteristics of frequency amplification, noise suppression, and stability improvement, synchronization has been gradually applied in sensing, communication, time keeping, and other applications. In the sensing field, synchronization provides a new strategy to improve the performance of sensors. However, the performance improvement is only effective within the synchronization range, and the narrow synchronization range has become a great challenge for the wide application of synchronization-enhanced sensing mechanism. Here, we propose a frequency automatic tracking system (FATS) to widen the synchronization range and track the periodic acceleration signals by adjusting the frequency of the readout oscillator in real time. In addition, a high-precision frequency measurement system and fast response control system based on FPGA (Field Programmable Gate Array) are built, and the tracking performance of the FATS for static and dynamic external signals is analyzed to obtain the optimal control parameters. Experimental results show that the proposed automatic tracking system is capable of static acceleration measurement, the synchronization range can be expanded to 975 Hz, and the relocking time is shortened to 93.4 ms at best. By selecting the optimal PID parameters, we achieve a faster relocking time to meet the requirements of low-frequency vibration measurements, such as seismic detection and tidal monitoring.
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| GB/T 7714 | Xu, Liu , Qi, Yonghong , Jiang, Zhuangde et al. Fast frequency relocking for synchronization enhanced resonant accelerometer [J]. | MICROSYSTEMS & NANOENGINEERING , 2022 , 8 (1) . |
| MLA | Xu, Liu et al. "Fast frequency relocking for synchronization enhanced resonant accelerometer" . | MICROSYSTEMS & NANOENGINEERING 8 . 1 (2022) . |
| APA | Xu, Liu , Qi, Yonghong , Jiang, Zhuangde , Wei, Xueyong . Fast frequency relocking for synchronization enhanced resonant accelerometer . | MICROSYSTEMS & NANOENGINEERING , 2022 , 8 (1) . |
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Abstract ：
MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Perot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 mu g/root Hz@1 Hz to 330 ng/root Hz@1 Hz.
Keyword ：
Fabry-Perot interference MEMS seismic accelerometer noise equivalent acceleration
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| GB/T 7714 | Zhao, Minghui , Qi, Yonghong , Zhang, Xiaopeng et al. Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer [J]. | IEEE SENSORS JOURNAL , 2022 , 22 (1) : 365-372 . |
| MLA | Zhao, Minghui et al. "Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer" . | IEEE SENSORS JOURNAL 22 . 1 (2022) : 365-372 . |
| APA | Zhao, Minghui , Qi, Yonghong , Zhang, Xiaopeng , Li, Bo , Jiang, Zhuangde , Wei, Xueyong . Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer . | IEEE SENSORS JOURNAL , 2022 , 22 (1) , 365-372 . |
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Abstract ：
In this paper, we report the frequency comb response experimentally and analytically in a rhombic micro-resonator with parametrical modulation. When the electrostatically actuated rhombic micro-resonator is modulated axially by a low-frequency periodic excitation, a comb-like vibration response with few equidistant positioned fingers in the frequency domain is observed. The finger spacing of frequency comb response is exactly consistent with modulation frequency and the number and amplitude of the fingers can be tuned by modulation strength. A mixed frequency comb with extra comb fingers is further generated when the resonator is modulated simultaneously by two different low-frequency excitation signals. By adjusting the relation of the two modulation frequencies, unequal spacing frequency combs are achieved for the first time, which leads to a more flexible tunability of the comb spacing for different applications. Theoretical analysis based on the dynamic model well explains the corresponding observations.
Keyword ：
Frequency comb Micro-resonator Nonlinear dynamics Parametrical modulation Vibration
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| GB/T 7714 | Wang, Xuefeng , Yang, Qiqi , Shi, Zhan et al. Frequency comb in a parametrically modulated micro-resonator [J]. | ACTA MECHANICA SINICA , 2022 , 38 (10) . |
| MLA | Wang, Xuefeng et al. "Frequency comb in a parametrically modulated micro-resonator" . | ACTA MECHANICA SINICA 38 . 10 (2022) . |
| APA | Wang, Xuefeng , Yang, Qiqi , Shi, Zhan , Huan, Ronghua , Zhu, Weiqiu , Jing, Xingjian et al. Frequency comb in a parametrically modulated micro-resonator . | ACTA MECHANICA SINICA , 2022 , 38 (10) . |
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Abstract ：
Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0–240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa. © 2022 Elsevier B.V.
Keyword ：
High precision; Performance calibration; Quartz resonator; Resonant pressure sensors
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| GB/T 7714 | Ren, Z. , Qi, Y. , Zhao, M. et al. A composite structure pressure sensor based on quartz DETF resonator [J]. | Sensors and Actuators A: Physical , 2022 , 346 . |
| MLA | Ren, Z. et al. "A composite structure pressure sensor based on quartz DETF resonator" . | Sensors and Actuators A: Physical 346 (2022) . |
| APA | Ren, Z. , Qi, Y. , Zhao, M. , Li, B. , Jing, W. , Wei, X. . A composite structure pressure sensor based on quartz DETF resonator . | Sensors and Actuators A: Physical , 2022 , 346 . |
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Abstract ：
The capture of locomotive small organisms is challenging but interesting. In this study, we developed a method to capture Paramecium with acoustic valve. Constructed by the focused surface acoustic waves (FSAW), acoustic valve can be used to block the dispersed phase in liquid flow. Under the joint action of acoustic radiation force and drag force, Paramecium can be successfully confined in a narrow space in the channel without losing its movement ability. By adjusting the applied voltage and the inlet pressure, the Paramecium can be allowed to pass, but the Paramecium cysts get captured. This acoustic device is potential in biochemical experiments, providing a new method for capturing or sorting micro swimmers.
Keyword ：
Acoustic valve Microfluidics Protozoan manipulation
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| GB/T 7714 | Qin, Xianming , Chen, Xuan , Li, Lei et al. Microfluidic acoustic valve for capturing locomotive microorganism without anesthesia [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 341 . |
| MLA | Qin, Xianming et al. "Microfluidic acoustic valve for capturing locomotive microorganism without anesthesia" . | SENSORS AND ACTUATORS A-PHYSICAL 341 (2022) . |
| APA | Qin, Xianming , Chen, Xuan , Li, Lei , Wang, Hairong , Wei, Xueyong . Microfluidic acoustic valve for capturing locomotive microorganism without anesthesia . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 341 . |
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Abstract ：
A facile acid vapor oxidation (AVO) method has been developed to grow highly round SnO2 nanospheres from 400 nm metal Sn thin films. This synthesis approach is able to directly grow nanostructures from a substrate in a simple reaction system involving the reaction of Sn film with the vapor generated from a hydrochloric acid solution in a Teflon-lined autoclave. A possible growth mechanism for the interesting SnO2 nanospheres has been proposed based on a series of time-dependent experiments. As-prepared SnO2 nanospheres have diameters around 150 nm. The influence of reacting time on the gas sensing properties of SnO2 was investigated by the detection of ethanol gas. The as-obtained SnO2 nanospheres are ultrasensitive to ethanol with a response of 1.49-50 ppb of ethanol at the low optimal working temperature of 170 degrees C, which shows the promising candidates for high performance chemical sensors. This work offers a facile, shape-controlled, and efficient route to synthesize complex SnO2 nanospheres for gas detection with high performance, including ultrahigh sensitivity, good selectivity, and reversibility. (C) 2022 Elsevier B.V. All rights reserved.
Keyword ：
AVO Ethanol Gas sensor Sensitivity SnO2 nanospheres
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| GB/T 7714 | Tian, Xin , Cao, Huitong , Wang, Hairong et al. Acid vapor oxidation growth of SnO2 nanospheres with ultra-high sensitivity to ethanol detection at low temperature [J]. | JOURNAL OF ALLOYS AND COMPOUNDS , 2022 , 905 . |
| MLA | Tian, Xin et al. "Acid vapor oxidation growth of SnO2 nanospheres with ultra-high sensitivity to ethanol detection at low temperature" . | JOURNAL OF ALLOYS AND COMPOUNDS 905 (2022) . |
| APA | Tian, Xin , Cao, Huitong , Wang, Hairong , Wang, Jiuhong , Wei, Xueyong , Wu, Xinyu . Acid vapor oxidation growth of SnO2 nanospheres with ultra-high sensitivity to ethanol detection at low temperature . | JOURNAL OF ALLOYS AND COMPOUNDS , 2022 , 905 . |
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Abstract ：
Controllable assembly from one-dimensional (1-D) and two-dimensional (2-D) nanoscale structures to threedimensional (3-D) complex nanostructures has attracted great interest. For the first time, nanorods and nano sheets were controllably assembled into 3-D SnO2 nanoflower architectures based on a facile and shape controlled acid vapor oxidation (AVO) method from the substrate in a simple reaction system. The as prepared 3-D SnO2 nanoflowers have diameters ranging from 625 to 875 nm and are self-assembled by many nanorods and nanosheets with diameters and thicknesses of 33 nm. The growth of SnO2 with different morphologies was studied by controlling the reaction temperature and hydrochloric acid concentration. Their application in gas sensing was evaluated, indicating that the 3-D SnO2 nanoflower-based sensor is ultrasensitive to ethanol with a response of 2.54-50 ppb at the optimal working temperature of 230 degrees C. This work offers a facile, shape-controlled, and efficient route to synthesize complex SnO2 nanoflowers for gas detection with high performance, including ultrahigh sensitivity, good selectivity, and reversibility.
Keyword ：
AVO Ethanol Gas sensing Nanorods Nanosheets SnO2 nanoflowers
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| GB/T 7714 | Tian, Xin , Cao, Huitong , Wei, Xueyong et al. Controllable acid vapor oxidation growth of complex SnO2 nanostructures for ultrasensitive ethanol sensing [J]. | CERAMICS INTERNATIONAL , 2022 , 48 (7) : 9229-9238 . |
| MLA | Tian, Xin et al. "Controllable acid vapor oxidation growth of complex SnO2 nanostructures for ultrasensitive ethanol sensing" . | CERAMICS INTERNATIONAL 48 . 7 (2022) : 9229-9238 . |
| APA | Tian, Xin , Cao, Huitong , Wei, Xueyong , Wang, Jiuhong , Wu, Xinyu , Wang, Hairong . Controllable acid vapor oxidation growth of complex SnO2 nanostructures for ultrasensitive ethanol sensing . | CERAMICS INTERNATIONAL , 2022 , 48 (7) , 9229-9238 . |
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Abstract ：
Resonant micromechanical charge sensor is widely studied, however, the performance is suffocated by nonlin-earity. Here, a sensing enhancement technique based on synchronization is proposed. Charge-sensing amplified by synchronization induced frequency locking of a ratio 9 in a couple of micromechanical oscillators separated over 1 m is demonstrated. One axial strain modulated DETF is working on its flexural mode to detect the electric charge. The sensing output oscillation frequency is injected into a high Q micro-machined disk oscillator via a coaxial cable to form synchronization. We show that the sensitivity of the disk oscillator outputs is improved up to 9 folds due to the frequency locking effect. Also, the equivalent detection frequency stability can be enhanced to 3 folds. The perturbation synchronizing signal can be transmitted over a long distance and may lead to ap-plications for enhancing sensor performance.
Keyword ：
Charge sensor Micromechanical oscillator Synchronization
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| GB/T 7714 | Pu, Dong , Wei, Xueyong , Zhu, Wenxin et al. Amplifying charge-sensing in micromechanical oscillators based on synchronization [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
| MLA | Pu, Dong et al. "Amplifying charge-sensing in micromechanical oscillators based on synchronization" . | SENSORS AND ACTUATORS A-PHYSICAL 339 (2022) . |
| APA | Pu, Dong , Wei, Xueyong , Zhu, Wenxin , Chen, Kai , Jiang, Zhuangde , Huan, Ronghua . Amplifying charge-sensing in micromechanical oscillators based on synchronization . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
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