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Design of SAW sensor for longitudinal strain measurement with improved sensitivity EI Scopus SCIE
期刊论文 | 2019 , 25 (1) , 351-359 | Microsystem Technologies
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Abstract :

This paper presents the design of a highly sensitive surface acoustic wave (SAW)-based sensor with novel structure for the longitudinal strain measurement. The sensor utilizes thin lithium niobate (LiNbO3) diaphragm as the sensing element rather than the bulk substrate. The application of the diaphragm effectively decreases the cross-sectional area of the strain sensitive element, and meanwhile reduces the resistance between the sensor and the specimen. The newly designed strain sensor is to operate around a frequency of 50 MHz. The insertion loss of − 12 dB and quality factor of 63 are obtained analytically from impulse-response model. The sensor performance with tensile testing of the steel beam is predicted by the finite element method. The prestressed eigenfrequency analysis is conducted with the COMSOL commercial software. The simulation shows the resonance frequency of the sensor shifts linearly with the strain induced in the testing beam. For the SAW sensor with traditional configuration applying 1 mm thick substrate, the strain sensitivity is obtained as 0.41 ppm/μΕ. For the sensor with the novel design employing thin diaphragm with the thickness of 200 μm, the strain sensitivity is increased to 0.83 ppm/μΕ. With the availability of the bulk micromachining of LiNbO3, the application of the piezoelectric diaphragm as sensing element in SAW strain sensor can be an alternative way to enhance the sensor sensitivity. © 2018 Springer-Verlag GmbH Germany, part of Springer Nature

Keyword :

Bulk- micromachining Commercial software Cross sectional area Eigenfrequency analysis Impulse response model Piezoelectric diaphragms Resonance frequencies Surface acoustic wave (SAW)

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GB/T 7714 Ren, Juan , Anurakparadorn, Kanat , Gu, Hairong et al. Design of SAW sensor for longitudinal strain measurement with improved sensitivity [J]. | Microsystem Technologies , 2019 , 25 (1) : 351-359 .
MLA Ren, Juan et al. "Design of SAW sensor for longitudinal strain measurement with improved sensitivity" . | Microsystem Technologies 25 . 1 (2019) : 351-359 .
APA Ren, Juan , Anurakparadorn, Kanat , Gu, Hairong , Zhao, Minghui , Wei, Xueyong . Design of SAW sensor for longitudinal strain measurement with improved sensitivity . | Microsystem Technologies , 2019 , 25 (1) , 351-359 .
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Micromechanical vibration absorber for frequency stability improvement of DETF oscillator SCIE
期刊论文 | 2019 , 29 (4) | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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This article explores a novel way to improve the frequency stability of micromechanical double-ended tuning fork (DETF) resonators. The aim of this work is to use a non-linear vibration absorber to improve the frequency stability of the oscillator. A vibration absorption device is set up on the oscillator to absorb part of the energy of the oscillator. The influence of the vibration absorber on the frequency stability is studied. The short-term frequency stability of the DETF oscillator can be improved from 378 ppb to 202 ppb by coupling it to a mechanical vibration absorber.

Keyword :

frequency stability coupled resonators oscillator micromechanical resonator MEMS

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GB/T 7714 Du, Jianshu , Wei, Xueyong , Ren, Juan et al. Micromechanical vibration absorber for frequency stability improvement of DETF oscillator [J]. | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2019 , 29 (4) .
MLA Du, Jianshu et al. "Micromechanical vibration absorber for frequency stability improvement of DETF oscillator" . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING 29 . 4 (2019) .
APA Du, Jianshu , Wei, Xueyong , Ren, Juan , Wang, Jiuhong , Huan, Ronghua . Micromechanical vibration absorber for frequency stability improvement of DETF oscillator . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2019 , 29 (4) .
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Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1 EI SCIE Scopus
期刊论文 | 2018 , 112 (1) | APPLIED PHYSICS LETTERS
WoS CC Cited Count: 3 SCOPUS Cited Count: 3
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In this Letter, synchronization of micromechanical oscillators with a frequency ratio of 3:1 is reported. Two electrically coupled piezoresistive micromechanical oscillators are built for the study, and their oscillation frequencies are tuned via the Joule heating effect to find out the synchronization region. Experimental results show that the larger coupling strength or bias driving voltage is applied and a wider synchronization region is obtained. Interestingly, however, the oscillator's frequency tunability is dramatically reduced from -809.1 Hz/V to -23.1 Hz/V when synchronization is reached. A nearly 10-fold improvement of frequency stability at 1 s is observed from one of the synchronized oscillators, showing a comparable performance of the other. The stable high order synchronization of micromechanical oscillators is helpful to design high performance resonant sensors with a better frequency resolution and a larger scale factor. Published by AIP Publishing.

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GB/T 7714 Pu, Dong , Wei, Xueyong , Xu, Liu et al. Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1 [J]. | APPLIED PHYSICS LETTERS , 2018 , 112 (1) .
MLA Pu, Dong et al. "Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1" . | APPLIED PHYSICS LETTERS 112 . 1 (2018) .
APA Pu, Dong , Wei, Xueyong , Xu, Liu , Jiang, Zhuangde , Huan, Ronghua . Synchronization of electrically coupled micromechanical oscillators with a frequency ratio of 3:1 . | APPLIED PHYSICS LETTERS , 2018 , 112 (1) .
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Phase switch in the stochastic response of a micromechanical beam resonator EI SCIE Scopus
期刊论文 | 2018 , 229 (5) , 2177-2187 | ACTA MECHANICA
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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In this paper, the phase switch in the stationary stochastic response induced by random disturbance is investigated in a micromechanical clamped-clamped beam resonator. First, a reduced-order stochastic dynamic model of the resonator involving the main sources of nonlinearities is developed based on the Galerkin decomposition method. Using stochastic averaging, a Fokker-Planck-Kolmogorov equation governing the stationary stochastic response is derived, from which the stationary probability density (SPD) is obtained analytically. Based on the qualitative change of the shape of SPD, the phase switch in the stationary motion of the resonator is observed for the first time. Then, the effects of various parameters including AC voltage, nonlinearity strength and random excitation intensity on the phase switch are examined. Furthermore, the critical values of the phase switch in the parameter plane are detected.

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GB/T 7714 Huan, R. H. , Pu, D. , Wei, X. Y. . Phase switch in the stochastic response of a micromechanical beam resonator [J]. | ACTA MECHANICA , 2018 , 229 (5) : 2177-2187 .
MLA Huan, R. H. et al. "Phase switch in the stochastic response of a micromechanical beam resonator" . | ACTA MECHANICA 229 . 5 (2018) : 2177-2187 .
APA Huan, R. H. , Pu, D. , Wei, X. Y. . Phase switch in the stochastic response of a micromechanical beam resonator . | ACTA MECHANICA , 2018 , 229 (5) , 2177-2187 .
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A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement EI SCIE PubMed Scopus
期刊论文 | 2018 , 18 (3) | SENSORS
SCOPUS Cited Count: 1
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Abstract :

With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor's sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm x 0.1 mm x 2 mu m and copper electrodes of 2 mu m thick are sputtered sequentially on the substrate, and a 25 mu m thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa(-1). The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.

Keyword :

detonation pressure manganin thin film MEMS technology microscale measurement ultra-high pressure sensor

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GB/T 7714 Zhang, Guodong , Zhao, Yulong , Zhao, Yun et al. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement [J]. | SENSORS , 2018 , 18 (3) .
MLA Zhang, Guodong et al. "A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement" . | SENSORS 18 . 3 (2018) .
APA Zhang, Guodong , Zhao, Yulong , Zhao, Yun , Wang, Xinchen , Wei, Xueyong , Ren, Wei et al. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement . | SENSORS , 2018 , 18 (3) .
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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees EI SCIE PubMed Scopus
期刊论文 | 2018 , 18 (2) | SENSORS
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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Abstract :

In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002 degrees in the whole measurement range from 0 degrees to 360 degrees.

Keyword :

double-ended tuning fork MEMS oscillator resonator tilt sensor

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GB/T 7714 Wang, Shudong , Wei, Xueyong , Weng, Yinsheng et al. A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees [J]. | SENSORS , 2018 , 18 (2) .
MLA Wang, Shudong et al. "A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees" . | SENSORS 18 . 2 (2018) .
APA Wang, Shudong , Wei, Xueyong , Weng, Yinsheng , Zhao, Yulong , Jiang, Zhuangde . A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees . | SENSORS , 2018 , 18 (2) .
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A MEMS resonant accelerometer for low-frequency vibration detection EI SCIE Scopus
期刊论文 | 2018 , 283 , 151-158 | Sensors and Actuators, A: Physical
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According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1 s. The static test showed that the resolution of our sensor was 13.8 μg. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5–5 Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications. © 2018 Elsevier B.V.

Keyword :

Cross-axis sensitivity Double-ended-tuning-fork resonators Dynamic performance Dynamic tests Inherent characteristics Low-frequency Low-frequency vibration MEMS resonant accelerometers

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GB/T 7714 Wang, Shudong , Wei, Xueyong , Zhao, Yulong et al. A MEMS resonant accelerometer for low-frequency vibration detection [J]. | Sensors and Actuators, A: Physical , 2018 , 283 : 151-158 .
MLA Wang, Shudong et al. "A MEMS resonant accelerometer for low-frequency vibration detection" . | Sensors and Actuators, A: Physical 283 (2018) : 151-158 .
APA Wang, Shudong , Wei, Xueyong , Zhao, Yulong , Jiang, Zhuangde , Shen, Yajing . A MEMS resonant accelerometer for low-frequency vibration detection . | Sensors and Actuators, A: Physical , 2018 , 283 , 151-158 .
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Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator EI SCIE
期刊论文 | 2018 , 28 (12) | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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In this paper, the effect of nonlinearity on axial force sensitivity is investigated in a T-shaped micromechanical tuning fork resonator. Firstly, a unified model of this resonator for both in-phase and anti-phase modes is established, in which the quadratic and cubic nonlinearities are considered. The validity of this proposed model is verified by the experimental results. Then, the effects of the axial force on the frequency shift and of the nonlinearity on the axial force sensitivity are analyzed theoretically and experimentally. The sensitivity to frequency shift caused by the axial force is observed to be slightly enhanced by soft spring nonlinearity. These results can be used to provide reference for some practical applications, e.g. electrometers, force sensors, etc.

Keyword :

anti-phase mode axial force sensitivity in-phase mode nonlinearity tuning fork resonator

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GB/T 7714 Wang, Xuefeng , Huan, Ronghua , Pu, Dong et al. Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator [J]. | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2018 , 28 (12) .
MLA Wang, Xuefeng et al. "Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator" . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING 28 . 12 (2018) .
APA Wang, Xuefeng , Huan, Ronghua , Pu, Dong , Wei, Xueyong . Effect of nonlinearity and axial force on frequency drift of a T-shaped tuning fork micro-resonator . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2018 , 28 (12) .
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Sensitivity enhancement of a resonant mass sensor based on internal resonance EI SCIE
期刊论文 | 2018 , 113 (22) | APPLIED PHYSICS LETTERS
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There exist numerous vibration modes in a resonant structure, and these modes can interact with each other. Here, the internal resonance between the fundamental mode and higher order modes is observed in a polyvinylidene fluoride piezoelectric membrane as a resonant mass sensor. Higher order modes draw energy from the fundamental one and vibrate at integer times of the fundamental mode's frequency. The resonance frequency shift of the fundamental mode can thus be magnified integer times through internal resonance. The sensitivity of the resonant mass sensor, defined by the resonance frequency shift caused by mass change, is enhanced based on this mechanism. The sensing characteristics are experimentally studied with a concentrated mass load attached to the sensor. The sensitivity improvement of directly using higher order modes and detecting the internal resonance response is tested and compared in our experiment. An 11 times sensitivity magnification is achieved with the internal resonance method, which has an obvious advantage over the higher order method. Published by AIP Publishing.

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GB/T 7714 Zhang, Tianyi , Wei, Xueyong , Jiang, Zhuangde et al. Sensitivity enhancement of a resonant mass sensor based on internal resonance [J]. | APPLIED PHYSICS LETTERS , 2018 , 113 (22) .
MLA Zhang, Tianyi et al. "Sensitivity enhancement of a resonant mass sensor based on internal resonance" . | APPLIED PHYSICS LETTERS 113 . 22 (2018) .
APA Zhang, Tianyi , Wei, Xueyong , Jiang, Zhuangde , Cui, Tianhong . Sensitivity enhancement of a resonant mass sensor based on internal resonance . | APPLIED PHYSICS LETTERS , 2018 , 113 (22) .
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Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance EI SCIE PubMed Scopus
期刊论文 | 2018 , 9 (1) | MICROMACHINES
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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Ultra-high pressure measurement has significant applications in various fields such as high pressure synthesis of new materials and ultra-high pressure vessel monitoring. This paper proposes a novel ultra-high pressure sensor combining a truncated-cone structure and a silicon-on-insulator (SOI) piezoresistive element for measuring the pressure up to 1.6 GPa. The truncated-cone structure attenuates the measured pressure to a level that can be detected by the SOI piezoresistive element. Four piezoresistors of the SOI piezoresistive element are placed along specific crystal orientation and configured as a Wheatstone bridge to obtain voltage signals. The sensor has an advantage of high-temperature resistance, in that the structure of the piezoresistive element can avoid the leakage current at high temperature and the truncated-cone structure separates the piezoresistive element from the heat environment. Furthermore, the upper surface diameter of the truncated-cone structure is designed to be 2 mm for the application of small scale. The results of static calibration show that the sensor exhibits a good performance in hysteresis and repeatability. The temperature experiment indicates that the sensor can work steadily at high temperature. This study would provide a better insight to the research of ultra-high pressure sensors with larger range and smaller size.

Keyword :

high-temperature resistance microelectromechanical systems (MEMS) technology silicon-on-insulator (SOI) piezoresistive element small size ultra-high pressure sensor

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GB/T 7714 Zhang, Guo-Dong , Zhao, Yu-Long , Zhao, Yun et al. Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance [J]. | MICROMACHINES , 2018 , 9 (1) .
MLA Zhang, Guo-Dong et al. "Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance" . | MICROMACHINES 9 . 1 (2018) .
APA Zhang, Guo-Dong , Zhao, Yu-Long , Zhao, Yun , Wang, Xin-Chen , Wei, Xue-Yong . Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance . | MICROMACHINES , 2018 , 9 (1) .
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