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学者姓名：韦学勇
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Abstract ：
This paper presents a new type of wide bandwidth real-time micromechanical optical power meter based on a micro silicon disk resonator. The resonant frequency of micromechanical resonator is ultrasensitive with its heat absorption, which is verified by both simulation and experiment, including the open-loop and closed-loop testings. The resonant frequency of both the elliptical mode and contour mode of the disk resonator will shift when lasers of 488 nm and 1550 nm with different power are irradiated. The detector shows different heat absorption efficiency depending on the wavelength of the measured optical signal. The heat absorption efficiency was tested with 488 nm and 1550 nm laser irradiation in our experiments. According to our closed-loop experiments, the resolution of our detector could reach 78 nW, and a high linearity of R-2 = 0.99605 for the 488 nm target optical signal.
Keyword ：
MEMS Micromechanical resonator Optical power meter Sensors
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| GB/T 7714 | Chen, Xuan , Wang, Hairong , Wei, Xueyong . A wide bandwidth real-time MEMS optical power meter with high resolution and linearity [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
| MLA | Chen, Xuan 等. "A wide bandwidth real-time MEMS optical power meter with high resolution and linearity" . | SENSORS AND ACTUATORS A-PHYSICAL 339 (2022) . |
| APA | Chen, Xuan , Wang, Hairong , Wei, Xueyong . A wide bandwidth real-time MEMS optical power meter with high resolution and linearity . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
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Abstract ：
Synchronization, as a unique phenomenon, has been extensively studied in biology, chaotic systems, nonlinear dynamics, quantum information, and other fields. Benefiting from the characteristics of frequency amplification, noise suppression, and stability improvement, synchronization has been gradually applied in sensing, communication, time keeping, and other applications. In the sensing field, synchronization provides a new strategy to improve the performance of sensors. However, the performance improvement is only effective within the synchronization range, and the narrow synchronization range has become a great challenge for the wide application of synchronization-enhanced sensing mechanism. Here, we propose a frequency automatic tracking system (FATS) to widen the synchronization range and track the periodic acceleration signals by adjusting the frequency of the readout oscillator in real time. In addition, a high-precision frequency measurement system and fast response control system based on FPGA (Field Programmable Gate Array) are built, and the tracking performance of the FATS for static and dynamic external signals is analyzed to obtain the optimal control parameters. Experimental results show that the proposed automatic tracking system is capable of static acceleration measurement, the synchronization range can be expanded to 975 Hz, and the relocking time is shortened to 93.4 ms at best. By selecting the optimal PID parameters, we achieve a faster relocking time to meet the requirements of low-frequency vibration measurements, such as seismic detection and tidal monitoring.
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| GB/T 7714 | Xu, Liu , Qi, Yonghong , Jiang, Zhuangde et al. Fast frequency relocking for synchronization enhanced resonant accelerometer [J]. | MICROSYSTEMS & NANOENGINEERING , 2022 , 8 (1) . |
| MLA | Xu, Liu et al. "Fast frequency relocking for synchronization enhanced resonant accelerometer" . | MICROSYSTEMS & NANOENGINEERING 8 . 1 (2022) . |
| APA | Xu, Liu , Qi, Yonghong , Jiang, Zhuangde , Wei, Xueyong . Fast frequency relocking for synchronization enhanced resonant accelerometer . | MICROSYSTEMS & NANOENGINEERING , 2022 , 8 (1) . |
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Abstract ：
In this paper, we report the frequency comb response experimentally and analytically in a rhombic micro-resonator with parametrical modulation. When the electrostatically actuated rhombic micro-resonator is modulated axially by a low-frequency periodic excitation, a comb-like vibration response with few equidistant positioned fingers in the frequency domain is observed. The finger spacing of frequency comb response is exactly consistent with modulation frequency and the number and amplitude of the fingers can be tuned by modulation strength. A mixed frequency comb with extra comb fingers is further generated when the resonator is modulated simultaneously by two different low-frequency excitation signals. By adjusting the relation of the two modulation frequencies, unequal spacing frequency combs are achieved for the first time, which leads to a more flexible tunability of the comb spacing for different applications. Theoretical analysis based on the dynamic model well explains the corresponding observations.
Keyword ：
Frequency comb Micro-resonator Nonlinear dynamics Parametrical modulation Vibration
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| GB/T 7714 | Wang, Xuefeng , Yang, Qiqi , Shi, Zhan et al. Frequency comb in a parametrically modulated micro-resonator [J]. | ACTA MECHANICA SINICA , 2022 , 38 (10) . |
| MLA | Wang, Xuefeng et al. "Frequency comb in a parametrically modulated micro-resonator" . | ACTA MECHANICA SINICA 38 . 10 (2022) . |
| APA | Wang, Xuefeng , Yang, Qiqi , Shi, Zhan , Huan, Ronghua , Zhu, Weiqiu , Jing, Xingjian et al. Frequency comb in a parametrically modulated micro-resonator . | ACTA MECHANICA SINICA , 2022 , 38 (10) . |
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Abstract ：
The capture of locomotive small organisms is challenging but interesting. In this study, we developed a method to capture Paramecium with acoustic valve. Constructed by the focused surface acoustic waves (FSAW), acoustic valve can be used to block the dispersed phase in liquid flow. Under the joint action of acoustic radiation force and drag force, Paramecium can be successfully confined in a narrow space in the channel without losing its movement ability. By adjusting the applied voltage and the inlet pressure, the Paramecium can be allowed to pass, but the Paramecium cysts get captured. This acoustic device is potential in biochemical experiments, providing a new method for capturing or sorting micro swimmers.
Keyword ：
Acoustic valve Microfluidics Protozoan manipulation
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| GB/T 7714 | Qin, Xianming , Chen, Xuan , Li, Lei et al. Microfluidic acoustic valve for capturing locomotive microorganism without anesthesia [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 341 . |
| MLA | Qin, Xianming et al. "Microfluidic acoustic valve for capturing locomotive microorganism without anesthesia" . | SENSORS AND ACTUATORS A-PHYSICAL 341 (2022) . |
| APA | Qin, Xianming , Chen, Xuan , Li, Lei , Wang, Hairong , Wei, Xueyong . Microfluidic acoustic valve for capturing locomotive microorganism without anesthesia . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 341 . |
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Abstract ：
Resonant micromechanical charge sensor is widely studied, however, the performance is suffocated by nonlin-earity. Here, a sensing enhancement technique based on synchronization is proposed. Charge-sensing amplified by synchronization induced frequency locking of a ratio 9 in a couple of micromechanical oscillators separated over 1 m is demonstrated. One axial strain modulated DETF is working on its flexural mode to detect the electric charge. The sensing output oscillation frequency is injected into a high Q micro-machined disk oscillator via a coaxial cable to form synchronization. We show that the sensitivity of the disk oscillator outputs is improved up to 9 folds due to the frequency locking effect. Also, the equivalent detection frequency stability can be enhanced to 3 folds. The perturbation synchronizing signal can be transmitted over a long distance and may lead to ap-plications for enhancing sensor performance.
Keyword ：
Charge sensor Micromechanical oscillator Synchronization
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| GB/T 7714 | Pu, Dong , Wei, Xueyong , Zhu, Wenxin et al. Amplifying charge-sensing in micromechanical oscillators based on synchronization [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
| MLA | Pu, Dong et al. "Amplifying charge-sensing in micromechanical oscillators based on synchronization" . | SENSORS AND ACTUATORS A-PHYSICAL 339 (2022) . |
| APA | Pu, Dong , Wei, Xueyong , Zhu, Wenxin , Chen, Kai , Jiang, Zhuangde , Huan, Ronghua . Amplifying charge-sensing in micromechanical oscillators based on synchronization . | SENSORS AND ACTUATORS A-PHYSICAL , 2022 , 339 . |
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Abstract ：
Droplet fusion technology is a key technology for many droplet-based biochemical medical applications. By integrat-ing a symmetrical flow channel structure, we demonstrate an acoustics-controlled fusion method of microdroplets using surface acoustic waves. Different kinds of microdroplets can be staggered and ordered in the symmetrical flow channel, proving the good arrangement effect of the microfluidic chip. This method can realize not only the effective fusion of microbubbles but also the effective fusion of microdroplets of different sizes without any modification. Further, we investigate the influence of the input frequency and peak-to-peak value of the driving voltage on microdroplets fusion, giving the effective fusion parameter conditions of microdroplets. Finally, this method is successfully used in the preparation of hydrogel microspheres, offering a new platform for the synthesis of hydrogel microspheres.
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| GB/T 7714 | Jin, Shaobo , Ye, Guoyong , Cao, Na et al. Acoustics-Controlled Microdroplet and Microbubble Fusion and Its Application in the Synthesis of Hydrogel Microspheres [J]. | LANGMUIR , 2022 . |
| MLA | Jin, Shaobo et al. "Acoustics-Controlled Microdroplet and Microbubble Fusion and Its Application in the Synthesis of Hydrogel Microspheres" . | LANGMUIR (2022) . |
| APA | Jin, Shaobo , Ye, Guoyong , Cao, Na , Liu, Xuling , Dai, Liguo , Wang, Pengpeng et al. Acoustics-Controlled Microdroplet and Microbubble Fusion and Its Application in the Synthesis of Hydrogel Microspheres . | LANGMUIR , 2022 . |
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Abstract ：
MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Perot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 mu g/root Hz@1 Hz to 330 ng/root Hz@1 Hz.
Keyword ：
Fabry-Perot interference MEMS seismic accelerometer noise equivalent acceleration
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| GB/T 7714 | Zhao, Minghui , Qi, Yonghong , Zhang, Xiaopeng et al. Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer [J]. | IEEE SENSORS JOURNAL , 2022 , 22 (1) : 365-372 . |
| MLA | Zhao, Minghui et al. "Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer" . | IEEE SENSORS JOURNAL 22 . 1 (2022) : 365-372 . |
| APA | Zhao, Minghui , Qi, Yonghong , Zhang, Xiaopeng , Li, Bo , Jiang, Zhuangde , Wei, Xueyong . Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer . | IEEE SENSORS JOURNAL , 2022 , 22 (1) , 365-372 . |
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Abstract ：
Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0–240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa. © 2022 Elsevier B.V.
Keyword ：
High precision; Performance calibration; Quartz resonator; Resonant pressure sensors
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| GB/T 7714 | Ren, Z. , Qi, Y. , Zhao, M. et al. A composite structure pressure sensor based on quartz DETF resonator [J]. | Sensors and Actuators A: Physical , 2022 , 346 . |
| MLA | Ren, Z. et al. "A composite structure pressure sensor based on quartz DETF resonator" . | Sensors and Actuators A: Physical 346 (2022) . |
| APA | Ren, Z. , Qi, Y. , Zhao, M. , Li, B. , Jing, W. , Wei, X. . A composite structure pressure sensor based on quartz DETF resonator . | Sensors and Actuators A: Physical , 2022 , 346 . |
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Abstract ：
Mode interaction in M/NEMS arouses many interests in enhancing functionality in recent years. In this paper, the dynamics of two mechanically coupled micro-resonators with frequency ratio approximately 1:3 for tuning driving strength is investigated experimentally and analytically. Mode interaction induced three stages of response, i.e., typical Duffing response, large half flattened response and narrow full-flattened response, of the coupled resonators as driving strength increasing are observed. The amplitude relationship of two resonators for each stage is also obtained. The theoretical study based on the mathematical model successfully explains the previous observations. Almost 1-order enhancement of the amplitude stability in the response flattening range is observed finally, which makes the mechanical coupled micro-resonators brilliant candidate as an amplitude-sensing sensor.
Keyword ：
Internal resonance Micro-resonator Mode interaction Nonlinear dynamics
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| GB/T 7714 | Shi, Zhan , Pu, Dong , Huan, Ronghua et al. Mode interaction induced response flattening in two mechanically coupled micro-resonators [J]. | MECHANICAL SYSTEMS AND SIGNAL PROCESSING , 2022 , 177 . |
| MLA | Shi, Zhan et al. "Mode interaction induced response flattening in two mechanically coupled micro-resonators" . | MECHANICAL SYSTEMS AND SIGNAL PROCESSING 177 (2022) . |
| APA | Shi, Zhan , Pu, Dong , Huan, Ronghua , Wang, Xuefeng , Jiang, Zhuangde , Wei, Xueyong . Mode interaction induced response flattening in two mechanically coupled micro-resonators . | MECHANICAL SYSTEMS AND SIGNAL PROCESSING , 2022 , 177 . |
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Abstract ：
Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry-Perot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0-700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.
Keyword ：
diaphragm Fabry-Perot (FP) MEMS pressure sensor
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| GB/T 7714 | Qi, Yonghong , Zhao, Minghui , Li, Bo et al. A Compact Optical MEMS Pressure Sensor Based on Fabry-Perot Interference [J]. | SENSORS , 2022 , 22 (5) . |
| MLA | Qi, Yonghong et al. "A Compact Optical MEMS Pressure Sensor Based on Fabry-Perot Interference" . | SENSORS 22 . 5 (2022) . |
| APA | Qi, Yonghong , Zhao, Minghui , Li, Bo , Ren, Ziming , Li, Bing , Wei, Xueyong . A Compact Optical MEMS Pressure Sensor Based on Fabry-Perot Interference . | SENSORS , 2022 , 22 (5) . |
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