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学者姓名:赵玉龙

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Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter SCIE Scopus
期刊论文 | 2022 , 13 (5) | MICROMACHINES
SCOPUS Cited Count: 1
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Abstract :

To augment the intelligence and safety of a rocket or ammunition engine start, an intelligent initiation system needs to be included in the data link. A laser-controlled intelligent initiation system with inherent safety and a laser-controlled explosion-initiating device (LCEID) incorporating electromagnetic pulse (EMP) resistant, safe-and-arms fast-acting modular device based on photovoltaic power converter technology is designed and fabricated in this work. LCEID is an integrated multi-function module consisting of the optical beam expander, GaAs photovoltaic (PV) array, safe-and-arms integrated circuit, and low-energy initiator. These components contribute to EMP resistance, fast-acting, safe-and-arm, and reliable firing, respectively. To achieve intelligent initiation, each LCEID has a unique "identification information" and a "broadcast address" embedded in integrated-circuit read-only memory (ROM), which is controlled by encoded laser addressing. The GaAs PV array was investigated to meet the low-energy initiator firing voltage requirements. Experimental results show that the open-circuit voltage, short-circuit current, and maximum power output of the four-junction GaAs PV array illuminated by a 5.5 W/cm(2) laser beam were 220 mA, 21.5 V, and 3.70 W, respectively. When the voltage of the 22 mu F energy storage capacitor exceeds 20 V, the laser charging time is found to be shorter than 2.5 s. Other aspects of LCEID, such as laser energy coupling efficiency, the firing process, and the energy-boosting mechanism, were explored. Measurements show that the coupling efficiency of the micro lens with a radius of curvature D = 20 mu m and size of r = 50 mu m reaches a maximum of 93.5%. Furthermore, for more than 18 V charge voltage, the LCEID is found to perform reliably. The fabricated LCEID demonstrated a high level of integration and intrinsic safety, as well as a finely tailored initiation performance that could be useful in military applications.

Keyword :

explosion initiating device intelligent initiation system laser power converter safe-and-arm semiconductor bridge

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GB/T 7714 Yin, Guofu , Bao, Huiqin , Zhao, Yulong et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter [J]. | MICROMACHINES , 2022 , 13 (5) .
MLA Yin, Guofu et al. "Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter" . | MICROMACHINES 13 . 5 (2022) .
APA Yin, Guofu , Bao, Huiqin , Zhao, Yulong , Ren, Wei , Ji, Xiangfei , Cheng, Jianhua et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter . | MICROMACHINES , 2022 , 13 (5) .
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High-Stability Quartz Resonant Accelerometer With Micro-Leverages EI SCIE
期刊论文 | 2021 , 30 (2) , 184-192 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
WoS CC Cited Count: 3
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Abstract :

This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended tuning forks (DETFs), two link beams, two micro-leverages, a proof mass, and a quartz frame. Micro-leverages and DETFs are perpendicular to each other and are located around the chip, which maximizes the utilization of the sensor area and is conducive to the miniaturization of the sensor. The effectiveness of the structure was verified by theoretical analysis, simulation, and experiment. The structure with differential arrangement can eliminate common mode disturbances, such as temperature, to improve sensitivity to acceleration. Within the measurement range of +/- 100 g, the sensor's sensitivity, which is measured by experiments, is 17.72 Hz/g, with a velocity random walk of 0.84 mu g/root Hz and bias instability of 3.05 mu g, which is consistent with the theoretical analysis results. [2020-0309]

Keyword :

Acceleration Accelerometers Electrodes High stability Internal stresses resonant accelerometer Sensitivity single crystal quartz Thermal stability Vibrations

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GB/T 7714 Han, Chao , Li, Cun , Zhao, Yulong et al. High-Stability Quartz Resonant Accelerometer With Micro-Leverages [J]. | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) : 184-192 .
MLA Han, Chao et al. "High-Stability Quartz Resonant Accelerometer With Micro-Leverages" . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 30 . 2 (2021) : 184-192 .
APA Han, Chao , Li, Cun , Zhao, Yulong , Li, Bo . High-Stability Quartz Resonant Accelerometer With Micro-Leverages . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) , 184-192 .
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Study on novel temperature sensor based on amorphous carbon film EI
期刊论文 | 2020 , 16 (2) , 173-183
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Abstract :

In this study, a new type of thermistor temperature sensor was developed. The sensing materials was amorphous carbon (a-C) film prepared using electron cyclotron resonance (ECR) plasma processing system under low energy electron irradiation sputtering. The nanostructure of a-C film was observed by transmission electron microscope (TEM), the atomic bonding and carbon hybridisation condition was analysed by Raman spectra and X-ray photoelectron spectroscopy (XPS), respectively. The linearity of temperature-resistance curve of this kind of a-C film was very good in certain temperature range, with high temperature coefficient of resistance (TCR). The a-C film by 50 eV electron irradiation can measure larger temperature range from -75ºC to 155ºC, with good repeatability. The working temperature range of a-C film by 100 eV electron irradiation was much smaller, but TCR absolute value of this film was higher. It can be concluded that the lower sp2/sp3, the better linearity of temperature-resistance curve, the lower TCR absolute value in certain working temperature range. The research shows that this kind of a-C film temperature sensor has good linearity and repeatability; also it can be integrated with other MEMS sensor simply. Copyright © 2020 Inderscience Enterprises Ltd.

Keyword :

Amorphous carbon Carbon films Cyclotrons Electron cyclotron resonance Electron irradiation Electrons Photoelectron spectroscopy Temperature Temperature control Temperature sensors Thermistors Transmission electron microscopy X ray photoelectron spectroscopy

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GB/T 7714 Zhang, Qi , Ma, Xin , Guo, Meiling et al. Study on novel temperature sensor based on amorphous carbon film [J]. 2020 , 16 (2) : 173-183 .
MLA Zhang, Qi et al. "Study on novel temperature sensor based on amorphous carbon film" . 16 . 2 (2020) : 173-183 .
APA Zhang, Qi , Ma, Xin , Guo, Meiling , Yang, Lei , Zhao, Yulong . Study on novel temperature sensor based on amorphous carbon film . 2020 , 16 (2) , 173-183 .
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MEMS pressure sensor based on piezoresistive effect of amorphous carbon film EI
期刊论文 | 2020 , 49 (6) , 60-67 | Surface Technology
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Abstract :

The paper aims to study the piezoresistive performance and mechanism of amorphous carbon (a-C) film and apply it in the sensitive circuit of micro-electromechanical system (MEMS) pressure sensor. In this paper, the a-C film piezoresistive material was deposited by direct-current (DC) sputtering process. The phase content and the electrical, mechanical and thermal performance of the representative sample were characterized. Then the device was designed by finite element simulation. And the a-C carbon film pressure sensor was successfully fabricated by MEMS processes to carry out test and analysis of device level. The sensitivity of the pressure sensor chip was 9.4 μV/kPa and the non-linearity of output signal was 5.57% FS (full scale) in the range of 0 to1 MPa. The change of the a-C film resistor’s resistance showed linear relation at –70 to 150 . Especially at –20 to 150 , that relation was stronger, which showed that the temperature compensation for the a-C piezoresistive material was easier in high temperature environment. The phase content varied along the thickness-direction of the film, which implied this direction was also needed to be considered in the mechanism research. In conclusion, the a-C carbon film can be well-combined with the traditional MEMS sensor chip in terms of fabrication process, and mechanical and electrical properties. Finally, the a-C piezoresistive pressure sensor also shows satisfactory sensitivity and linearity Furthermore, the thickness-direction of a-C film should be added into the mechanism research. © 2020, Chongqing Wujiu Periodicals Press. All rights reserved.

Keyword :

Amorphous carbon Carbon films MEMS Pressure sensors

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GB/T 7714 Ma, Xin , Zhang, Qi , Guo, Peng et al. MEMS pressure sensor based on piezoresistive effect of amorphous carbon film [J]. | Surface Technology , 2020 , 49 (6) : 60-67 .
MLA Ma, Xin et al. "MEMS pressure sensor based on piezoresistive effect of amorphous carbon film" . | Surface Technology 49 . 6 (2020) : 60-67 .
APA Ma, Xin , Zhang, Qi , Guo, Peng , Tong, Xiao-Shan , Zhao, Yu-Long , Wang, Ai-Ying . MEMS pressure sensor based on piezoresistive effect of amorphous carbon film . | Surface Technology , 2020 , 49 (6) , 60-67 .
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A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity EI SCIE PubMed
期刊论文 | 2020 , 20 (13) , 1-16 | Sensors (Switzerland)
WoS CC Cited Count: 4
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Abstract :

This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12 to ±360, and the resolution of the sensor was 0.4 . This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.

Keyword :

Capacitive sensors Drops Electromechanical devices Liquids MEMS Structural design Substrates

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GB/T 7714 Xu, Hanyang , Zhao, Yulong , Zhang, Kai et al. A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity [J]. | Sensors (Switzerland) , 2020 , 20 (13) : 1-16 .
MLA Xu, Hanyang et al. "A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity" . | Sensors (Switzerland) 20 . 13 (2020) : 1-16 .
APA Xu, Hanyang , Zhao, Yulong , Zhang, Kai , Jiang, Kyle . A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity . | Sensors (Switzerland) , 2020 , 20 (13) , 1-16 .
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Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology EI SCIE
期刊论文 | 2020 , 75 | Nano Energy | IF: 17.881
WoS CC Cited Count: 15
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Abstract :

Triboelectric nanogenerator (TENG) has great potential applications in self-powered electronic devices, especially in flexible and wearable applications. Currently, to improve the performances, micro/nano structured surfaces are constructed in TENGs using complicated, costly, and toxic processes. Herein, a cost-effective and versatile water electrospray-etching (ESE) process for fabrication micro/nano structured silk fibroin (SF) triboelectric film has been presented. The water-soluble SF film could be easily dissolved by the atomized water droplets, meanwhile, as the residual charges on the droplets transferred and accumulated on to the SF surface, a patterned electrical field emerged due to the peak effect on the etched crater-like structures and manipulated the positions of deposition of the charged droplets. Our ESE strategy, which was different from the randomly distributed deposition by conventional electrospray deposition (ESD) process, could obtain quasi-periodical and porous structures, providing significantly increased surface roughness. The structural features, such as period and depth of the micropores, could be controlled by adjusting the spray parameters. The maximum output voltage and power density of the TENGs with porous structures were obviously increased by 180%, compared to 100 V obtained for a planar device. Furthermore, hierarchical micro/nano structures could be simply obtained by mixing SiO2 nanospheres in the aqueous precursor solution as nano-electrets. With this, the output voltage was up to 260 V, representing an overall 260% increase over the value of a planar device. The highest total power and peak power density were 0.65 mW and 161.5 μW/cm2 at a driving force of 18 N and frequency of 1 Hz. Meanwhile, the porous SF based TENG exhibited higher transmittance due to light scattering effects. The proposed water ESE strategy has advantages such as low cost, large area applications, bio-compatibility and nontoxicity, showing great promise as a technology in practical use. © 2020 Elsevier Ltd

Keyword :

Cost effectiveness Deposition Drops Etching Light scattering Nanogenerators Nanotechnology Porosity Silica Sprayed coatings Surface roughness Triboelectricity

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GB/T 7714 Luo, Yu , Li, Yingtao , Feng, Xueming et al. Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology [J]. | Nano Energy , 2020 , 75 .
MLA Luo, Yu et al. "Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology" . | Nano Energy 75 (2020) .
APA Luo, Yu , Li, Yingtao , Feng, Xueming , Pei, Yuechen , Zhang, Zhaofa , Wang, Li et al. Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology . | Nano Energy , 2020 , 75 .
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Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor EI SCIE Scopus
期刊论文 | 2020 , 309 | Sensors and Actuators, A: Physical | IF: 3.407
WoS CC Cited Count: 11 SCOPUS Cited Count: 34
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Abstract :

Pressure sensors that can work over 500 are widely needed in aerospace and petrochemical fields, while silicon based high temperature pressure sensors are difficult to survive such high temperature. Silicon carbide (SiC) shows better mechanical and electrical properties than silicon, which is a feasible candidate to replace silicon for manufacturing high temperature pressure sensor that can work over 500 . However, because of the ultra-high hardness and excellent chemical inertness of SiC, it is difficult to pattern structures on SiC wafer by common etching methods, especially deep etching. Femtosecond laser (fs-laser) is a practicable tool for SiC micromachining as reported in many literatures, but few of them concerns on SiC deep etching in fabricating high temperature pressure sensor's sensitive diaphragm. In this paper, blind holes with diameter of 1200 μm and depth of 270 μm were fabricated on a 350 μm-thick 4H-SiC wafer by fs-laser, which forms an 80 μm-thick membrane as sensitive diaphragm for pressure sensor. Experiments were conducted to study shape deviation, machining accuracy, edge morphology, sidewall steepness as well as surface roughness of the machined structure. Testing results show that the size errors of machined blind holes are 2.02 % in diameter and 0.38 % in depth, the sidewall steepness is good with an inclination angle of 1.7°, and surface of the sensitive diaphragm is smooth with an average roughness of 320 nm. However, elliptical shape and over etching happens to the fabricated sensitive diaphragm because of inappropriate laser scanning mode, uneven energy distribution and laser irradiation delay. Generally, research shows that fs-laser micromachining is a feasible method for SiC deep etching in fabricating sensitive diaphragm of high temperature pressure sensor. © 2020 The Authors

Keyword :

Etching Fabrication Femtosecond lasers Micromachining Morphology Partial pressure sensors Pressure sensors Silicon carbide Silicon wafers Surface roughness

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GB/T 7714 Zhao, You , Zhao, Yu-Long , Wang, Lu-Kang . Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor [J]. | Sensors and Actuators, A: Physical , 2020 , 309 .
MLA Zhao, You et al. "Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor" . | Sensors and Actuators, A: Physical 309 (2020) .
APA Zhao, You , Zhao, Yu-Long , Wang, Lu-Kang . Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor . | Sensors and Actuators, A: Physical , 2020 , 309 .
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Eccentric reflective optical fiber MEMS micro-pressure sensor EI SCIE
期刊论文 | 2020 , 30 (8) | Journal of Micromechanics and Microengineering | IF: 1.881
WoS CC Cited Count: 1
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Abstract :

An eccentric reflective optical fiber micro-electro-mechanical system (MEMS) micro-pressure sensor is proposed in this paper. The core part of the sensor consists of a dual fiber collimator (a fiber collimator with two pigtails) in an eccentric position and a sensitive silicon diaphragm. The sensitive silicon diaphragm adopts the BM (beam-membrane) structure with small structural parameters manufactured by MEMS manufacturing technology. Simulation results show that the BM structure has good sensitivity and high natural frequency. Overall structure of the sensor with the measurement range of 0 ∼ 10 kPa is designed. The way of intensity demodulation ensures the performance and stability of the sensor and makes the sensing system easier to process signals. By building a static test platform and conducting experiments, we can conclude that the sensitivity of the sensor is-0.32 dB kPa-1. Furthermore, the repeatability of the sensor is 1.26%FS (full-scale), the hysteresis of the sensor is 0.95%FS and the zero drift of the sensor is 0.615%FS h-1. By building a dynamic experimental platform and conducting experiments, it can be seen that the response time of the sensor is 0.47 ms ( © 2020 IOP Publishing Ltd.

Keyword :

MEMS Microsensors Optical collimators Optical fibers Pressure sensors

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GB/T 7714 Tian, Bian , Li, Kaikai , Liu, Jiangjiang et al. Eccentric reflective optical fiber MEMS micro-pressure sensor [J]. | Journal of Micromechanics and Microengineering , 2020 , 30 (8) .
MLA Tian, Bian et al. "Eccentric reflective optical fiber MEMS micro-pressure sensor" . | Journal of Micromechanics and Microengineering 30 . 8 (2020) .
APA Tian, Bian , Li, Kaikai , Liu, Jiangjiang , Zhao, Na , Lin, Qijing , Zhao, Yulong et al. Eccentric reflective optical fiber MEMS micro-pressure sensor . | Journal of Micromechanics and Microengineering , 2020 , 30 (8) .
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Polarization behavior of‘ lead-free 0.94(Bi0.5Na0.5)TiO3-0.06BaTiO3 thin films with enhanced ferroelectric properties EI SCIE
期刊论文 | 2020 , 40 (12) , 3928-3935 | Journal of the European Ceramic Society | IF: 5.302
WoS CC Cited Count: 7
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Abstract :

(Bi0.5Na0.5)TiO3 based ferroelectric lead-free thin films have great potential for modern micro-devices. However, the multicomponent feature and volatile nature of Bi/Na makes the achievement of high quality films challenging. In this work, the morphotropic phase boundary composition, 0.94(Bi0.5Na0.5)TiO3-0.06BaTiO3 thin films were successfully prepared by CSD method. Dense films with low dielectric loss and low leakage current density were obtained. A well-defined polarization hysteresis loop with a high remnant polarization was observed in the thin films. Moreover, the polarization behavior of the film at original state, under electric field and upon heating was investigated by PFM. A self-polarization and asymmetric domain switching behavior were observed. High temperature induced depolarization and the self-polarization recovered upon cooling. The thin films with good quality show a promising potential for the application in electrical devices, and the in-depth investigation of the polarization behavior improves the understanding of ferroelectric and piezoelectric properties of thin films. © 2020 Elsevier Ltd

Keyword :

Barium titanate Bismuth compounds Depolarization Dielectric losses Electric fields Ferroelectric films Ferroelectricity Leakage currents Polarization Sodium compounds Thin film circuits Thin films Titanium oxides

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GB/T 7714 Zhao, Jinyan , Niu, Gang , Ren, Wei et al. Polarization behavior of‘ lead-free 0.94(Bi0.5Na0.5)TiO3-0.06BaTiO3 thin films with enhanced ferroelectric properties [J]. | Journal of the European Ceramic Society , 2020 , 40 (12) : 3928-3935 .
MLA Zhao, Jinyan et al. "Polarization behavior of‘ lead-free 0.94(Bi0.5Na0.5)TiO3-0.06BaTiO3 thin films with enhanced ferroelectric properties" . | Journal of the European Ceramic Society 40 . 12 (2020) : 3928-3935 .
APA Zhao, Jinyan , Niu, Gang , Ren, Wei , Wang, Lingyan , Zhang, Nan , Sun, Yanxiao et al. Polarization behavior of‘ lead-free 0.94(Bi0.5Na0.5)TiO3-0.06BaTiO3 thin films with enhanced ferroelectric properties . | Journal of the European Ceramic Society , 2020 , 40 (12) , 3928-3935 .
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Research on a MEMS based encrypted rotary safety and arming device EI SCIE
期刊论文 | 2020 , 301 | SENSORS AND ACTUATORS A-PHYSICAL | IF: 3.407
WoS CC Cited Count: 3
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Abstract :

The Safety and Arming Device (SAD) is the essential component that prevents fuze arming until specific conditions have been achieved. The core principle of safety and arming mechanism is the interruption of energy transfer, usually explosion, laser, or high-speed slapper, with a movable interrupter. In the present research, the design and characterization of a MEMS based on-chip SAD are proposed. Comparing with the previous research, the novelty of present work mainly lies in the rotary encryption mechanism of interrupter, which makes the SAD safer and resettable. Furthermore, the SAD is encrypted by the different tooth thickness on the rotary interrupter, which associates with specified decoding voltage. Once the input voltage fails to meet the encryption criteria, the pawl of electrothermal actuator will be captured by the trap in the tooth of interrupter, then the whole system will be locked up. And fabricated on SOI (silicon-on-insulator) wafer with a dimension of 13.4 mm x 9.3 mm x 0.454 mm, it's easy for the on-chip SAD to be integrated in the microfuze or be applied in the information security system for hard-disk encryption. In addition, with the position holding mechanism provided by the double clamped V-shape beam, each single step's movement of interrupter can be accumulated in the rotary direction, which may provide a way to tackle the contradiction between displacement output and force output of MEMS actuator. (C) 2019 Elsevier B.V. All rights reserved.

Keyword :

Device Electrothermal actuator Encryption system Safety and arming

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GB/T 7714 Fang, Kuang , Hu, TengJiang , Jiang, XiaoHua et al. Research on a MEMS based encrypted rotary safety and arming device [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 301 .
MLA Fang, Kuang et al. "Research on a MEMS based encrypted rotary safety and arming device" . | SENSORS AND ACTUATORS A-PHYSICAL 301 (2020) .
APA Fang, Kuang , Hu, TengJiang , Jiang, XiaoHua , Zhao, YuLong . Research on a MEMS based encrypted rotary safety and arming device . | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 301 .
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