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学者姓名：赵玉龙
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Abstract ：
To augment the intelligence and safety of a rocket or ammunition engine start, an intelligent initiation system needs to be included in the data link. A laser-controlled intelligent initiation system with inherent safety and a laser-controlled explosion-initiating device (LCEID) incorporating electromagnetic pulse (EMP) resistant, safe-and-arms fast-acting modular device based on photovoltaic power converter technology is designed and fabricated in this work. LCEID is an integrated multi-function module consisting of the optical beam expander, GaAs photovoltaic (PV) array, safe-and-arms integrated circuit, and low-energy initiator. These components contribute to EMP resistance, fast-acting, safe-and-arm, and reliable firing, respectively. To achieve intelligent initiation, each LCEID has a unique "identification information" and a "broadcast address" embedded in integrated-circuit read-only memory (ROM), which is controlled by encoded laser addressing. The GaAs PV array was investigated to meet the low-energy initiator firing voltage requirements. Experimental results show that the open-circuit voltage, short-circuit current, and maximum power output of the four-junction GaAs PV array illuminated by a 5.5 W/cm(2) laser beam were 220 mA, 21.5 V, and 3.70 W, respectively. When the voltage of the 22 mu F energy storage capacitor exceeds 20 V, the laser charging time is found to be shorter than 2.5 s. Other aspects of LCEID, such as laser energy coupling efficiency, the firing process, and the energy-boosting mechanism, were explored. Measurements show that the coupling efficiency of the micro lens with a radius of curvature D = 20 mu m and size of r = 50 mu m reaches a maximum of 93.5%. Furthermore, for more than 18 V charge voltage, the LCEID is found to perform reliably. The fabricated LCEID demonstrated a high level of integration and intrinsic safety, as well as a finely tailored initiation performance that could be useful in military applications.
Keyword ：
explosion initiating device intelligent initiation system laser power converter safe-and-arm semiconductor bridge
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| GB/T 7714 | Yin, Guofu , Bao, Huiqin , Zhao, Yulong et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter [J]. | MICROMACHINES , 2022 , 13 (5) . |
| MLA | Yin, Guofu et al. "Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter" . | MICROMACHINES 13 . 5 (2022) . |
| APA | Yin, Guofu , Bao, Huiqin , Zhao, Yulong , Ren, Wei , Ji, Xiangfei , Cheng, Jianhua et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter . | MICROMACHINES , 2022 , 13 (5) . |
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Abstract ：
This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended tuning forks (DETFs), two link beams, two micro-leverages, a proof mass, and a quartz frame. Micro-leverages and DETFs are perpendicular to each other and are located around the chip, which maximizes the utilization of the sensor area and is conducive to the miniaturization of the sensor. The effectiveness of the structure was verified by theoretical analysis, simulation, and experiment. The structure with differential arrangement can eliminate common mode disturbances, such as temperature, to improve sensitivity to acceleration. Within the measurement range of +/- 100 g, the sensor's sensitivity, which is measured by experiments, is 17.72 Hz/g, with a velocity random walk of 0.84 mu g/root Hz and bias instability of 3.05 mu g, which is consistent with the theoretical analysis results. [2020-0309]
Keyword ：
Acceleration Accelerometers Electrodes High stability Internal stresses resonant accelerometer Sensitivity single crystal quartz Thermal stability Vibrations
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| GB/T 7714 | Han, Chao , Li, Cun , Zhao, Yulong et al. High-Stability Quartz Resonant Accelerometer With Micro-Leverages [J]. | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) : 184-192 . |
| MLA | Han, Chao et al. "High-Stability Quartz Resonant Accelerometer With Micro-Leverages" . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 30 . 2 (2021) : 184-192 . |
| APA | Han, Chao , Li, Cun , Zhao, Yulong , Li, Bo . High-Stability Quartz Resonant Accelerometer With Micro-Leverages . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) , 184-192 . |
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Abstract ：
The paper aims to study the piezoresistive performance and mechanism of amorphous carbon (a-C) film and apply it in the sensitive circuit of micro-electromechanical system (MEMS) pressure sensor. In this paper, the a-C film piezoresistive material was deposited by direct-current (DC) sputtering process. The phase content and the electrical, mechanical and thermal performance of the representative sample were characterized. Then the device was designed by finite element simulation. And the a-C carbon film pressure sensor was successfully fabricated by MEMS processes to carry out test and analysis of device level. The sensitivity of the pressure sensor chip was 9.4 μV/kPa and the non-linearity of output signal was 5.57% FS (full scale) in the range of 0 to1 MPa. The change of the a-C film resistor’s resistance showed linear relation at –70 to 150 . Especially at –20 to 150 , that relation was stronger, which showed that the temperature compensation for the a-C piezoresistive material was easier in high temperature environment. The phase content varied along the thickness-direction of the film, which implied this direction was also needed to be considered in the mechanism research. In conclusion, the a-C carbon film can be well-combined with the traditional MEMS sensor chip in terms of fabrication process, and mechanical and electrical properties. Finally, the a-C piezoresistive pressure sensor also shows satisfactory sensitivity and linearity Furthermore, the thickness-direction of a-C film should be added into the mechanism research. © 2020, Chongqing Wujiu Periodicals Press. All rights reserved.
Keyword ：
Amorphous carbon Carbon films MEMS Pressure sensors
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| GB/T 7714 | Ma, Xin , Zhang, Qi , Guo, Peng et al. MEMS pressure sensor based on piezoresistive effect of amorphous carbon film [J]. | Surface Technology , 2020 , 49 (6) : 60-67 . |
| MLA | Ma, Xin et al. "MEMS pressure sensor based on piezoresistive effect of amorphous carbon film" . | Surface Technology 49 . 6 (2020) : 60-67 . |
| APA | Ma, Xin , Zhang, Qi , Guo, Peng , Tong, Xiao-Shan , Zhao, Yu-Long , Wang, Ai-Ying . MEMS pressure sensor based on piezoresistive effect of amorphous carbon film . | Surface Technology , 2020 , 49 (6) , 60-67 . |
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Abstract ：
In this paper, we present a fully printed accelerometer with a piezoresistive carbon paste-based strain gauge printed on its surface, which can be manufactured at low cost and with high efficiency. This accelerometer is composed of two parts: a sensor substrate made from high-temperature resin, which is printed by a 3D printer based on stereolithography apparatus (SLA), and a carbon paste-based strain gauge fabricated by screen-printing technology and by direct ink writing (DIW) technology for the purposes of comparison and optimization. First, the structural design, theoretical analysis, simulation analysis of the accelerometer, and analyses of the conductive mechanism and the piezoresistive mechanism of the carbon paste-based strain gauge were carried out. Then the proposed accelerometer was fabricated by a combination of different printing technologies and the curing conditions of the carbon paste were investigated. After that, the accelerometers with the screen-printed strain gauge and DIW strain gauge were characterized. The results show that the printing precision of the screen-printing process on the sensor substrate is higher than the DIW process, and both accelerometers can perform acceleration measurement. Also, this kind of accelerometer can be used in the field of measuring body motion. All these findings prove that 3D printing technology is a significant method for sensor fabrication and verification. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
Keyword ：
3D printers Acceleration measurement Accelerometers Carbon Printing presses Screen printing Strain gages Structural design
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| GB/T 7714 | Liu, Mingjie , Zhang, Qi , Zhao, Yulong et al. Design and development of a fully printed accelerometer with a carbon paste-based strain gauge [J]. | Sensors (Switzerland) , 2020 , 20 (12) : 1-17 . |
| MLA | Liu, Mingjie et al. "Design and development of a fully printed accelerometer with a carbon paste-based strain gauge" . | Sensors (Switzerland) 20 . 12 (2020) : 1-17 . |
| APA | Liu, Mingjie , Zhang, Qi , Zhao, Yulong , Shao, Yiwei , Zhang, Dongliang . Design and development of a fully printed accelerometer with a carbon paste-based strain gauge . | Sensors (Switzerland) , 2020 , 20 (12) , 1-17 . |
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Abstract ：
The Safety and Arming Device (SAD) is the essential component that prevents fuze arming until specific conditions have been achieved. The core principle of safety and arming mechanism is the interruption of energy transfer, usually explosion, laser, or high-speed slapper, with a movable interrupter. In the present research, the design and characterization of a MEMS based on-chip SAD are proposed. Comparing with the previous research, the novelty of present work mainly lies in the rotary encryption mechanism of interrupter, which makes the SAD safer and resettable. Furthermore, the SAD is encrypted by the different tooth thickness on the rotary interrupter, which associates with specified decoding voltage. Once the input voltage fails to meet the encryption criteria, the pawl of electrothermal actuator will be captured by the trap in the tooth of interrupter, then the whole system will be locked up. And fabricated on SOI (silicon-on-insulator) wafer with a dimension of 13.4 mm x 9.3 mm x 0.454 mm, it's easy for the on-chip SAD to be integrated in the microfuze or be applied in the information security system for hard-disk encryption. In addition, with the position holding mechanism provided by the double clamped V-shape beam, each single step's movement of interrupter can be accumulated in the rotary direction, which may provide a way to tackle the contradiction between displacement output and force output of MEMS actuator. (C) 2019 Elsevier B.V. All rights reserved.
Keyword ：
Device Electrothermal actuator Encryption system Safety and arming
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| GB/T 7714 | Fang, Kuang , Hu, TengJiang , Jiang, XiaoHua et al. Research on a MEMS based encrypted rotary safety and arming device [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 301 . |
| MLA | Fang, Kuang et al. "Research on a MEMS based encrypted rotary safety and arming device" . | SENSORS AND ACTUATORS A-PHYSICAL 301 (2020) . |
| APA | Fang, Kuang , Hu, TengJiang , Jiang, XiaoHua , Zhao, YuLong . Research on a MEMS based encrypted rotary safety and arming device . | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 301 . |
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Abstract ：
Single-crystal quartz material is widely applied in the manufacture of resonators and sensors, but it is difficult to process because of its high hardness. A novel way to fabricate single-crystal quartz structures is proposed in this paper; the method includes quartz-on-silicon (QoS) technology and inductively coupled plasma (ICP) etching, which makes it feasible to fabricate complex structures with crystal quartz. The QoS method encompasses the bonding of silicon and quartz, followed by the thinning and polishing of quartz, which can enable the fabrication of an ultra-thin quartz wafer on silicon. In this way, instead of the conventional wet etching with hydrofluoric acid, the quartz layer can be easily etched using the ICP dry-etching method. Then, the structure of the pure quartz material is obtained by removing the silicon wafer. In addition, the silicon layer can be processed into the appropriate structure. This aspect overcomes the difficulty of processing a complex structure of single-crystal quartz with different crystal orientations. Thin single-crystal quartz wafers of Z-cut with a thickness of less than 40 μm were obtained by using this method, and a complex three-dimensional structure with an 80 μm width was also acquired by the ICP etching of the quartz wafer. The method can be applied to make both crystal-oriented quartz-based sensors and actuators, such as quartz resonant accelerometers.
Keyword ：
bonding ICP etching quartz on silicon (QoS)
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| GB/T 7714 | Han Chao , Li Cun , Zhao Yulong et al. Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz. [J]. | Micromachines , 2020 , 11 (3) . |
| MLA | Han Chao et al. "Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz." . | Micromachines 11 . 3 (2020) . |
| APA | Han Chao , Li Cun , Zhao Yulong , Li Bo , Wei Xueyong . Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz. . | Micromachines , 2020 , 11 (3) . |
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Abstract ：
In this paper, we present a new design of electrostatically actuated nonlinear impact resonator with a capacitive seesaw structure to solve the problem of short circuit, stiction and chaotic motion. The device is driven by electrostatic force on the capacitors, which utilizes nonlinear behavior and creates a pull-in effect. The seesaw structure can be set into oscillation with only a DC power source and a resistor, which is proved by a prototype device. No stiction occurred in over 10 h of experimental time, thus demonstrating the feasibility of solving the breakdown and stiction problem. A static mathematical model was established, solved, and verified by the experiment results, and a dynamic model with floating charge was analyzed. The analysis reveals the working principle of the proposed seesaw capacitive structure as an electrostatically actuated nonlinear impact resonator, and indicates that the working voltage can be decreased to less than 25 V if the oscillator dimensions are decreased to micrometers. The seesaw structure has considerable potential application for autonomous sensors. © 2020
Keyword ：
Dynamic models Electrostatic actuators Resonators Stiction
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| GB/T 7714 | Li, Cun , Han, Chao , Zhao, Yulong et al. Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator [J]. | Sensors and Actuators, A: Physical , 2020 , 315 . |
| MLA | Li, Cun et al. "Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator" . | Sensors and Actuators, A: Physical 315 (2020) . |
| APA | Li, Cun , Han, Chao , Zhao, Yulong , Anthony, Carl , Wei, Xueyong . Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator . | Sensors and Actuators, A: Physical , 2020 , 315 . |
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Abstract ：
This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12 to ±360, and the resolution of the sensor was 0.4 . This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
Keyword ：
Capacitive sensors Drops Electromechanical devices Liquids MEMS Structural design Substrates
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| GB/T 7714 | Xu, Hanyang , Zhao, Yulong , Zhang, Kai et al. A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity [J]. | Sensors (Switzerland) , 2020 , 20 (13) : 1-16 . |
| MLA | Xu, Hanyang et al. "A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity" . | Sensors (Switzerland) 20 . 13 (2020) : 1-16 . |
| APA | Xu, Hanyang , Zhao, Yulong , Zhang, Kai , Jiang, Kyle . A capacitive mems inclinometer sensor with wide dynamic range and improved sensitivity . | Sensors (Switzerland) , 2020 , 20 (13) , 1-16 . |
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Abstract ：
MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research ofMEMSswitches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain. © 2020 by the authors.
Keyword ：
Electric power utilization Electric switches Semiconductor device manufacture
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| GB/T 7714 | Cao, Tongtong , Hu, Tengjiang , Zhao, Yulong . Research status and development trend of MEMS switches: A review [J]. | Micromachines , 2020 , 11 (7) . |
| MLA | Cao, Tongtong et al. "Research status and development trend of MEMS switches: A review" . | Micromachines 11 . 7 (2020) . |
| APA | Cao, Tongtong , Hu, Tengjiang , Zhao, Yulong . Research status and development trend of MEMS switches: A review . | Micromachines , 2020 , 11 (7) . |
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The Safety and Arming Device (SAD) is the essential component that prevents fuze arming until specific conditions have been achieved. The core principle of safe and arm mechanism is the interruption of energy transfer, usually explosion, laser, or high-speed flyer, with a movable interrupter. In the present research, we propose the design and characterization of two kinds of MEMS based on-chip SAD, the bidirectional SAD and the rotary SAD respectively. Part I, the bidirectional SAD is the initial mode of our SAD project, which reflects the design methodology of resettable disarming process, the large travel range of slider, 0 energy consumption of motion retention, and the foray into the programmability of SAD. In this part, the width of each tooth on the slider (interrupter) corresponds to the specific decoding voltage, 13.5V and 14.8V, respectively. And a firing test has been carried out to verify feasibility of the SAD for the application in microfuze. Part II presents the upgraded mode based on Part I, the bidirectional slider has transformed into a rotary gear, the control signal has decrease from 4 signals to 2 signals, and discrimination mechanism has been realized through the trap set in the teeth of gear. In addition, to verify the feasibility of application, the endurance of random vibration has been tested. © 2020 IEEE.
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| GB/T 7714 | Fang, Kuang , Hu, Tengjiang , Jiang, Xiaohua et al. Safety and Arming Device with MEMS Based Encryption System Driven by Electrothermal Actuator [C] . 2020 . |
| MLA | Fang, Kuang et al. "Safety and Arming Device with MEMS Based Encryption System Driven by Electrothermal Actuator" . (2020) . |
| APA | Fang, Kuang , Hu, Tengjiang , Jiang, Xiaohua , Zhao, Yulong . Safety and Arming Device with MEMS Based Encryption System Driven by Electrothermal Actuator . (2020) . |
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