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学者姓名:赵玉龙

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A liquid MEMS inclinometer sensor with improved sensitivity EI SCIE
期刊论文 | 2019 , 285 , 369-377 | Sensors and Actuators, A: Physical
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Abstract :

This paper proposes a liquid microelectromechanical system (MEMS) inclinometer sensor and reports its design, fabrication, and characterization. In the sensor, a liquid metal droplet moves inside an annular-shaped channel, driven by gravity. The position of the liquid metal is reflected by electrodes and the new tilting angle is obtained. A MEMS fabrication process has been developed, and characterisation of the sensor has been carried out. Experiments show that the sensor has a resolution of 3.625° and a wide measuring range of ±45°. In comparison with solid MEMS gyroscopes, the proposed liquid sensor has advantages of fewer manufacturing steps and low costs. Beside, its resilience against impact is outstanding. Its sensitivity and accuracy are more than sufficient for hand held electronics, which are the main targeted applications of the proposed liquid sensor. © 2018 Elsevier B.V.

Keyword :

Liquid metal droplets Liquid sensors Measuring ranges MEMS fabrication MEMS gyroscope Micro electromechanical system (MEMS) Sliding angle Superhydrophobic

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GB/T 7714 Xu, Han-yang , Zhao, Yu-long , Zhang, Kai et al. A liquid MEMS inclinometer sensor with improved sensitivity [J]. | Sensors and Actuators, A: Physical , 2019 , 285 : 369-377 .
MLA Xu, Han-yang et al. "A liquid MEMS inclinometer sensor with improved sensitivity" . | Sensors and Actuators, A: Physical 285 (2019) : 369-377 .
APA Xu, Han-yang , Zhao, Yu-long , Zhang, Kai , Wang, Zi-xi , Jiang, Kyle . A liquid MEMS inclinometer sensor with improved sensitivity . | Sensors and Actuators, A: Physical , 2019 , 285 , 369-377 .
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A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement EI SCIE PubMed Scopus
期刊论文 | 2018 , 18 (3) | SENSORS
SCOPUS Cited Count: 1
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Abstract :

With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor's sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm x 0.1 mm x 2 mu m and copper electrodes of 2 mu m thick are sputtered sequentially on the substrate, and a 25 mu m thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa(-1). The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.

Keyword :

detonation pressure manganin thin film MEMS technology microscale measurement ultra-high pressure sensor

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GB/T 7714 Zhang, Guodong , Zhao, Yulong , Zhao, Yun et al. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement [J]. | SENSORS , 2018 , 18 (3) .
MLA Zhang, Guodong et al. "A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement" . | SENSORS 18 . 3 (2018) .
APA Zhang, Guodong , Zhao, Yulong , Zhao, Yun , Wang, Xinchen , Wei, Xueyong , Ren, Wei et al. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement . | SENSORS , 2018 , 18 (3) .
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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees EI SCIE PubMed Scopus
期刊论文 | 2018 , 18 (2) | SENSORS
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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Abstract :

In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002 degrees in the whole measurement range from 0 degrees to 360 degrees.

Keyword :

double-ended tuning fork MEMS oscillator resonator tilt sensor

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GB/T 7714 Wang, Shudong , Wei, Xueyong , Weng, Yinsheng et al. A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees [J]. | SENSORS , 2018 , 18 (2) .
MLA Wang, Shudong et al. "A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees" . | SENSORS 18 . 2 (2018) .
APA Wang, Shudong , Wei, Xueyong , Weng, Yinsheng , Zhao, Yulong , Jiang, Zhuangde . A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 degrees to 360 degrees . | SENSORS , 2018 , 18 (2) .
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Evaluation of width and width uniformity of near-field electrospinning printed micro and sub-micrometer lines based on optical image processing EI SCIE Scopus
期刊论文 | 2018 , 28 (3) | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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Abstract :

This paper presents an experimental study using image processing to investigate width and width uniformity of sub-micrometer polyethylene oxide (PEO) lines fabricated by near-filed electrospinning (NFES) technique. An adaptive thresholding method was developed to determine the optimal gray values to accurately extract profiles of printed lines from original optical images. And it was proved with good feasibility. The mechanism of the proposed thresholding method was believed to take advantage of statistic property and get rid of halo induced errors. Triangular method and relative standard deviation (RSD) were introduced to calculate line width and width uniformity, respectively. Based on these image processing methods, the effects of process parameters including substrate speed (v), applied voltage (U), nozzle-to-collector distance (H), and syringe pump flow rate (Q) on width and width uniformity of printed lines were discussed. The research results are helpful to promote the NFES technique for fabricating high resolution micro and sub-micro lines and also helpful to optical image processing at sub-micro level.

Keyword :

optical image processing width and width uniformity near-field electrospinning (NFES) sub-micrometer process parameters

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GB/T 7714 Zhao, Libo , Xia, Yong , Hebibul, Rahman et al. Evaluation of width and width uniformity of near-field electrospinning printed micro and sub-micrometer lines based on optical image processing [J]. | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2018 , 28 (3) .
MLA Zhao, Libo et al. "Evaluation of width and width uniformity of near-field electrospinning printed micro and sub-micrometer lines based on optical image processing" . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING 28 . 3 (2018) .
APA Zhao, Libo , Xia, Yong , Hebibul, Rahman , Wang, Jiuhong , Zhou, Xiangyang , Hu, Yingjie et al. Evaluation of width and width uniformity of near-field electrospinning printed micro and sub-micrometer lines based on optical image processing . | JOURNAL OF MICROMECHANICS AND MICROENGINEERING , 2018 , 28 (3) .
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Design and Performance Test of an Ocean Turbulent Kinetic Energy Dissipation Rate Measurement Probe EI SCIE PubMed Scopus
期刊论文 | 2018 , 9 (6) | MICROMACHINES
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Abstract :

Ocean turbulent kinetic energy dissipation rate is an essential parameter in marine environmental monitoring. Numerous probes have been designed to measure the turbulent kinetic energy dissipation rate in the past, and most of them utilize piezoelectric ceramics as the sensing element. In this paper, an ocean turbulent kinetic energy dissipation rate measurement probe utilizing a microelectromechanical systems (MEMS) piezoresistor as the sensing element has been designed and tested. The triangle cantilever beam and piezoresistive sensor chip are the core components of the designed probe. The triangle cantilever beam acts as a velocity-force signal transfer element, the piezoresistive sensor chip acts as a force-electrical signal transfer element, and the piezoresistive sensor chip is bonded on the triangle cantilever beam. One end of the triangle cantilever beam is a nylon sensing head which contacts with fluid directly, and the other end of it is a printed circuit board which processes the electrical signal. A finite element method has been used to study the effect of the cantilever beam on probe performance. The Taguchi optimization methodology is applied to optimize the structure parameters of the cantilever beam. An orthogonal array, signal-to-noise ratio, and analysis of variance are studied to analyze the effect of these parameters. Through the use of the designed probe, we can acquire the fluid flow velocity, and to obtain the ocean turbulent dissipation rate, an attached signal processing system has been designed. To verify the performance of the designed probe, tests in the laboratory and in the Bohai Sea are designed and implemented. The test results show that the designed probe has a measurement range of 10(-8)-10(-4) W/kg and a sensitivity of 3.91 x 10(-4) (Vms(2))/kg. The power spectrum calculated from the measured velocities shows good agreement with the Nasmyth spectrum. The comparative analysis between the designed probe in this paper and the commonly used PNS probe has also been completed. The designed probe can be a strong candidate in marine environmental monitoring.

Keyword :

marine environmental monitoring microelectromechanical systems (MEMS) piezoresistive sensor chip probe Taguchi method turbulent kinetic energy dissipation rate

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GB/T 7714 Tian, Bian , Li, Huafeng , Yang, Hua et al. Design and Performance Test of an Ocean Turbulent Kinetic Energy Dissipation Rate Measurement Probe [J]. | MICROMACHINES , 2018 , 9 (6) .
MLA Tian, Bian et al. "Design and Performance Test of an Ocean Turbulent Kinetic Energy Dissipation Rate Measurement Probe" . | MICROMACHINES 9 . 6 (2018) .
APA Tian, Bian , Li, Huafeng , Yang, Hua , Zhao, Yulong , Chen, Pei , Song, Dalei . Design and Performance Test of an Ocean Turbulent Kinetic Energy Dissipation Rate Measurement Probe . | MICROMACHINES , 2018 , 9 (6) .
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Research on ion implantation in MEMS device fabrication by theory, simulation and experiments SCIE Scopus
期刊论文 | 2018 , 32 (14) | INTERNATIONAL JOURNAL OF MODERN PHYSICS B
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Abstract :

Ion implantation is widely utilized in microelectromechanical systems (MEMS), applied for embedded lead, resistors, conductivity modifications and so forth. In order to achieve an expected device, the principle of ion implantation must be carefully examined. The elementary theory of ion implantation including implantation mechanism, projectile range and implantation-caused damage in the target were studied, which can be regarded as the guidance of ion implantation in MEMS device design and fabrication. Critical factors including implantations dose, energy and annealing conditions are examined by simulations and experiments. The implantation dose mainly determines the dopant concentration in the target substrate. The implantation energy is the key factor of the depth of the dopant elements. The annealing time mainly affects the repair degree of lattice damage and thus the activated elements' ratio. These factors all together contribute to ions' behavior in the substrates and characters of the devices. The results can be referred to in the MEMS design, especially piezoresistive devices.

Keyword :

fabrication Ion implantation microelectromechanical systems (MEMS)

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GB/T 7714 Bai, Minyu , Zhao, Yulong , Jiao, Binbin et al. Research on ion implantation in MEMS device fabrication by theory, simulation and experiments [J]. | INTERNATIONAL JOURNAL OF MODERN PHYSICS B , 2018 , 32 (14) .
MLA Bai, Minyu et al. "Research on ion implantation in MEMS device fabrication by theory, simulation and experiments" . | INTERNATIONAL JOURNAL OF MODERN PHYSICS B 32 . 14 (2018) .
APA Bai, Minyu , Zhao, Yulong , Jiao, Binbin , Zhu, Lingjian , Zhang, Guodong , Wang, Lei . Research on ion implantation in MEMS device fabrication by theory, simulation and experiments . | INTERNATIONAL JOURNAL OF MODERN PHYSICS B , 2018 , 32 (14) .
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A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force EI SCIE Scopus
期刊论文 | 2018 , 280 , 447-458 | SENSORS AND ACTUATORS A-PHYSICAL
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Abstract :

This paper proposes a fast-converged reduced-order model for small vibrations of electrostatically actuated rectangular microplates around their deformed states. On this foundation, one-mode analysis method and thus closed-form analytical expressions are developed for the fundamental resonant frequency analysis. Numerical multi-mode analysis is conducted to investigate the convergence. It is concluded that the one-mode analysis method can give a converged solution, which demonstrates that the proposed model has a faster convergence than previous models where multi modes are needed. The directly calculated resonant frequencies by the closed-form expressions are in good agreement with the numerical results by FEM simulations with less than 5% variation before pull-in. Parametric study shows the closed-form expressions are applicable to the cases in which the thickness is less than 1/20 of the length and width under a nominal length to width ratio of 1 similar to 2.5, and the gap distance is less than or equal to the thickness of the microplate. Additionally, a kind of electrostatic configurations based on multilayer microplates, capacitive micromachined ultrasonic transducers (CMUTs), were used to experimentally validate the closed-form expressions and good agreement was observed. (C) 2018 Elsevier B.V. All rights reserved.

Keyword :

Multilayer microplates Electrostatic microplates One-mode analysis Reduced-order model Resonant frequency Closed-form expressions

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GB/T 7714 Li, Zhikang , Zhao, Libo , Jiang, Zhuangde et al. A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2018 , 280 : 447-458 .
MLA Li, Zhikang et al. "A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force" . | SENSORS AND ACTUATORS A-PHYSICAL 280 (2018) : 447-458 .
APA Li, Zhikang , Zhao, Libo , Jiang, Zhuangde , Zhao, Yihe , Li, Jie , Zhang, Jiawang et al. A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force . | SENSORS AND ACTUATORS A-PHYSICAL , 2018 , 280 , 447-458 .
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A piezoelectric cantilever with novel large mass for harvesting energy from low frequency vibrations EI Scopus SCIE
期刊论文 | 2018 , 8 (11) | AIP Advances
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Abstract :

© 2018 Author(s). The piezoelectric cantilever with a large proof mass is a classic vibration energy harvesting structure. In this study, in order to harvest much more energy from low frequency vibration in the finite volume, a novel L type mass block is proposed and compared with a traditional rectangular mass block for the piezoelectric cantilever. A theoretical modeling of lumped parameter system is carried out considering the effect of mass block length on mass, stiffness and damping. A series of PZT bimorph cantilevers with brass proof mass prototypes are fabricated for the experimental verification. Their eigenfrequency and maximum piezoelectric power output are analyzed by the experiment and simulation. The piezoelectric cantilever with L type mass block avoids the weakness of decreasing the effective length of piezoelectric cantilever, and has lower eigenfrequency and larger piezoelectric power output than that with rectangular mass block. Its piezoelectric power output of 192 mW/(g2) can be obtained at the low resonant frequency of 18.1 Hz and the optimal load impedance of 5kΩ, and the unit volume power density is as high as 24.6 mW/(cm3×g2).

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GB/T 7714 Wang, Lu , Lu, Dejiang , Jiang, Zhuangde et al. A piezoelectric cantilever with novel large mass for harvesting energy from low frequency vibrations [J]. | AIP Advances , 2018 , 8 (11) .
MLA Wang, Lu et al. "A piezoelectric cantilever with novel large mass for harvesting energy from low frequency vibrations" . | AIP Advances 8 . 11 (2018) .
APA Wang, Lu , Lu, Dejiang , Jiang, Zhuangde , Jia, Chen , Wu, Yumeng , Zhou, Xiangyang et al. A piezoelectric cantilever with novel large mass for harvesting energy from low frequency vibrations . | AIP Advances , 2018 , 8 (11) .
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Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance EI SCIE PubMed Scopus
期刊论文 | 2018 , 9 (1) | MICROMACHINES
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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Ultra-high pressure measurement has significant applications in various fields such as high pressure synthesis of new materials and ultra-high pressure vessel monitoring. This paper proposes a novel ultra-high pressure sensor combining a truncated-cone structure and a silicon-on-insulator (SOI) piezoresistive element for measuring the pressure up to 1.6 GPa. The truncated-cone structure attenuates the measured pressure to a level that can be detected by the SOI piezoresistive element. Four piezoresistors of the SOI piezoresistive element are placed along specific crystal orientation and configured as a Wheatstone bridge to obtain voltage signals. The sensor has an advantage of high-temperature resistance, in that the structure of the piezoresistive element can avoid the leakage current at high temperature and the truncated-cone structure separates the piezoresistive element from the heat environment. Furthermore, the upper surface diameter of the truncated-cone structure is designed to be 2 mm for the application of small scale. The results of static calibration show that the sensor exhibits a good performance in hysteresis and repeatability. The temperature experiment indicates that the sensor can work steadily at high temperature. This study would provide a better insight to the research of ultra-high pressure sensors with larger range and smaller size.

Keyword :

high-temperature resistance microelectromechanical systems (MEMS) technology silicon-on-insulator (SOI) piezoresistive element small size ultra-high pressure sensor

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GB/T 7714 Zhang, Guo-Dong , Zhao, Yu-Long , Zhao, Yun et al. Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance [J]. | MICROMACHINES , 2018 , 9 (1) .
MLA Zhang, Guo-Dong et al. "Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance" . | MICROMACHINES 9 . 1 (2018) .
APA Zhang, Guo-Dong , Zhao, Yu-Long , Zhao, Yun , Wang, Xin-Chen , Wei, Xue-Yong . Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance . | MICROMACHINES , 2018 , 9 (1) .
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A piezoresistive micro-accelerometer with high frequency response and low transverse effect EI SCIE Scopus
期刊论文 | 2017 , 28 (1) | MEASUREMENT SCIENCE AND TECHNOLOGY | IF: 1.685
WoS CC Cited Count: 4 SCOPUS Cited Count: 5
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Abstract :

With the purpose of measuring vibration signals in high-speed machinery, this paper developed a piezoresistive micro-accelerometer with multi-beam structure by combining four tiny sensing beams with four suspension beams. The eight-beam (EB) structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer. Besides, the piezoresistor configuration in the sensing beams reduces the cross interference from the undesirable direction significantly. The natural frequency of the structure and the stress on the sensing beams are theoretically calculated, and then verified through finite element method (FEM). The proposed sensor is fabricated on the n-type single crystal silicon wafer and packaged for experiment. The results demonstrate that the developed device possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in the measuring high frequency vibration signals.

Keyword :

vibration micro-accelerometer transverse effect high natural frequency

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GB/T 7714 Wang, Peng , Zhao, Yulong , Tian, Bian et al. A piezoresistive micro-accelerometer with high frequency response and low transverse effect [J]. | MEASUREMENT SCIENCE AND TECHNOLOGY , 2017 , 28 (1) .
MLA Wang, Peng et al. "A piezoresistive micro-accelerometer with high frequency response and low transverse effect" . | MEASUREMENT SCIENCE AND TECHNOLOGY 28 . 1 (2017) .
APA Wang, Peng , Zhao, Yulong , Tian, Bian , Liu, Yan , Wang, Zixi , Li, Cun et al. A piezoresistive micro-accelerometer with high frequency response and low transverse effect . | MEASUREMENT SCIENCE AND TECHNOLOGY , 2017 , 28 (1) .
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