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学者姓名：赵玉龙
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Abstract ：
To augment the intelligence and safety of a rocket or ammunition engine start, an intelligent initiation system needs to be included in the data link. A laser-controlled intelligent initiation system with inherent safety and a laser-controlled explosion-initiating device (LCEID) incorporating electromagnetic pulse (EMP) resistant, safe-and-arms fast-acting modular device based on photovoltaic power converter technology is designed and fabricated in this work. LCEID is an integrated multi-function module consisting of the optical beam expander, GaAs photovoltaic (PV) array, safe-and-arms integrated circuit, and low-energy initiator. These components contribute to EMP resistance, fast-acting, safe-and-arm, and reliable firing, respectively. To achieve intelligent initiation, each LCEID has a unique "identification information" and a "broadcast address" embedded in integrated-circuit read-only memory (ROM), which is controlled by encoded laser addressing. The GaAs PV array was investigated to meet the low-energy initiator firing voltage requirements. Experimental results show that the open-circuit voltage, short-circuit current, and maximum power output of the four-junction GaAs PV array illuminated by a 5.5 W/cm(2) laser beam were 220 mA, 21.5 V, and 3.70 W, respectively. When the voltage of the 22 mu F energy storage capacitor exceeds 20 V, the laser charging time is found to be shorter than 2.5 s. Other aspects of LCEID, such as laser energy coupling efficiency, the firing process, and the energy-boosting mechanism, were explored. Measurements show that the coupling efficiency of the micro lens with a radius of curvature D = 20 mu m and size of r = 50 mu m reaches a maximum of 93.5%. Furthermore, for more than 18 V charge voltage, the LCEID is found to perform reliably. The fabricated LCEID demonstrated a high level of integration and intrinsic safety, as well as a finely tailored initiation performance that could be useful in military applications.
Keyword ：
explosion initiating device intelligent initiation system laser power converter safe-and-arm semiconductor bridge
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| GB/T 7714 | Yin, Guofu , Bao, Huiqin , Zhao, Yulong et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter [J]. | MICROMACHINES , 2022 , 13 (5) . |
| MLA | Yin, Guofu et al. "Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter" . | MICROMACHINES 13 . 5 (2022) . |
| APA | Yin, Guofu , Bao, Huiqin , Zhao, Yulong , Ren, Wei , Ji, Xiangfei , Cheng, Jianhua et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter . | MICROMACHINES , 2022 , 13 (5) . |
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Abstract ：
This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended tuning forks (DETFs), two link beams, two micro-leverages, a proof mass, and a quartz frame. Micro-leverages and DETFs are perpendicular to each other and are located around the chip, which maximizes the utilization of the sensor area and is conducive to the miniaturization of the sensor. The effectiveness of the structure was verified by theoretical analysis, simulation, and experiment. The structure with differential arrangement can eliminate common mode disturbances, such as temperature, to improve sensitivity to acceleration. Within the measurement range of +/- 100 g, the sensor's sensitivity, which is measured by experiments, is 17.72 Hz/g, with a velocity random walk of 0.84 mu g/root Hz and bias instability of 3.05 mu g, which is consistent with the theoretical analysis results. [2020-0309]
Keyword ：
Acceleration Accelerometers Electrodes High stability Internal stresses resonant accelerometer Sensitivity single crystal quartz Thermal stability Vibrations
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| GB/T 7714 | Han, Chao , Li, Cun , Zhao, Yulong et al. High-Stability Quartz Resonant Accelerometer With Micro-Leverages [J]. | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) : 184-192 . |
| MLA | Han, Chao et al. "High-Stability Quartz Resonant Accelerometer With Micro-Leverages" . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 30 . 2 (2021) : 184-192 . |
| APA | Han, Chao , Li, Cun , Zhao, Yulong , Li, Bo . High-Stability Quartz Resonant Accelerometer With Micro-Leverages . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) , 184-192 . |
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Abstract ：
The paper aims to study the piezoresistive performance and mechanism of amorphous carbon (a-C) film and apply it in the sensitive circuit of micro-electromechanical system (MEMS) pressure sensor. In this paper, the a-C film piezoresistive material was deposited by direct-current (DC) sputtering process. The phase content and the electrical, mechanical and thermal performance of the representative sample were characterized. Then the device was designed by finite element simulation. And the a-C carbon film pressure sensor was successfully fabricated by MEMS processes to carry out test and analysis of device level. The sensitivity of the pressure sensor chip was 9.4 μV/kPa and the non-linearity of output signal was 5.57% FS (full scale) in the range of 0 to1 MPa. The change of the a-C film resistor’s resistance showed linear relation at –70 to 150 . Especially at –20 to 150 , that relation was stronger, which showed that the temperature compensation for the a-C piezoresistive material was easier in high temperature environment. The phase content varied along the thickness-direction of the film, which implied this direction was also needed to be considered in the mechanism research. In conclusion, the a-C carbon film can be well-combined with the traditional MEMS sensor chip in terms of fabrication process, and mechanical and electrical properties. Finally, the a-C piezoresistive pressure sensor also shows satisfactory sensitivity and linearity Furthermore, the thickness-direction of a-C film should be added into the mechanism research. © 2020, Chongqing Wujiu Periodicals Press. All rights reserved.
Keyword ：
Amorphous carbon Carbon films MEMS Pressure sensors
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| GB/T 7714 | Ma, Xin , Zhang, Qi , Guo, Peng et al. MEMS pressure sensor based on piezoresistive effect of amorphous carbon film [J]. | Surface Technology , 2020 , 49 (6) : 60-67 . |
| MLA | Ma, Xin et al. "MEMS pressure sensor based on piezoresistive effect of amorphous carbon film" . | Surface Technology 49 . 6 (2020) : 60-67 . |
| APA | Ma, Xin , Zhang, Qi , Guo, Peng , Tong, Xiao-Shan , Zhao, Yu-Long , Wang, Ai-Ying . MEMS pressure sensor based on piezoresistive effect of amorphous carbon film . | Surface Technology , 2020 , 49 (6) , 60-67 . |
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Abstract ：
Single-crystal quartz material is widely applied in the manufacture of resonators and sensors, but it is difficult to process because of its high hardness. A novel way to fabricate single-crystal quartz structures is proposed in this paper; the method includes quartz-on-silicon (QoS) technology and inductively coupled plasma (ICP) etching, which makes it feasible to fabricate complex structures with crystal quartz. The QoS method encompasses the bonding of silicon and quartz, followed by the thinning and polishing of quartz, which can enable the fabrication of an ultra-thin quartz wafer on silicon. In this way, instead of the conventional wet etching with hydrofluoric acid, the quartz layer can be easily etched using the ICP dry-etching method. Then, the structure of the pure quartz material is obtained by removing the silicon wafer. In addition, the silicon layer can be processed into the appropriate structure. This aspect overcomes the difficulty of processing a complex structure of single-crystal quartz with different crystal orientations. Thin single-crystal quartz wafers of Z-cut with a thickness of less than 40 μm were obtained by using this method, and a complex three-dimensional structure with an 80 μm width was also acquired by the ICP etching of the quartz wafer. The method can be applied to make both crystal-oriented quartz-based sensors and actuators, such as quartz resonant accelerometers.
Keyword ：
bonding ICP etching quartz on silicon (QoS)
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| GB/T 7714 | Han Chao , Li Cun , Zhao Yulong et al. Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz. [J]. | Micromachines , 2020 , 11 (3) . |
| MLA | Han Chao et al. "Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz." . | Micromachines 11 . 3 (2020) . |
| APA | Han Chao , Li Cun , Zhao Yulong , Li Bo , Wei Xueyong . Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz. . | Micromachines , 2020 , 11 (3) . |
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Abstract ：
In this paper, we present a new design of electrostatically actuated nonlinear impact resonator with a capacitive seesaw structure to solve the problem of short circuit, stiction and chaotic motion. The device is driven by electrostatic force on the capacitors, which utilizes nonlinear behavior and creates a pull-in effect. The seesaw structure can be set into oscillation with only a DC power source and a resistor, which is proved by a prototype device. No stiction occurred in over 10 h of experimental time, thus demonstrating the feasibility of solving the breakdown and stiction problem. A static mathematical model was established, solved, and verified by the experiment results, and a dynamic model with floating charge was analyzed. The analysis reveals the working principle of the proposed seesaw capacitive structure as an electrostatically actuated nonlinear impact resonator, and indicates that the working voltage can be decreased to less than 25 V if the oscillator dimensions are decreased to micrometers. The seesaw structure has considerable potential application for autonomous sensors. © 2020
Keyword ：
Dynamic models Electrostatic actuators Resonators Stiction
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| GB/T 7714 | Li, Cun , Han, Chao , Zhao, Yulong et al. Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator [J]. | Sensors and Actuators, A: Physical , 2020 , 315 . |
| MLA | Li, Cun et al. "Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator" . | Sensors and Actuators, A: Physical 315 (2020) . |
| APA | Li, Cun , Han, Chao , Zhao, Yulong , Anthony, Carl , Wei, Xueyong . Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator . | Sensors and Actuators, A: Physical , 2020 , 315 . |
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Abstract ：
Microelectromechanical system (MEMS) liquid sensors may be used under large acceleration conditions. It is important to understand the deformation of the liquid droplets under acceleration for the design and applications of MEMS liquid sensors, as this will affect the performance of the sensors. This paper presents an investigation into the deformation of a mercury droplet in a liquid MEMS sensor under accelerations and reports the relationship between the deformation and the accelerations. The Laminar level set method was used in the numerical process. The geometric model consisted of a mercury droplet of 2 mm in diameter and an annular groove of 2.5 mm in width and 2.5 mm in height. The direction of the acceleration causing the droplet to deform is perpendicular to the direction of gravity. Fabrication and acceleration experiments were conducted. The deformation of the liquid was recorded using a high-speed camera. Both the simulation and experimental results show that the characteristic height of the droplets decreases as the acceleration increases. At an acceleration of 10 m/s(2), the height of the droplet is reduced from 2 to 1.658 mm, and at 600 m/s(2) the height is further reduced to 0.246 mm. The study finds that the droplet can deform into a flat shape but does not break even at 600 m/s(2). Besides, the properties of the material in the domain surrounding the droplet and the contact angle also affect the deformation of the droplet. This work demonstrates the deformation of the liquid metal droplets under acceleration and provides the basis for the design of MEMS droplet acceleration sensors.
Keyword ：
acceleration droplet deformation level set method liquid droplet MEMS sensor
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| GB/T 7714 | Xu, HanYang , Zhao, Yulong , Zhang, Kai et al. A Deformation of a Mercury Droplet under Acceleration in an Annular Groove [J]. | BIOSENSORS-BASEL , 2020 , 10 (6) . |
| MLA | Xu, HanYang et al. "A Deformation of a Mercury Droplet under Acceleration in an Annular Groove" . | BIOSENSORS-BASEL 10 . 6 (2020) . |
| APA | Xu, HanYang , Zhao, Yulong , Zhang, Kai , Wang, Zixi , Jiang, Kyle . A Deformation of a Mercury Droplet under Acceleration in an Annular Groove . | BIOSENSORS-BASEL , 2020 , 10 (6) . |
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Abstract ：
The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0-400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3-6.9. What's more, the film's sp(2) cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 mu V/V/mN and non-linearity about 2.0% FS in the testing range of 0-210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors. (C) 2019 Elsevier B.V. All rights reserved.
Keyword ：
Amorphous carbon film Force sensor Gauge factor MEMS Piezo-resistive effect
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| GB/T 7714 | Ma, Xin , Tong, Xiaoshan , Guo, Peng et al. MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 303 . |
| MLA | Ma, Xin et al. "MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films" . | SENSORS AND ACTUATORS A-PHYSICAL 303 (2020) . |
| APA | Ma, Xin , Tong, Xiaoshan , Guo, Peng , Zhao, Yulong , Zhang, Qi , Li, Hanchao et al. MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films . | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 303 . |
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Abstract ：
An eccentric reflective optical fiber micro-electro-mechanical system (MEMS) micro-pressure sensor is proposed in this paper. The core part of the sensor consists of a dual fiber collimator (a fiber collimator with two pigtails) in an eccentric position and a sensitive silicon diaphragm. The sensitive silicon diaphragm adopts the BM (beam-membrane) structure with small structural parameters manufactured by MEMS manufacturing technology. Simulation results show that the BM structure has good sensitivity and high natural frequency. Overall structure of the sensor with the measurement range of 0 ∼ 10 kPa is designed. The way of intensity demodulation ensures the performance and stability of the sensor and makes the sensing system easier to process signals. By building a static test platform and conducting experiments, we can conclude that the sensitivity of the sensor is-0.32 dB kPa-1. Furthermore, the repeatability of the sensor is 1.26%FS (full-scale), the hysteresis of the sensor is 0.95%FS and the zero drift of the sensor is 0.615%FS h-1. By building a dynamic experimental platform and conducting experiments, it can be seen that the response time of the sensor is 0.47 ms ( © 2020 IOP Publishing Ltd.
Keyword ：
MEMS Microsensors Optical collimators Optical fibers Pressure sensors
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| GB/T 7714 | Tian, Bian , Li, Kaikai , Liu, Jiangjiang et al. Eccentric reflective optical fiber MEMS micro-pressure sensor [J]. | Journal of Micromechanics and Microengineering , 2020 , 30 (8) . |
| MLA | Tian, Bian et al. "Eccentric reflective optical fiber MEMS micro-pressure sensor" . | Journal of Micromechanics and Microengineering 30 . 8 (2020) . |
| APA | Tian, Bian , Li, Kaikai , Liu, Jiangjiang , Zhao, Na , Lin, Qijing , Zhao, Yulong et al. Eccentric reflective optical fiber MEMS micro-pressure sensor . | Journal of Micromechanics and Microengineering , 2020 , 30 (8) . |
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Abstract ：
MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research ofMEMSswitches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain. © 2020 by the authors.
Keyword ：
Electric power utilization Electric switches Semiconductor device manufacture
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| GB/T 7714 | Cao, Tongtong , Hu, Tengjiang , Zhao, Yulong . Research status and development trend of MEMS switches: A review [J]. | Micromachines , 2020 , 11 (7) . |
| MLA | Cao, Tongtong et al. "Research status and development trend of MEMS switches: A review" . | Micromachines 11 . 7 (2020) . |
| APA | Cao, Tongtong , Hu, Tengjiang , Zhao, Yulong . Research status and development trend of MEMS switches: A review . | Micromachines , 2020 , 11 (7) . |
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Abstract ：
In this paper, we present a fully printed accelerometer with a piezoresistive carbon paste-based strain gauge printed on its surface, which can be manufactured at low cost and with high efficiency. This accelerometer is composed of two parts: a sensor substrate made from high-temperature resin, which is printed by a 3D printer based on stereolithography apparatus (SLA), and a carbon paste-based strain gauge fabricated by screen-printing technology and by direct ink writing (DIW) technology for the purposes of comparison and optimization. First, the structural design, theoretical analysis, simulation analysis of the accelerometer, and analyses of the conductive mechanism and the piezoresistive mechanism of the carbon paste-based strain gauge were carried out. Then the proposed accelerometer was fabricated by a combination of different printing technologies and the curing conditions of the carbon paste were investigated. After that, the accelerometers with the screen-printed strain gauge and DIW strain gauge were characterized. The results show that the printing precision of the screen-printing process on the sensor substrate is higher than the DIW process, and both accelerometers can perform acceleration measurement. Also, this kind of accelerometer can be used in the field of measuring body motion. All these findings prove that 3D printing technology is a significant method for sensor fabrication and verification. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
Keyword ：
3D printers Acceleration measurement Accelerometers Carbon Printing presses Screen printing Strain gages Structural design
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| GB/T 7714 | Liu, Mingjie , Zhang, Qi , Zhao, Yulong et al. Design and development of a fully printed accelerometer with a carbon paste-based strain gauge [J]. | Sensors (Switzerland) , 2020 , 20 (12) : 1-17 . |
| MLA | Liu, Mingjie et al. "Design and development of a fully printed accelerometer with a carbon paste-based strain gauge" . | Sensors (Switzerland) 20 . 12 (2020) : 1-17 . |
| APA | Liu, Mingjie , Zhang, Qi , Zhao, Yulong , Shao, Yiwei , Zhang, Dongliang . Design and development of a fully printed accelerometer with a carbon paste-based strain gauge . | Sensors (Switzerland) , 2020 , 20 (12) , 1-17 . |
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