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学者姓名：赵玉龙
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Abstract ：
To augment the intelligence and safety of a rocket or ammunition engine start, an intelligent initiation system needs to be included in the data link. A laser-controlled intelligent initiation system with inherent safety and a laser-controlled explosion-initiating device (LCEID) incorporating electromagnetic pulse (EMP) resistant, safe-and-arms fast-acting modular device based on photovoltaic power converter technology is designed and fabricated in this work. LCEID is an integrated multi-function module consisting of the optical beam expander, GaAs photovoltaic (PV) array, safe-and-arms integrated circuit, and low-energy initiator. These components contribute to EMP resistance, fast-acting, safe-and-arm, and reliable firing, respectively. To achieve intelligent initiation, each LCEID has a unique "identification information" and a "broadcast address" embedded in integrated-circuit read-only memory (ROM), which is controlled by encoded laser addressing. The GaAs PV array was investigated to meet the low-energy initiator firing voltage requirements. Experimental results show that the open-circuit voltage, short-circuit current, and maximum power output of the four-junction GaAs PV array illuminated by a 5.5 W/cm(2) laser beam were 220 mA, 21.5 V, and 3.70 W, respectively. When the voltage of the 22 mu F energy storage capacitor exceeds 20 V, the laser charging time is found to be shorter than 2.5 s. Other aspects of LCEID, such as laser energy coupling efficiency, the firing process, and the energy-boosting mechanism, were explored. Measurements show that the coupling efficiency of the micro lens with a radius of curvature D = 20 mu m and size of r = 50 mu m reaches a maximum of 93.5%. Furthermore, for more than 18 V charge voltage, the LCEID is found to perform reliably. The fabricated LCEID demonstrated a high level of integration and intrinsic safety, as well as a finely tailored initiation performance that could be useful in military applications.
Keyword ：
explosion initiating device intelligent initiation system laser power converter safe-and-arm semiconductor bridge
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| GB/T 7714 | Yin, Guofu , Bao, Huiqin , Zhao, Yulong et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter [J]. | MICROMACHINES , 2022 , 13 (5) . |
| MLA | Yin, Guofu et al. "Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter" . | MICROMACHINES 13 . 5 (2022) . |
| APA | Yin, Guofu , Bao, Huiqin , Zhao, Yulong , Ren, Wei , Ji, Xiangfei , Cheng, Jianhua et al. Design, Fabrication, and Characterization of a Laser-Controlled Explosion-Initiating Device with Integrated Safe-and-Arm, EMP-Resistant, and Fast-Acting Technology Based on Photovoltaic Power Converter . | MICROMACHINES , 2022 , 13 (5) . |
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Abstract ：
This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended tuning forks (DETFs), two link beams, two micro-leverages, a proof mass, and a quartz frame. Micro-leverages and DETFs are perpendicular to each other and are located around the chip, which maximizes the utilization of the sensor area and is conducive to the miniaturization of the sensor. The effectiveness of the structure was verified by theoretical analysis, simulation, and experiment. The structure with differential arrangement can eliminate common mode disturbances, such as temperature, to improve sensitivity to acceleration. Within the measurement range of +/- 100 g, the sensor's sensitivity, which is measured by experiments, is 17.72 Hz/g, with a velocity random walk of 0.84 mu g/root Hz and bias instability of 3.05 mu g, which is consistent with the theoretical analysis results. [2020-0309]
Keyword ：
Acceleration Accelerometers Electrodes High stability Internal stresses resonant accelerometer Sensitivity single crystal quartz Thermal stability Vibrations
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| GB/T 7714 | Han, Chao , Li, Cun , Zhao, Yulong et al. High-Stability Quartz Resonant Accelerometer With Micro-Leverages [J]. | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) : 184-192 . |
| MLA | Han, Chao et al. "High-Stability Quartz Resonant Accelerometer With Micro-Leverages" . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 30 . 2 (2021) : 184-192 . |
| APA | Han, Chao , Li, Cun , Zhao, Yulong , Li, Bo . High-Stability Quartz Resonant Accelerometer With Micro-Leverages . | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , 2021 , 30 (2) , 184-192 . |
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Abstract ：
The paper aims to study the piezoresistive performance and mechanism of amorphous carbon (a-C) film and apply it in the sensitive circuit of micro-electromechanical system (MEMS) pressure sensor. In this paper, the a-C film piezoresistive material was deposited by direct-current (DC) sputtering process. The phase content and the electrical, mechanical and thermal performance of the representative sample were characterized. Then the device was designed by finite element simulation. And the a-C carbon film pressure sensor was successfully fabricated by MEMS processes to carry out test and analysis of device level. The sensitivity of the pressure sensor chip was 9.4 μV/kPa and the non-linearity of output signal was 5.57% FS (full scale) in the range of 0 to1 MPa. The change of the a-C film resistor’s resistance showed linear relation at –70 to 150 . Especially at –20 to 150 , that relation was stronger, which showed that the temperature compensation for the a-C piezoresistive material was easier in high temperature environment. The phase content varied along the thickness-direction of the film, which implied this direction was also needed to be considered in the mechanism research. In conclusion, the a-C carbon film can be well-combined with the traditional MEMS sensor chip in terms of fabrication process, and mechanical and electrical properties. Finally, the a-C piezoresistive pressure sensor also shows satisfactory sensitivity and linearity Furthermore, the thickness-direction of a-C film should be added into the mechanism research. © 2020, Chongqing Wujiu Periodicals Press. All rights reserved.
Keyword ：
Amorphous carbon Carbon films MEMS Pressure sensors
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| GB/T 7714 | Ma, Xin , Zhang, Qi , Guo, Peng et al. MEMS pressure sensor based on piezoresistive effect of amorphous carbon film [J]. | Surface Technology , 2020 , 49 (6) : 60-67 . |
| MLA | Ma, Xin et al. "MEMS pressure sensor based on piezoresistive effect of amorphous carbon film" . | Surface Technology 49 . 6 (2020) : 60-67 . |
| APA | Ma, Xin , Zhang, Qi , Guo, Peng , Tong, Xiao-Shan , Zhao, Yu-Long , Wang, Ai-Ying . MEMS pressure sensor based on piezoresistive effect of amorphous carbon film . | Surface Technology , 2020 , 49 (6) , 60-67 . |
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Abstract ：
In this paper, we present a new design of electrostatically actuated nonlinear impact resonator with a capacitive seesaw structure to solve the problem of short circuit, stiction and chaotic motion. The device is driven by electrostatic force on the capacitors, which utilizes nonlinear behavior and creates a pull-in effect. The seesaw structure can be set into oscillation with only a DC power source and a resistor, which is proved by a prototype device. No stiction occurred in over 10 h of experimental time, thus demonstrating the feasibility of solving the breakdown and stiction problem. A static mathematical model was established, solved, and verified by the experiment results, and a dynamic model with floating charge was analyzed. The analysis reveals the working principle of the proposed seesaw capacitive structure as an electrostatically actuated nonlinear impact resonator, and indicates that the working voltage can be decreased to less than 25 V if the oscillator dimensions are decreased to micrometers. The seesaw structure has considerable potential application for autonomous sensors. © 2020
Keyword ：
Dynamic models Electrostatic actuators Resonators Stiction
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| GB/T 7714 | Li, Cun , Han, Chao , Zhao, Yulong et al. Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator [J]. | Sensors and Actuators, A: Physical , 2020 , 315 . |
| MLA | Li, Cun et al. "Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator" . | Sensors and Actuators, A: Physical 315 (2020) . |
| APA | Li, Cun , Han, Chao , Zhao, Yulong , Anthony, Carl , Wei, Xueyong . Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator . | Sensors and Actuators, A: Physical , 2020 , 315 . |
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Abstract ：
Microelectromechanical system (MEMS) liquid sensors may be used under large acceleration conditions. It is important to understand the deformation of the liquid droplets under acceleration for the design and applications of MEMS liquid sensors, as this will affect the performance of the sensors. This paper presents an investigation into the deformation of a mercury droplet in a liquid MEMS sensor under accelerations and reports the relationship between the deformation and the accelerations. The Laminar level set method was used in the numerical process. The geometric model consisted of a mercury droplet of 2 mm in diameter and an annular groove of 2.5 mm in width and 2.5 mm in height. The direction of the acceleration causing the droplet to deform is perpendicular to the direction of gravity. Fabrication and acceleration experiments were conducted. The deformation of the liquid was recorded using a high-speed camera. Both the simulation and experimental results show that the characteristic height of the droplets decreases as the acceleration increases. At an acceleration of 10 m/s(2), the height of the droplet is reduced from 2 to 1.658 mm, and at 600 m/s(2) the height is further reduced to 0.246 mm. The study finds that the droplet can deform into a flat shape but does not break even at 600 m/s(2). Besides, the properties of the material in the domain surrounding the droplet and the contact angle also affect the deformation of the droplet. This work demonstrates the deformation of the liquid metal droplets under acceleration and provides the basis for the design of MEMS droplet acceleration sensors.
Keyword ：
acceleration droplet deformation level set method liquid droplet MEMS sensor
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| GB/T 7714 | Xu, HanYang , Zhao, Yulong , Zhang, Kai et al. A Deformation of a Mercury Droplet under Acceleration in an Annular Groove [J]. | BIOSENSORS-BASEL , 2020 , 10 (6) . |
| MLA | Xu, HanYang et al. "A Deformation of a Mercury Droplet under Acceleration in an Annular Groove" . | BIOSENSORS-BASEL 10 . 6 (2020) . |
| APA | Xu, HanYang , Zhao, Yulong , Zhang, Kai , Wang, Zixi , Jiang, Kyle . A Deformation of a Mercury Droplet under Acceleration in an Annular Groove . | BIOSENSORS-BASEL , 2020 , 10 (6) . |
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Abstract ：
The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0-400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3-6.9. What's more, the film's sp(2) cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 mu V/V/mN and non-linearity about 2.0% FS in the testing range of 0-210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors. (C) 2019 Elsevier B.V. All rights reserved.
Keyword ：
Amorphous carbon film Force sensor Gauge factor MEMS Piezo-resistive effect
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| GB/T 7714 | Ma, Xin , Tong, Xiaoshan , Guo, Peng et al. MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 303 . |
| MLA | Ma, Xin et al. "MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films" . | SENSORS AND ACTUATORS A-PHYSICAL 303 (2020) . |
| APA | Ma, Xin , Tong, Xiaoshan , Guo, Peng , Zhao, Yulong , Zhang, Qi , Li, Hanchao et al. MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films . | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 303 . |
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Abstract ：
MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research ofMEMSswitches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain. © 2020 by the authors.
Keyword ：
Electric power utilization Electric switches Semiconductor device manufacture
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| GB/T 7714 | Cao, Tongtong , Hu, Tengjiang , Zhao, Yulong . Research status and development trend of MEMS switches: A review [J]. | Micromachines , 2020 , 11 (7) . |
| MLA | Cao, Tongtong et al. "Research status and development trend of MEMS switches: A review" . | Micromachines 11 . 7 (2020) . |
| APA | Cao, Tongtong , Hu, Tengjiang , Zhao, Yulong . Research status and development trend of MEMS switches: A review . | Micromachines , 2020 , 11 (7) . |
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In this paper, we present a fully printed accelerometer with a piezoresistive carbon paste-based strain gauge printed on its surface, which can be manufactured at low cost and with high efficiency. This accelerometer is composed of two parts: a sensor substrate made from high-temperature resin, which is printed by a 3D printer based on stereolithography apparatus (SLA), and a carbon paste-based strain gauge fabricated by screen-printing technology and by direct ink writing (DIW) technology for the purposes of comparison and optimization. First, the structural design, theoretical analysis, simulation analysis of the accelerometer, and analyses of the conductive mechanism and the piezoresistive mechanism of the carbon paste-based strain gauge were carried out. Then the proposed accelerometer was fabricated by a combination of different printing technologies and the curing conditions of the carbon paste were investigated. After that, the accelerometers with the screen-printed strain gauge and DIW strain gauge were characterized. The results show that the printing precision of the screen-printing process on the sensor substrate is higher than the DIW process, and both accelerometers can perform acceleration measurement. Also, this kind of accelerometer can be used in the field of measuring body motion. All these findings prove that 3D printing technology is a significant method for sensor fabrication and verification. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
Keyword ：
3D printers Acceleration measurement Accelerometers Carbon Printing presses Screen printing Strain gages Structural design
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| GB/T 7714 | Liu, Mingjie , Zhang, Qi , Zhao, Yulong et al. Design and development of a fully printed accelerometer with a carbon paste-based strain gauge [J]. | Sensors (Switzerland) , 2020 , 20 (12) : 1-17 . |
| MLA | Liu, Mingjie et al. "Design and development of a fully printed accelerometer with a carbon paste-based strain gauge" . | Sensors (Switzerland) 20 . 12 (2020) : 1-17 . |
| APA | Liu, Mingjie , Zhang, Qi , Zhao, Yulong , Shao, Yiwei , Zhang, Dongliang . Design and development of a fully printed accelerometer with a carbon paste-based strain gauge . | Sensors (Switzerland) , 2020 , 20 (12) , 1-17 . |
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Abstract ：
The Safety and Arming Device (SAD) is the essential component that prevents fuze arming until specific conditions have been achieved. The core principle of safety and arming mechanism is the interruption of energy transfer, usually explosion, laser, or high-speed slapper, with a movable interrupter. In the present research, the design and characterization of a MEMS based on-chip SAD are proposed. Comparing with the previous research, the novelty of present work mainly lies in the rotary encryption mechanism of interrupter, which makes the SAD safer and resettable. Furthermore, the SAD is encrypted by the different tooth thickness on the rotary interrupter, which associates with specified decoding voltage. Once the input voltage fails to meet the encryption criteria, the pawl of electrothermal actuator will be captured by the trap in the tooth of interrupter, then the whole system will be locked up. And fabricated on SOI (silicon-on-insulator) wafer with a dimension of 13.4 mm x 9.3 mm x 0.454 mm, it's easy for the on-chip SAD to be integrated in the microfuze or be applied in the information security system for hard-disk encryption. In addition, with the position holding mechanism provided by the double clamped V-shape beam, each single step's movement of interrupter can be accumulated in the rotary direction, which may provide a way to tackle the contradiction between displacement output and force output of MEMS actuator. (C) 2019 Elsevier B.V. All rights reserved.
Keyword ：
Device Electrothermal actuator Encryption system Safety and arming
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| GB/T 7714 | Fang, Kuang , Hu, TengJiang , Jiang, XiaoHua et al. Research on a MEMS based encrypted rotary safety and arming device [J]. | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 301 . |
| MLA | Fang, Kuang et al. "Research on a MEMS based encrypted rotary safety and arming device" . | SENSORS AND ACTUATORS A-PHYSICAL 301 (2020) . |
| APA | Fang, Kuang , Hu, TengJiang , Jiang, XiaoHua , Zhao, YuLong . Research on a MEMS based encrypted rotary safety and arming device . | SENSORS AND ACTUATORS A-PHYSICAL , 2020 , 301 . |
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Abstract ：
Triboelectric nanogenerator (TENG) has great potential applications in self-powered electronic devices, especially in flexible and wearable applications. Currently, to improve the performances, micro/nano structured surfaces are constructed in TENGs using complicated, costly, and toxic processes. Herein, a cost-effective and versatile water electrospray-etching (ESE) process for fabrication micro/nano structured silk fibroin (SF) triboelectric film has been presented. The water-soluble SF film could be easily dissolved by the atomized water droplets, meanwhile, as the residual charges on the droplets transferred and accumulated on to the SF surface, a patterned electrical field emerged due to the peak effect on the etched crater-like structures and manipulated the positions of deposition of the charged droplets. Our ESE strategy, which was different from the randomly distributed deposition by conventional electrospray deposition (ESD) process, could obtain quasi-periodical and porous structures, providing significantly increased surface roughness. The structural features, such as period and depth of the micropores, could be controlled by adjusting the spray parameters. The maximum output voltage and power density of the TENGs with porous structures were obviously increased by 180%, compared to 100 V obtained for a planar device. Furthermore, hierarchical micro/nano structures could be simply obtained by mixing SiO2 nanospheres in the aqueous precursor solution as nano-electrets. With this, the output voltage was up to 260 V, representing an overall 260% increase over the value of a planar device. The highest total power and peak power density were 0.65 mW and 161.5 μW/cm2 at a driving force of 18 N and frequency of 1 Hz. Meanwhile, the porous SF based TENG exhibited higher transmittance due to light scattering effects. The proposed water ESE strategy has advantages such as low cost, large area applications, bio-compatibility and nontoxicity, showing great promise as a technology in practical use. © 2020 Elsevier Ltd
Keyword ：
Cost effectiveness Deposition Drops Etching Light scattering Nanogenerators Nanotechnology Porosity Silica Sprayed coatings Surface roughness Triboelectricity
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| GB/T 7714 | Luo, Yu , Li, Yingtao , Feng, Xueming et al. Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology [J]. | Nano Energy , 2020 , 75 . |
| MLA | Luo, Yu et al. "Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology" . | Nano Energy 75 (2020) . |
| APA | Luo, Yu , Li, Yingtao , Feng, Xueming , Pei, Yuechen , Zhang, Zhaofa , Wang, Li et al. Triboelectric nanogenerators with porous and hierarchically structured silk fibroin films via water electrospray-etching technology . | Nano Energy , 2020 , 75 . |
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