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The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism. PubMed
期刊论文 | 2019 , 10 (2) | Micromachines
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Abstract :

Micro-electromechanical systems (MEMS) safety-and-arming (S&amp;A) device shows great potential in munition miniaturization, and it can be seen as the symbol of the fourth generation of weapons systems. In this paper, the design, fabrication, and actuation performance of a silicon based S&amp;A device is presented. It is a multilayer stacked device, which is composed of the cover plate, the actuation chip, and the barrel plate. The electro-thermal principle is investigated in MEMS scale. With 11 V driving voltages, the structure of V-shape actuator, pawl, and slider can generate 100 μm and 45 μm displacement, and realize pulling, disengaging, and reengaging to change the device from the safety position into armed position smoothly (550 μm displacement). The rack and interlock mechanism formed by the pawl and slider gives the device the features of linear output displacement, low power consumption, input signal recognition, and sustained displacement. The 20,000 g setback acceleration is applied, and no structure damage can be found after the impact, which indicates the good anti-load ability of the MEMS S&amp;A device. In order to solve the contradiction between the functional structure and the fabrication process, different structures are designed separately on different wafers. Both silicon and SOI wafers are used in the fabrication process, and the S&amp;A device has been minimized into 8.5 mm × 8.5 mm × 0.8 mm successfully.

Keyword :

interlock mechanism electro-thermal actuator A device MEMS S&amp

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GB/T 7714 Hu Tengjiang , Ren Wei , Zhao Yulong et al. The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism. [J]. | Micromachines , 2019 , 10 (2) .
MLA Hu Tengjiang et al. "The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism." . | Micromachines 10 . 2 (2019) .
APA Hu Tengjiang , Ren Wei , Zhao Yulong , Xue Yan . The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism. . | Micromachines , 2019 , 10 (2) .
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Research of a Novel 3D Printed Strain Gauge Type Force Sensor. PubMed SCIE
期刊论文 | 2019 , 10 (1) | Micromachines
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Abstract :

A 3D printed force sensor with a composite structure developed by combining digital light processing (DLP) based printing and inkjet printing technologies is described in this paper. The sensor has cost effectiveness and time-saving advantages compared to the traditional sensor manufacturing process. During this work, the substrate of the force sensor was printed by a DLP based 3D printer using a transparent high-temperature resin, and the strain gauge of the force sensor was inkjet printed using poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT/PSS) conductive ink. Finite element (FE) simulation was conducted to find the print origin of the strain gauge. The relationship between the mechanical properties of the post-cured resin and the curing time was investigated and the resistance of the printed strain gauges was characterized to optimize process parameters. Afterward, the force sensor was characterized. Experimental results show that the sensitivity of the sensor is 2.92% N<sup>-1</sup> and the linearity error is 3.1485% full scale (FS) within the range from 0 mN⁻160 mN, and the effective gauge factor of the strain gauge is about 0.98. The resistance drifting is less than 0.004 kΩ within an hour. These figures prove that the device can perform as a force sensor and 3D printing technology may have great applied potential in sensor fabrication.

Keyword :

sensor fabrication 3D printed force sensor digital light processing inkjet printing

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GB/T 7714 Liu Mingjie , Zhang Qi , Shao Yiwei et al. Research of a Novel 3D Printed Strain Gauge Type Force Sensor. [J]. | Micromachines , 2019 , 10 (1) .
MLA Liu Mingjie et al. "Research of a Novel 3D Printed Strain Gauge Type Force Sensor." . | Micromachines 10 . 1 (2019) .
APA Liu Mingjie , Zhang Qi , Shao Yiwei , Liu Chuanqi , Zhao Yulong . Research of a Novel 3D Printed Strain Gauge Type Force Sensor. . | Micromachines , 2019 , 10 (1) .
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A liquid MEMS inclinometer sensor with improved sensitivity EI SCIE
期刊论文 | 2019 , 285 , 369-377 | Sensors and Actuators, A: Physical
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This paper proposes a liquid microelectromechanical system (MEMS) inclinometer sensor and reports its design, fabrication, and characterization. In the sensor, a liquid metal droplet moves inside an annular-shaped channel, driven by gravity. The position of the liquid metal is reflected by electrodes and the new tilting angle is obtained. A MEMS fabrication process has been developed, and characterisation of the sensor has been carried out. Experiments show that the sensor has a resolution of 3.625° and a wide measuring range of ±45°. In comparison with solid MEMS gyroscopes, the proposed liquid sensor has advantages of fewer manufacturing steps and low costs. Beside, its resilience against impact is outstanding. Its sensitivity and accuracy are more than sufficient for hand held electronics, which are the main targeted applications of the proposed liquid sensor. © 2018 Elsevier B.V.

Keyword :

Liquid metal droplets Liquid sensors Measuring ranges MEMS fabrication MEMS gyroscope Micro electromechanical system (MEMS) Sliding angle Superhydrophobic

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GB/T 7714 Xu, Han-yang , Zhao, Yu-long , Zhang, Kai et al. A liquid MEMS inclinometer sensor with improved sensitivity [J]. | Sensors and Actuators, A: Physical , 2019 , 285 : 369-377 .
MLA Xu, Han-yang et al. "A liquid MEMS inclinometer sensor with improved sensitivity" . | Sensors and Actuators, A: Physical 285 (2019) : 369-377 .
APA Xu, Han-yang , Zhao, Yu-long , Zhang, Kai , Wang, Zi-xi , Jiang, Kyle . A liquid MEMS inclinometer sensor with improved sensitivity . | Sensors and Actuators, A: Physical , 2019 , 285 , 369-377 .
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高精度石英振梁谐振式传感器测试系统设计 CSCD PKU
期刊论文 | 2018 , (6) , 5-10 | 仪表技术与传感器
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为了满足高精度石英振梁谐振式传感器的测试要求,设计了一种基于FP GA的带实时温度监测的双路等精度频率采集系统.系统采用Verilog语言模块化编程方法实现双路等精度测频原理和ⅡC实时通讯,然后运用基于FP GA的SOP C技术完成自定义测频测温IP核的封装,并通过调用各种IP核构建SOPC硬件,最后利用NiosⅡ软核处理器实现频率值和温度值的浮点解算、LCD显示、串口通讯等功能.该设计方案通过仿真和实验验证了测试系统以50 Hz采样频率运行时,测频精度达到了10-6.

Keyword :

石英振梁谐振式传感器 等精度测频 温度监测 FPGA 数据采集

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GB/T 7714 孙登强 , 赵玉龙 , 李波 et al. 高精度石英振梁谐振式传感器测试系统设计 [J]. | 仪表技术与传感器 , 2018 , (6) : 5-10 .
MLA 孙登强 et al. "高精度石英振梁谐振式传感器测试系统设计" . | 仪表技术与传感器 6 (2018) : 5-10 .
APA 孙登强 , 赵玉龙 , 李波 , 李村 , 韩超 . 高精度石英振梁谐振式传感器测试系统设计 . | 仪表技术与传感器 , 2018 , (6) , 5-10 .
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微机电火工品薄膜结构换能元 EI CSCD PKU
期刊论文 | 2018 , (9) , 2319-2325 | 光学精密工程
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Abstract :

为了满足MEMS火工品的小型化、集成化和低能发火等要求,本文基于MEMS技术,设计了一种平面"蛇"形结构的薄膜换能元,采用磁控溅射等M EM S薄膜制作技术,完成了不同薄膜桥区电阻和基底材料薄膜换能元样品的制备,采用扫描电镜(SEM)、原子力显微镜(AFM),低电阻测试仪、红外热像仪等设备,完成了不同换能元样品结构(薄膜桥区线宽、长度及厚度等)及性能(电阻、电热响应等)参数的测试与表征.通过分析研究,获得了薄膜桥区电阻材料、基底材料、薄膜厚度以及桥区结构形状对换能元性能的影响规律,优选确定以金属Pt和7740玻璃作为换能元电阻及基底材料,发火性能达5 V/33μF,满足M EM S火工品的低能化要求.

Keyword :

MEMS 薄膜厚度 薄膜结构 换能元

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GB/T 7714 任炜 , 赵玉龙 , 褚恩义 et al. 微机电火工品薄膜结构换能元 [J]. | 光学精密工程 , 2018 , (9) : 2319-2325 .
MLA 任炜 et al. "微机电火工品薄膜结构换能元" . | 光学精密工程 9 (2018) : 2319-2325 .
APA 任炜 , 赵玉龙 , 褚恩义 , 张彬 , 李慧 . 微机电火工品薄膜结构换能元 . | 光学精密工程 , 2018 , (9) , 2319-2325 .
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A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology EI Scopus
期刊论文 | 2018 | IEEE Transactions on Industrial Electronics
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IEEE A novel CMUTs-based resonant biochemical sensor was presented to detect SO2 with a sensitive polymer layer functionalized by electrospinning technology. The electrospinning technology was proposed as an innovative functionalization method to fabricate nano reticular polymer fibers with the diameters of 50 nm~500 nm on the movable plates of the CMUTs. The surface topography of electrospun nanofibers and the impedance properties of functionalized CMUTs were characterized. The CMUTs-based resonant biochemical sensor was packaged to detect SO2 in the experiments. Its resonant frequency shifts varied against the variation of SO2 concentration. The influences of the mixed gas flow rate were also analyzed. These showed the proposed sensor had good volume sensitivity and frequency stability.

Keyword :

CMUTs-based resonant biochemical sensor electrospinning technology impedance characteristics resonant frequency shift volume sensitivity

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GB/T 7714 Zhao, Libo , Zhao, Yihe , Xia, Yong et al. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology [J]. | IEEE Transactions on Industrial Electronics , 2018 .
MLA Zhao, Libo et al. "A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology" . | IEEE Transactions on Industrial Electronics (2018) .
APA Zhao, Libo , Zhao, Yihe , Xia, Yong , Li, Zhikang , Li, Jie , Zhang, Jiawang et al. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology . | IEEE Transactions on Industrial Electronics , 2018 .
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一种基于3D打印的接触式位移传感器结构及其制作方法
专利
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一种基于3D打印的接触式位移传感器结构及其制作方法,接触式位移传感器结构包括基底结构,基底结构的一端设有第二固定孔,另一端设有导向孔,基底结构上方连接有悬臂梁结构,基底结构的第二固定孔和悬臂梁结构末端的第一固定孔对齐,悬臂梁结构的末端设有应变计结构,悬臂梁结构的首端设有限位孔,探针穿过基底结构上的导向孔,探针上端位于限位孔内,下端用于接触测量;制作方法采用光固化工艺与喷墨打印工艺相结合,将导电油墨直接喷印在树脂悬臂梁结构之上,实现了三维复合结构传感器的制造;并且运用桌面级的光固化打印机制作传感器结构;本发明具有加工成本低、加工周期短、制作简便、结构优化方便等优点。

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GB/T 7714 赵玉龙 , 刘明杰 , 邵一苇 et al. 一种基于3D打印的接触式位移传感器结构及其制作方法 : [P]. .
MLA 赵玉龙 et al. "一种基于3D打印的接触式位移传感器结构及其制作方法" : . .
APA 赵玉龙 , 刘明杰 , 邵一苇 , 赵友 , 张琪 , 刘传奇 . 一种基于3D打印的接触式位移传感器结构及其制作方法 : . .
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一种超高压力场测量装置
专利
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一种超高压力场测量装置,包括爆炸容器,爆炸容器的上腔体与下腔体通过腔体通道透光,下腔体侧壁上开有一个透光窗口;爆炸容器的上腔体内底部装有有机玻璃垫块,有机玻璃垫块的上部中心的圆柱凹槽内放有基于硫化锌的敏感元件,有机玻璃垫块的上方安装有垫片壳体,垫片壳体中心安装有垫片;垫片壳体的上方安装有装药壳体,装药壳体的中心下方安装有装药体,装药体通过伸出装药壳体的引线引爆;爆炸容器的下腔体内放置有一块平面反射镜,爆炸容器外部放置有通过数据线连接的相机与计算机;相机的镜头对准爆炸容器下腔体的透光窗口;本发明通过基于硫化锌的敏感元件可以实现小尺寸超高压力场的测量。

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GB/T 7714 韦学勇 , 王馨晨 , 赵玉龙 et al. 一种超高压力场测量装置 : [P]. .
MLA 韦学勇 et al. "一种超高压力场测量装置" : . .
APA 韦学勇 , 王馨晨 , 赵玉龙 , 张国栋 , 任炜 , 张方 et al. 一种超高压力场测量装置 : . .
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一种基于3D打印技术的柔性压力传感器芯片及其制作方法
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一种基于3D打印技术的柔性压力传感器芯片及其制作方法,芯片包括柔性上极板,柔性上极板和均匀分布微型金字塔阵列的柔性下极板相接触,在柔性上、下极板接触表面制作柔性薄膜电极,柔性上、下极板上的柔性薄膜电极分别通过导线与外部电路相连接;制作方法先3D打印柔性上、下极板,清洗;然后采用导电胶将导线紧密的黏附在柔性上、下极板上,固化;再将柔性上、下极板氧等离子体处理,浸润一层PEDOT:PSS溶液,烘烤完成柔性薄膜电极的制作;最后使用聚酰亚胺绝缘胶带将柔性上、下极板粘贴在一起,同时封闭柔性上、下极板侧面间隙;本发明具有加工成本低、加工周期短、制作简便、材料选择多样化、结构一体化等优点。

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GB/T 7714 赵玉龙 , 邵一苇 , 刘明杰 et al. 一种基于3D打印技术的柔性压力传感器芯片及其制作方法 : [P]. .
MLA 赵玉龙 et al. "一种基于3D打印技术的柔性压力传感器芯片及其制作方法" : . .
APA 赵玉龙 , 邵一苇 , 刘明杰 , 张琪 , 赵友 , 刘传奇 . 一种基于3D打印技术的柔性压力传感器芯片及其制作方法 : . .
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A MEMS SOI-based piezoresistive fluid flow sensor EI SCIE PubMed Scopus
期刊论文 | 2018 , 89 (2) , 7 | REVIEW OF SCIENTIFIC INSTRUMENTS
WoS CC Cited Count: 1 SCOPUS Cited Count: 1
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In this paper, a SOI (silicon-on-insulator)-based piezoresistive fluid flow sensor is presented; the presented flow sensor mainly consists of a nylon sensing head, stainless steel cantilever beam, SOI sensor chip, printed circuit board, half-cylinder gasket, and stainless steel shell. The working principle of the sensor and some detailed contrastive analysis about the sensor structure were introduced since the nylon sensing head and stainless steel cantilever beam have distinct influence on the sensor performance; the structure of nylon sensing head and stainless steel cantilever beam is also discussed. The SOI sensor chip was fabricated using micro-electromechanical systems technologies, such as reactive ion etching and low pressure chemical vapor deposition. The designed fluid sensor was packaged and tested; a calibration installation system was purposely designed for the sensor experiment. The testing results indicated that the output voltage of the sensor is proportional to the square of the fluid flow velocity, which is coincident with the theoretical derivation. The tested sensitivity of the sensor is 3.91 x 10(-4) V ms(2)/kg. Published by AIP Publishing.

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GB/T 7714 Tian, B. , Li, H. F. , Yang, H. et al. A MEMS SOI-based piezoresistive fluid flow sensor [J]. | REVIEW OF SCIENTIFIC INSTRUMENTS , 2018 , 89 (2) : 7 .
MLA Tian, B. et al. "A MEMS SOI-based piezoresistive fluid flow sensor" . | REVIEW OF SCIENTIFIC INSTRUMENTS 89 . 2 (2018) : 7 .
APA Tian, B. , Li, H. F. , Yang, H. , Song, D. L. , Bai, X. W. , Zhao, Y. L. . A MEMS SOI-based piezoresistive fluid flow sensor . | REVIEW OF SCIENTIFIC INSTRUMENTS , 2018 , 89 (2) , 7 .
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