A　study　on　the　effect　of　curvature　of　triangular　shaped　cantilevers　in　MEMS　sensors　was　presented.　3-D　models　were　performed　by　using　the　SolidWorks　software.　And　modal　analysis　and　harmonic　response　analysis　were　carried　out　on　different　types　of　geometrically　configured　triangular　shaped　cantilevers　using　ANSYS　software.　The　results　included　the　variation　of　natural　frequencies　of　cantilevers　and　maximum　equivalent　von　mises　strain　on　the　cantilevers　with　respect　to　radius　of　curvature　of　triangular　shaped　cantilevers.　According　to　the　finite　element　analysis　results,　the　curvature　did　affect　dynamic　behavior　of　triangular　shaped　cantilevers　in　MEMS　sensors.　Usually,　the　curvature　is　induced　by　the　surface　stress　due　to　microprocessing　or　any　change　of　temperature,　etc.　Therefore,　in　order　to　achieve　a　steady　state　of　strain　for　the　MEMS　sensors,　it＇s　better　to　eliminate　the　surface　stress　and　make　the　cantilever　transform　from　a　curved　cantilever　to　a　straight　cantilever.　©2010　IEEE.