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Abstract:
Ti metal coating was prepared on Al2O3ceramic substrate with Ti and I2powders as raw materials via chemical vapor deposition based on the principle of haloids reduction. The influences of processing parameters (i. e., mass ratio of Ti to I2, temperature and time) on the deposition were investigated. The phase composition of the coating was analyzed by X-ray diffraction. The microstructure morphology and composition of the coating was analyzed by scanning electron microscopy with energy dispersives pectrometry. The wettability between the copper and coated alumina was investigated via a sessile drop test. The results show that the Ti coating on alumina substrate can be obtained at the mass ratio Ti to I2of 1:3 and 1100°C for 60 min. The Ti coating obtained has a high purity and an obvious predominant orientation of (110) crystal plane. The combination between the coating and the ceramic appear fine. The contact angle between copper and the coating at 1113°C is 57°.
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Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society
ISSN: 0454-5648
Year: 2014
Issue: 7
Volume: 42
Page: 836-840
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 2
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count: -1
Chinese Cited Count: -1
30 Days PV: 1
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