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Author:

Cui, Jianlei (Cui, Jianlei.) | Yang, Lijun (Yang, Lijun.) | Wang, Yang (Wang, Yang.) | Mei, Xuesong (Mei, Xuesong.) (Scholars:梅雪松) | Wang, Wenjun (Wang, Wenjun.) | Hou, Chaojian (Hou, Chaojian.) | Cheng, Bai (Cheng, Bai.) | Dai, Qiang (Dai, Qiang.)

Indexed by:

CPCI-S SCIE EI Scopus

Abstract:

In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.

Keyword:

enhancement nanolithography Near-field optical fiber probe

Author Community:

  • [ 1 ] [Cui, Jianlei; Mei, Xuesong; Wang, Wenjun] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 2 ] [Cui, Jianlei; Mei, Xuesong; Wang, Wenjun] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
  • [ 3 ] [Yang, Lijun; Hou, Chaojian; Cheng, Bai; Dai, Qiang] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
  • [ 4 ] [Yang, Lijun; Wang, Yang; Hou, Chaojian; Cheng, Bai; Dai, Qiang] Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
  • [ 5 ] [Cui, Jianlei]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 6 ] [Mei, Xuesong]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 7 ] [Wang, Wenjun]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
  • [ 8 ] [Cui, Jianlei]Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
  • [ 9 ] [Mei, Xuesong]Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
  • [ 10 ] [Wang, Wenjun]Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
  • [ 11 ] [Yang, Lijun]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
  • [ 12 ] [Hou, Chaojian]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
  • [ 13 ] [Cheng, Bai]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
  • [ 14 ] [Dai, Qiang]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
  • [ 15 ] [Yang, Lijun]Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
  • [ 16 ] [Wang, Yang]Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
  • [ 17 ] [Hou, Chaojian]Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
  • [ 18 ] [Cheng, Bai]Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
  • [ 19 ] [Dai, Qiang]Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China

Reprint Author's Address:

  • Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China.

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Source :

INTEGRATED FERROELECTRICS

ISSN: 1058-4587

Year: 2015

Issue: 1

Volume: 164

Page: 90-97

Language: English

0 . 3 7 5

JCR@2015

0 . 8 3 6

JCR@2020

ESI Discipline: ENGINEERING;

ESI HC Threshold:138

JCR Journal Grade:2

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 28

SCOPUS Cited Count: 28

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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