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Abstract:
In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.
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Source :
INTEGRATED FERROELECTRICS
ISSN: 1058-4587
Year: 2015
Issue: 1
Volume: 164
Page: 90-97
Language: English
0 . 3 7 5
JCR@2015
0 . 8 3 6
JCR@2020
ESI Discipline: ENGINEERING;
ESI HC Threshold:138
JCR Journal Grade:2
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 28
SCOPUS Cited Count: 28
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 4