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[会议]

New optical near-field nanolithography with optical fiber probe laser irradiating atomic force microscopy probe tip

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Author:

Cui, Jianlei (Cui, Jianlei.) | Yang, Lijun (Yang, Lijun.) | Xie, Hui (Xie, Hui.) | Unfold

Indexed by:

CPCI-S SCIE EI Scopus

Abstract:

A new optical near-field nanolithography scheme with optical fiber probe laser irradiating atomic force microscopy (AFM) probe tip is proposed. Through optical theoretical analysis, if the metallic AFM probe tip is in the evanescent field of optical fiber probe tip, the secondary near-field enhancement effect can appear underneath the metallic AFM probe tip. Based on the independently developed AFM system and optical system, the nanolithography platform is built and nanocraters structures can be successfully created, which demonstrates that the new scheme is an effective and promising nanolithography approach for the future nanoelectronics, nanobiotechnology, nanowelding, etc.

Keyword:

atomic force microscope (AFM) laser metallic probe tip Nanolithography near-field

Author Community:

  • [ 1 ] [Cui, Jianlei; Mei, Xuesong; Wang, Kedian; Wang, Wenjun] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China
  • [ 2 ] [Cui, Jianlei] Fudan Univ, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
  • [ 3 ] [Cui, Jianlei] Fudan Univ, Dept Phys, Shanghai 200433, Peoples R China
  • [ 4 ] [Yang, Lijun; Wang, Yang; Hou, Chaojian] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150006, Peoples R China
  • [ 5 ] [Xie, Hui] Harbin Inst Technol, State Key Lab Robot & Syst, Harbin 150006, Peoples R China
  • [ 6 ] [Cui, Jianlei]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China
  • [ 7 ] [Mei, Xuesong]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China
  • [ 8 ] [Wang, Kedian]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China
  • [ 9 ] [Wang, Wenjun]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China
  • [ 10 ] [Cui, Jianlei]Fudan Univ, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
  • [ 11 ] [Cui, Jianlei]Fudan Univ, Dept Phys, Shanghai 200433, Peoples R China
  • [ 12 ] [Yang, Lijun]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150006, Peoples R China
  • [ 13 ] [Wang, Yang]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150006, Peoples R China
  • [ 14 ] [Hou, Chaojian]Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150006, Peoples R China
  • [ 15 ] [Xie, Hui]Harbin Inst Technol, State Key Lab Robot & Syst, Harbin 150006, Peoples R China

Reprint Author's Address:

  • Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China.

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Source :

INTEGRATED FERROELECTRICS

ISSN: 1058-4587

Year: 2016

Issue: 1

Volume: 169

Page: 124-132

Language: English

0 . 4 5 7

JCR@2016

0 . 8 3 6

JCR@2020

ESI Discipline: ENGINEERING;

ESI HC Threshold:128

JCR Journal Grade:2

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 31

SCOPUS Cited Count: 35

30 Days PV: 18

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