Influence of surface roughness on the adhesion hysteresis of nano thin film - Details

Author：

Lin, Qijing (Lin, Qijing.) | Zhang, Fuzheng (Zhang, Fuzheng.) | Han, Feng (Han, Feng.) | Zhao, Man (Zhao, Man.) | Jiang, Zhuangde (Jiang, Zhuangde.) (Scholars：蒋庄德)

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Abstract：

The　influence　of　surface　roughness　on　adhesion　hysteresis　of　Cu　thin　films　with　different　thickness　was　studied.　The　Cu　thin　films　were　fabricated　using　dc　magnetron　sputtering　technology　and　their　surface　adhesion　forces　were　measured　using　force-displacement　curves　of　atomic　force　microscopy.　The　experiment　results　show　that　the　unload　curve　exhibits　obvious　adhesion　hysteresis　and　that　the　roughness　and　adhesion　force　have　opposite　change　tendency.　The　theoretical　analysis　on　the　influence　of　thin　film　roughness　to　the　adhesion　hysteresis　was　carried　out　using　the　Johnson-Kendall-Roberts　model.　The　results　show　that　the　load　curve　and　unload　curve　constitute　a　closed　curve　and　that　the　smoother　the　surface,　the　more　obvious　adhesion　hysteresis,　i.e.　the　rougher　the　surface,　the　less　obvious　adhesion　hysteresis.　The　theoretical　analysis　results　are　in　good　agreement　with　the　experimental　results.　©　The　Institution　of　Engineering　and　Technology　2019

Keyword：

Adhesion Atomic force microscopy Hysteresis Surface roughness Thin films

Author Community：

[ 1 ] [Lin, Qijing]Collaborative Innovation Center of High-End Manufacturing Equipment, Xi'an Jiaotong University, Xi'an; 710054, China; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; 710049, China; Xi'an Jiaotong University Suzhou Institute, Suzhou; 215123, China; State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai; 200240, China
[ 2 ] [Zhang, Fuzheng]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
[ 3 ] [Han, Feng]Collaborative Innovation Center of High-End Manufacturing Equipment, Xi'an Jiaotong University, Xi'an; 710054, China; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
[ 4 ] [Zhao, Man]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
[ 5 ] [Jiang, Zhuangde]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
[ 6 ] [Lin, Qijing]Xi An Jiao Tong Univ, Collaborat Innovat Ctr High End Mfg Equipment, Xian 710054, Shaanxi, Peoples R China
[ 7 ] [Han, Feng]Xi An Jiao Tong Univ, Collaborat Innovat Ctr High End Mfg Equipment, Xian 710054, Shaanxi, Peoples R China
[ 8 ] [Lin, Qijing]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[ 9 ] [Zhang, Fuzheng]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[ 10 ] [Han, Feng]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[ 11 ] [Zhao, Man]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[ 12 ] [Jiang, Zhuangde]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[ 13 ] [Lin, Qijing]Xi An Jiao Tong Univ, Suzhou Inst, Suzhou 215123, Peoples R China
[ 14 ] [Lin, Qijing]Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China

Reprint Author's Address：

[Han, Feng]Collaborative Innovation Center of High-End Manufacturing Equipment, Xi'an Jiaotong University, Xi'an; 710054, China;;[Han, Feng]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; 710049, China;;

Email：

hanfeng_2062@163.com

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