A　femtosecond　laser　was　used　to　process　micro-holes　on　the　nickel-based　superalloy　with　thermal　barrier　coatings.　Scanning　electron　microscope　(SEM)　was　used　to　observe　the　morphology　of　micro-holes　inlet,　outlet　and　the　side　wall.　The　changes　of　morphology　with　laser　focusing　position　and　laser　power　were　analyzed.　The　results　showed　that　the　micro-holes　processed　by　femtosecond　laser　required　a　certain　amount　of　focus　position　to　optimize　the　processing　quality.　The　entrance　was　not　round　sometimes　and　the　micro-holes　outlet　was　irregular　with　high　power　laser　machining.　A　further　repair　of　micro-hole　by　using　low　power　femtosecond　laser　was　presented.　Low　laser　power　modification　can　improve　the　quality　of　micro-holes.　©　2020　Taylor　&　Francis　Group,　LLC.