Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress - Details

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Abstract：

Electrostatically　actuated　microplates　with　multilayer　and　material　anisotropy　properties,　are　widely　employed　in　microelectromechanical　systems.　However,　previous　theories　rarely　consider　the　aforementioned　properties　simultaneously,　hindering　their　widespread　application.　This　paper　proposes　a　general　theoretical　model　for　electrostatically　actuated　rectangular　multilayer　anisotropic　microplates　subjected　to　residual　stress　and　hydrostatic　pressure　by　combining　the　classical　laminated　thin　plate　theory,　Galerkin　method　and　a　partial　expansion　approach　for　nonlinear　electrostatic　force.　This　model　enables　successful　establishment　of　closed-form　expressions　for　the　main　mechanical　behaviors,　e.g.　the　pull-in　voltage,　static　deflection,　and　resonant　frequency.　Validation　of　these　expressions,　using　finite　element　method　simulations　and　experimental　results,　shows　significant　improvement　in　the　analysis　accuracy　(15　times　higher)　compared　to　those　theories　neglecting　the　material　anisotropy,　as　well　as　excellent　applicability　across　a　wide　range　of　DC　voltages　and　dimensions.　Additionally,　the　influences　of　electrostatic　softening　effects　and　scale　effects　on　the　theories　are　also　discussed.　©　2020　Elsevier　Ltd

Keyword：

Anisotropy Electromechanical devices Electrostatic actuators Electrostatics Galerkin methods Hydrostatic pressure MEMS Multilayers Natural frequencies Residual stresses

Author Community：

[ 1 ] [Li, Zhikang]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 2 ] [Li, Zhikang]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 3 ] [Li, Zhikang]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 4 ] [Li, Zhikang]Department of Bioengineering, University of California-Los Angeles, Los Angeles; CA; 90095, United States
[ 5 ] [Li, Zhikang]California NanoSystems Institute, University of California-Los Angeles, Los Angeles; CA; 90095, United States
[ 6 ] [Zhao, Libo]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 7 ] [Zhao, Libo]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 8 ] [Zhao, Libo]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 9 ] [Li, Jie]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 10 ] [Li, Jie]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 11 ] [Li, Jie]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 12 ] [Zhao, Yihe]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 13 ] [Zhao, Yihe]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 14 ] [Zhao, Yihe]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 15 ] [Xu, Tingzhong]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 16 ] [Xu, Tingzhong]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 17 ] [Xu, Tingzhong]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 18 ] [Liu, Zichen]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 19 ] [Liu, Zichen]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 20 ] [Liu, Zichen]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 21 ] [Luo, Guoxi]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 22 ] [Luo, Guoxi]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 23 ] [Luo, Guoxi]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 24 ] [Zhang, Shiming]Department of Bioengineering, University of California-Los Angeles, Los Angeles; CA; 90095, United States
[ 25 ] [Zhang, Shiming]California NanoSystems Institute, University of California-Los Angeles, Los Angeles; CA; 90095, United States
[ 26 ] [Hu, Kaiming]State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai; 200240, China
[ 27 ] [Hoffman, Tyler]Department of Bioengineering, University of California-Los Angeles, Los Angeles; CA; 90095, United States
[ 28 ] [Hoffman, Tyler]California NanoSystems Institute, University of California-Los Angeles, Los Angeles; CA; 90095, United States
[ 29 ] [Saghir, Shahid]Department of Mechanical Engineering, University of Management and Technology, Sialkot, Campus 21-A, Small Industrial Estate, Shahabpura Road, Sialkot, Pakistan
[ 30 ] [Lu, Dejiang]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 31 ] [Lu, Dejiang]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 32 ] [Lu, Dejiang]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 33 ] [Zhang, Wenming]State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai; 200240, China
[ 34 ] [Jiang, Zhuangde]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 35 ] [Jiang, Zhuangde]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China
[ 36 ] [Jiang, Zhuangde]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China

Reprint Author's Address：

赵立波
[Zhao, Libo]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China;;[Zhao, Libo]International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China;;[Zhao, Libo]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an; Shaanxi; 710049, China;;

Email：

libozhao@xjtu.edu.cn

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