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Abstract:
In this article, an analytical equivalent circuit model is established for the piezoelectric micromachined ultrasonic transducer (PMUT) cell and array with a combination of the annular and circular diaphragms used for structural optimization and complex array design. Based on this model, a comprehensive analysis is conducted on the acoustic-structural coupling of an annular and circular diaphragm-coupled PMUT (AC-PMUT) with a new excitation method. The model-derived results are in good agreement with the simulation and experimental results. Then, an optimized design has been presented to achieve high-output pressure and a good array working performance. In summary, a comparison of the array working performance is conducted between the arrays that consist of AC-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs). The results indicate that the AC-PMUT array has a much lower crosstalk effect than that of the traditional C-PMUT array. By this means, the AC-PMUT array can fully use the high vibration amplitude achieved by each AC-PMUT cell to improve its output ability. As a result, the highest ultrasonic output pressure generated by the AC-PMUT array in its resonant condition can achieve an increase of 155%, compared with that generated by the C-PMUT array. © 1986-2012 IEEE.
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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
ISSN: 0885-3010
Year: 2021
Issue: 3
Volume: 68
Page: 718-733
2 . 7 2 5
JCR@2020
ESI Discipline: ENGINEERING;
ESI HC Threshold:30
CAS Journal Grade:2
Cited Count:
WoS CC Cited Count: 4
SCOPUS Cited Count: 14
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 13
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