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Author:

Xu, Tingzhong (Xu, Tingzhong.) | Zhao, Libo (Zhao, Libo.) (Scholars:赵立波) | Jiang, Zhuangde (Jiang, Zhuangde.) | Guo, Shuaishuai (Guo, Shuaishuai.) | Li, Zhikang (Li, Zhikang.) | Yang, Ping (Yang, Ping.) | Luo, Guoxi (Luo, Guoxi.) | Sun, Lin (Sun, Lin.) | Zhang, Liangchi (Zhang, Liangchi.)

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Abstract:

In this article, an analytical equivalent circuit model is established for the piezoelectric micromachined ultrasonic transducer (PMUT) cell and array with a combination of the annular and circular diaphragms used for structural optimization and complex array design. Based on this model, a comprehensive analysis is conducted on the acoustic-structural coupling of an annular and circular diaphragm-coupled PMUT (AC-PMUT) with a new excitation method. The model-derived results are in good agreement with the simulation and experimental results. Then, an optimized design has been presented to achieve high-output pressure and a good array working performance. In summary, a comparison of the array working performance is conducted between the arrays that consist of AC-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs). The results indicate that the AC-PMUT array has a much lower crosstalk effect than that of the traditional C-PMUT array. By this means, the AC-PMUT array can fully use the high vibration amplitude achieved by each AC-PMUT cell to improve its output ability. As a result, the highest ultrasonic output pressure generated by the AC-PMUT array in its resonant condition can achieve an increase of 155%, compared with that generated by the C-PMUT array. © 1986-2012 IEEE.

Keyword:

Circuit simulation Coupled circuits Equivalent circuits Piezoelectricity Piezoelectric transducers Plates (structural components) Structural optimization Timing circuits Transducers Ultrasonic transducers

Author Community:

  • [ 1 ] [Xu, Tingzhong]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 2 ] [Zhao, Libo]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 3 ] [Jiang, Zhuangde]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 4 ] [Guo, Shuaishuai]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 5 ] [Li, Zhikang]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 6 ] [Yang, Ping]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 7 ] [Luo, Guoxi]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 8 ] [Sun, Lin]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China
  • [ 9 ] [Zhang, Liangchi]School of Mechanical and Manufacturing Engineering, University of New South Wales, Sydney; NSW; 2052, Australia

Reprint Author's Address:

  • 赵立波

    [Zhao, Libo]State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing AndMeasurement Technologies, Xian Jiaotong University, Xian; 710049, China;;

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Source :

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

ISSN: 0885-3010

Year: 2021

Issue: 3

Volume: 68

Page: 718-733

2 . 7 2 5

JCR@2020

ESI Discipline: ENGINEERING;

ESI HC Threshold:30

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 4

SCOPUS Cited Count: 14

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 13

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