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Author:

Jia, Shuhai (Jia, Shuhai.) | Peng, Jun (Peng, Jun.) | Bian, Jiaming (Bian, Jiaming.) | Zhang, Shuo (Zhang, Shuo.) | Xu, Shunjian (Xu, Shunjian.) | Zhang, Bao (Zhang, Bao.)

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EI SCIE PubMed Engineering Village

Abstract:

A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator’s working principle and magnetic circuit were analyzed. The calculation results show that the actuator’s output torque is decisive to the air gap’s magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°). © 2021 by the authors. Licensee MDPI, Basel, Switzerland.

Keyword:

Actuator disks Binary alloys Cobalt alloys Electromechanical devices Ferrite Iron alloys Magnetic actuators Magnetic circuits Magnetic cores Magnetic flux MOEMS Optical fiber fabrication Optical fibers Optical switches Permanent magnets Samarium alloys Silicon alloys Stators Substrates Winding

Author Community:

  • [ 1 ] [Jia, Shuhai]School of Mechanical and Electrical Engineering, Xinyu University, Xinyu; 338004, China
  • [ 2 ] [Peng, Jun]School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an; 710049, China
  • [ 3 ] [Bian, Jiaming]School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an; 710049, China
  • [ 4 ] [Zhang, Shuo]School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an; 710049, China
  • [ 5 ] [Xu, Shunjian]School of Mechanical and Electrical Engineering, Xinyu University, Xinyu; 338004, China
  • [ 6 ] [Zhang, Bao]School of Mechanical and Electrical Engineering, Xinyu University, Xinyu; 338004, China

Reprint Author's Address:

  • [Peng, Jun]School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an; 710049, China;;

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Source :

Micromachines

Year: 2021

Issue: 2

Volume: 12

2 . 8 9 1

JCR@2020

ESI Discipline: ENGINEERING;

ESI HC Threshold:30

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 5

SCOPUS Cited Count: 12

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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