A　novel　piezoresistive　accelerometer　was　developed　with　high　performance　in　sensitivity,　resonant　frequency　and　cross-axis　sensitivity.　The　accelerometer　chip　with　axially　stressed　self-supporting　sensing　beams　has　been　designed,　fabricated　and　tested　in　our　study.　We　derived　the　expressions　for　the　location　of　the　sensing　beams,　stresses　and　resonant　frequency,　and　then　these　results　were　verified　by　the　finite　element　method　(FEM)　simulation.　The　fabricated　accelerometer　was　characterized　by　the　static　and　dynamic　experiments.　The　results　showed　that　the　measuring　sensitivity　was　0.666　mV/g/3　V　and　the　resonant　frequency　was　17.1　kHz.　Meanwhile,　the　proposed　accelerometer　provided　an　available　method　for　the　low　cross-axis　sensitivity　design.　Compared　with　other　accelerometers　in　the　literatures,　the　developed　accelerometer　exhibited　an　excellent　performance　concerning　a　comprehensive　figure　of　merit　(FOM).　The　results　demonstrated　the　feasibility　of　the　novel　structure　to　improve　the　accelerometer＇s　performance.　(C)　2016　Elsevier　B.V.　All　rights　reserved.