Many　studies　have　shown　that　surface　roughness　affects　the　adhesion　and　friction　forces.　One　effective　approach　of　reducing　adhesion　and　friction　forces　between　contacting　interfaces　is　to　create　textured　surfaces　or　surface　modification,　which　is　especially　beneficial　for　micro/nano　systems　(e.g.　MEMS/N　EMS)　that　normally　have　smooth　surfaces　and　are　subjected　to　small　applied　forces.　This　paper　presents　the　results　of　adhesion　and　friction　studies　on　the　ordered　polystyrene　microsphere-patterned　surfaces　(MSPS)　with　two　types　of　patterned　asperities　fabricated　by　the　spin-coating　technique.　A　1-Octadecanethiol　(ODT)　self-assembled　monolayer　was　deposited　on　the　MSPS　to　study　the　effect　of　hydrophobic　coating　on　the　adhesion　and　friction　of　patterned　surfaces.　The　morphologies　of　MSPS　were　characterized　by　atomic　force　microscope　(AFM)　and　field　emission　scanning　electron　microscope　(FESEM).　The　adhesion　and　friction　on　the　MSPS　were　studied　by　AFM　using　a　colloidal　probe.　The　results　show　that　the　micro-patterned　surfaces　have　effectively　reduced　adhesion　and　friction　compared　to　the　flat　surface　because　of　the　reduction　of　the　contact　area　between　contacting　interfaces.　Introducing　a　hydrophobic　film　to　the　microsphere-patterned　surface　can　further　reduce　the　adhesion　and　friction　forces　due　to　the　reduction　of　meniscus-mediated　adhesion　and　friction　between　interacting　bodies.　Crown　Copyright　(C)　2012　Published　by　Elsevier　B.V.　All　rights　reserved.