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Abstract:
Using GaN-on-Si epilayers, for the first time, fully vertical p-i-n diodes are demonstrated after Si substrate removal, transfer, and n-electrode formation at the top of the device. After SiO2 sidewall passivation, the vertical p-i-n diodes, with n-GaN facing up, exhibit V-ON of 3.35 V at 1 A/cm(2), a low differential ON-resistance of 3.3 m Omega cm(2) at 300 A/cm(2), and a breakdown voltage of 350 V. The corresponding Baliga's figure of merit is 37.0 MW/cm(2), a very good value for GaN-based p-i-n rectifiers grown on Si substrates. The results indicate that fully vertical rectifiers using GaN-on-Si epilayers have great potential in achieving cost-effective GaN devices for high-power and high-voltage applications.
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IEEE ELECTRON DEVICE LETTERS
ISSN: 0741-3106
Year: 2016
Issue: 5
Volume: 37
Page: 636-639
3 . 0 4 8
JCR@2016
4 . 1 8 7
JCR@2020
ESI Discipline: ENGINEERING;
ESI HC Threshold:128
JCR Journal Grade:1
CAS Journal Grade:2
Cited Count:
WoS CC Cited Count: 75
SCOPUS Cited Count: 83
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 3
Affiliated Colleges: