Previous　experimental　tests　[Shang　et　al.　Int.　J.　Solids　Struc.42:　1729]　show　that　the　multilayered　Cr/PZT/PLT/Pt/Ti　thin　films　deposited　on　single　crystal　Si　substrate　delaminated　along　the　interface　between　PZT　and　Cr　layers　in　a　brittle　manner.　This　study　starts　from　modeling　based　on　cohesive　zone　concept,　and　numerical　simulations　are　carried　out　to　check　the　fracture　behavior　of　this　interfacial　delamination.　Two　cohesive　zone　models　(CZMs)　of　exponential　type　and　bilinear　type　are　adopted.　The　characteristic　CZM　parameters　are　extracted　through　calibration　via　the　experimental　results.　The　simulation　results　show　that　the　critical　stress　for　interfacial　crack　nucleation　is　apparently　lower　than　yield　tress　of　bulk　PZT　or　Cr　material　and　the　fracture　energy　is　low,　comparing　to　typical　film　materials　of　several　mm　thicknesses.　Our　study　demonstrated　the　applicability　of　CZM　for　characterizing　the　interface　fracture　behavior　of　urn　thick　films.