Previous　experimental　investigations　[Shang,　F.,　Kitamura,　T.,　Hirakata,　H.,　Kanno,　I.,　Kotera,　H.,　Terada,　K.,　2005.　Experimental　and　theoretical　investigations　of　delamination　at　free　edge　of　interface　between　piezoelectric　thin　films　on　a　substrate.　International　Journal　of　Solids　and　Structures　42　(5-6)　1729-1741]　have　demonstrated　that　multilayered　Cr/PZT/PLT/Pt/Ti　thin　films　deposited　on　single-crystal　silicon　substrates　are　delaminated　along　the　interface　between　Cr　and　PZT　layers　in　a　brittle　manner.　This　study　starts　with　a　model　based　on　the　cohesive　zone　concept　and　carries　out　numerical　simulations　to　check　the　fracture　behavior　of　this　interfacial　delamination.　Three　types　of　cohesive　zone　models　(CZMs)　are　adopted,　including　the　exponential,　bilinear,　and　trapezoidal　models.　Characteristic　CZM　parameters　are　extracted　through　comparisons　with　experimental　results.　The　simulation　results　show　that　(i)　cohesive　strength　and　work　of　separation　are　the　dominating　parameters　in　the　CZMs;　(ii)　the　bilinear　CZM　more　suitably　describes　this　brittle　interfacial　delamination;　and　(iii)　in　comparison　with　typical　several　mm-thick　film/coating　materials,　the　fracture　energy　of　this　weak　Cr/PZT　interface　is　quite　low.　Our　study　demonstrates　the　applicability　of　CZM　in　characterizing　the　interface　fracture　behavior　of　film　materials　with　micrometer　thicknesses.　(C)　2009　Elsevier　Ltd.　All　rights　reserved.