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The micro-channel plate (MCP) is the core device for electronic multiplication and signal amplification in the fields of optical communication and optoelectronic technology, and the performance improvement research of MCP is mainly focused on increasing gain, extending service life and reducing dark count. Currently, the commonly used commercial MCPs are still prepared based on the traditional lead silicate glass via hydrogen reduction process. Although its gain, lifetime and dark count can reach 103, 0.3 C/cm2, 0.25 events/(s•cm2), respectively, optimized by four generations of glass components and preparation process, the glass composition and complicated preparation process limit its further enhancement in performance, e.g. lower ion feedback and background noise, and higher gain. In view of this, researchers have proposed and perfected a new solution over the past decade: adopting atomic layer deposition (ALD) techno-logy to deposit functional layers, including the conductive layers and secondary electron emission layers onto the surface of borosilicate glass substrates. Thereby, an MCP with conduction and electron multiplication capability is obtained. This novel ALD-MCP can effectively avoid the restriction of substrate glass on its performance optimization, realize the independent design of the substrate glass and the functional layer's materials, and significantly improve the comprehensive performance of the MCP. Through continuous attempts, the ALD functional layers exhibiting much superior performance to that of traditional MCP have been developed. The prevailing deposition materials for conductive layer are Al2O3/ZnO, Al2O3/W or Al2O3/Mo, and for the secondary electron emission layers are MgO or Al2O3, with the products' gain elevated to 104, dark count reduced to 0.078 events/(s•cm2), and lifetime prolonged to 7 C/cm2. However, its stability still requires further improvement. In addition, deeper investigations are needed to improve deposition efficiency, and to optimize and regulate the performance of functional layers. This paper provides a systematic summary over the worldwide research status of ALD-MCP from the perspectives of functional layer composition and product performance. Moreover, it also gives a critical discussion involving the problems in current research and a prospective outlook for future development trends. © 2020, Materials Review Magazine. All right reserved.
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Cailiao Daobao/Materials Reports
ISSN: 1005-023X
Year: 2020
Issue: 2
Volume: 34
Page: 03080-03089
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 1
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 20
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