• Complex
  • Title
  • Author
  • Keyword
  • Abstract
  • Scholars
Search

Author:

Fang, Xudong (Fang, Xudong.) | Wu, Chen (Wu, Chen.) | Guo, Xin (Guo, Xin.) | Zhao, Libo (Zhao, Libo.) (Scholars:赵立波) | Zhao, Yulong (Zhao, Yulong.) (Scholars:赵玉龙) | Jiang, Zhuangde (Jiang, Zhuangde.) (Scholars:蒋庄德)

Indexed by:

Abstract:

A piezoresistive pressure sensor based on 4H-SiC was developed for working over 500 degrees C. The designed pressure range is 0-7MPa for special aviation applications. As demonstrated with experimental results, in this pressure range, the sensor shows excellent accuracy and repeatability from 30 degrees C to 500 degrees C. Compared with previous studies, in MEMS processing of the sensor chip, a suitable alloy system was determined to form a stable high-temperature ohmic contact. Besides, the chip was packaged with mechanical structure and ceramic glue of similar thermal expansion coefficient to avoid thermal stress induced when increasing temperature. With the above measures taken, the sensor performance can be significantly improved. The design, fabrication, and package of this sensor provide support for high-temperature use. Additionally, this work can be a reference for future research in this field.

Keyword:

4H-SiC high temperature piezoresistive pressure sensor thermal stress

Author Community:

  • [ 1 ] [Fang, Xudong]Xi An Jiao Tong Univ, Sch Mech Engn, Slate Key Lab Mfg Syst Engn Int Joint Lab Microna, State Key Lab Robot & Syst HIT, Xian 710049, Peoples R China
  • [ 2 ] [Wu, Chen]Xi An Jiao Tong Univ, Sch Mech Engn, Slate Key Lab Mfg Syst Engn Int Joint Lab Microna, Xian 710049, Peoples R China
  • [ 3 ] [Guo, Xin]Xi An Jiao Tong Univ, Sch Mech Engn, Slate Key Lab Mfg Syst Engn Int Joint Lab Microna, Xian 710049, Peoples R China
  • [ 4 ] [Zhao, Libo]Xi An Jiao Tong Univ, Sch Mech Engn, Slate Key Lab Mfg Syst Engn Int Joint Lab Microna, Xian 710049, Peoples R China
  • [ 5 ] [Zhao, Yulong]Xi An Jiao Tong Univ, Sch Mech Engn, Slate Key Lab Mfg Syst Engn Int Joint Lab Microna, Xian 710049, Peoples R China
  • [ 6 ] [Jiang, Zhuangde]Xi An Jiao Tong Univ, Sch Mech Engn, Slate Key Lab Mfg Syst Engn Int Joint Lab Microna, Xian 710049, Peoples R China

Reprint Author's Address:

Show more details

Related Keywords:

Source :

MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE-NEMS 2019)

ISSN: 2474-3747

Year: 2019

Page: 105-109

Language: English

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

FAQ| About| Online/Total:705/168644642
Address:XI'AN JIAOTONG UNIVERSITY LIBRARY(No.28, Xianning West Road, Xi'an, Shaanxi Post Code:710049) Contact Us:029-82667865
Copyright:XI'AN JIAOTONG UNIVERSITY LIBRARY Technical Support:Beijing Aegean Software Co., Ltd.