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Abstract:
A piezoresistive pressure sensor based on 4H-SiC was developed for working over 500 degrees C. The designed pressure range is 0-7MPa for special aviation applications. As demonstrated with experimental results, in this pressure range, the sensor shows excellent accuracy and repeatability from 30 degrees C to 500 degrees C. Compared with previous studies, in MEMS processing of the sensor chip, a suitable alloy system was determined to form a stable high-temperature ohmic contact. Besides, the chip was packaged with mechanical structure and ceramic glue of similar thermal expansion coefficient to avoid thermal stress induced when increasing temperature. With the above measures taken, the sensor performance can be significantly improved. The design, fabrication, and package of this sensor provide support for high-temperature use. Additionally, this work can be a reference for future research in this field.
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Source :
MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE-NEMS 2019)
ISSN: 2474-3747
Year: 2019
Page: 105-109
Language: English
Cited Count:
WoS CC Cited Count: 1
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 8
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