In　this　paper,　a　three-dimensional　plasma　jet　model　based　on　a　hybrid　algorithm　was　developed　to　study　the　sputtering　phenomena　during　the　interaction　between　the　vacuum　arc　plasma　jet　and　the　anode.　To　improve　the　balance　between　accuracy　and　efficiency　of　the　simulation　model,　heavy　particles　(ions　and　atoms)　were　treated　as　particles,　while　electrons　were　considered　as　a　massless　fluid.　The　Monte　Carlo　collision　method　was　used　to　model　inelastic　collisions　between　heavy　particles　and　electrons.　In　addition,　the　anode　in　this　model　did　not　only　act　as　a　passive　current　collector,　but　may　also　emit　atoms　into　the　gap　when　hit　by　heavy　particles.　The　simulation　results　show　that　the　anode　is　sputtered　by　the　impact　of　high-speed　ions　from　the　plasma　jet,　and　a　stream　of　atoms　is　generated　from　the　part　of　the　anode　surface　that　is　in　contact　with　the　plasma.　Some　of　the　sputtered　atoms　are　ionized　into　Cu1+　ions　by　colliding　with　electrons　during　their　movement　from　the　anode　to　the　cathode.　As　a　result　of　the　production　of　these　new　ions,　the　Cu1+　ions　density　may　exhibit　a　bimodal　distribution　with　one　peak　near　the　cathode　and　the　other　near　the　anode.　Furthermore,　the　ions　can　be　divided　into　two　groups　according　to　their　velocity　distribution:　high-speed　ions　moving　from　the　cathode　to　the　anode　and　low-speed　ions　moving　in　the　opposite　direction.　These　findings　reveal　that　the　sputtering　process　between　the　plasma　and　the　material　surface　has　a　great　influence　on　the　energy　distribution　function　of　the　ions　in　the　plasma,　which　has　often　been　ignored　by　researchers　in　previous　studies.　©　2021　IOP　Publishing　Ltd.