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Author:

Zhao, Fan (Zhao, Fan.) | Jin, Jing (Jin, Jing.) | Hu, Guangliang (Hu, Guangliang.) | Ma, Chunrui (Ma, Chunrui.) | Lu, Lu (Lu, Lu.) | Hu, Tianyi (Hu, Tianyi.) | Liu, Yupeng (Liu, Yupeng.) | Hu, Dengwei (Hu, Dengwei.) | Liu, Ming (Liu, Ming.) | Jia, Chun-Lin (Jia, Chun-Lin.)

Indexed by:

EI SCIE Scopus Engineering Village

Abstract:

With the rapid development of advanced electronic devices towards miniaturization and integration, silicon integrated lead-free ferroelectric film capacitors have attracted extensive attention due to their excellent energy storage performance and fast charge/discharge speed. In this study, the BaZr0.15Ti0.85O3 (BZT15) film capacitors have been epitaxially integrated on Si (0 0 1) substrate with the buffer layers of Graphene/La0.67Sr0.33MnO3/CeO2/Y2O3-stabilized ZrO2 (G/L-C-Y). The highly epitaxial crystalline quality improves significantly the energy storage performance. The layer of G has been found to further improve the high temperature energy storage performance due to its heat dissipation effect. The energy storage density (Wre) of the BZT15 film capacitor with the buffer layers reaches 112.35 J/cm3 with energy storage efficiency (η) of 76.7 % at room temperature, which is about 55.29 % and 9.18 % higher than that of the BZT15 film capacitor without buffer layers, respectively. Moreover, the BZT15 film capacitor with the buffer layer shows an ultra-high Wre of 70.36 J/cm3 and an ultra-high η of 81.22 % at 200 °C, which are 74.55 % and 17.13 % higher than that of BZT15 film capacitor without buffer layer. More importantly, the fluctuation of Wre and η of optimized BZT15 film capacitor is only 8.85 % and 1.30 % in the wide temperature range from −100 to 200 °C, respectively. Our studies provide an effective multi-strategy approach combining interface designing and thermal management for the epitaxially integration of dielectric film capacitors on Si substrates to obtain ultra-high energy storage performance in ultra-wide working temperature. © 2022 Elsevier B.V.

Keyword:

Barium titanate Buffer layers Capacitors Energy efficiency Energy storage Ferroelectric films Ferroelectricity Lanthanum compounds Silicon Strontium compounds Substrates Thin films

Author Community:

  • [ 1 ] [Zhao, Fan]School of Microelectronics, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 2 ] [Jin, Jing]School of Microelectronics, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 3 ] [Hu, Guangliang]School of Microelectronics, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 4 ] [Ma, Chunrui]State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 5 ] [Lu, Lu]School of Microelectronics, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 6 ] [Hu, Tianyi]State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 7 ] [Liu, Yupeng]State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 8 ] [Hu, Dengwei]Faculty of Chemistry and Chemical Engineering, Engineering Research Center of Advanced Ferroelectric Functional Materials, Key Laboratory of Phytochemistry of Shaanxi Province, Baoji University of Arts and Sciences, 1 Hi-Tech Avenue, Baoji; Shaanxi; 721013, China
  • [ 9 ] [Liu, Ming]School of Microelectronics, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 10 ] [Jia, Chun-Lin]School of Microelectronics, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 11 ] [Jia, Chun-Lin]State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 12 ] [Zhao, Fan]Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
  • [ 13 ] [Jin, Jing]Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
  • [ 14 ] [Hu, Guangliang]Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
  • [ 15 ] [Lu, Lu]Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
  • [ 16 ] [Liu, Ming]Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
  • [ 17 ] [Jia, Chun -Lin]Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
  • [ 18 ] [Ma, Chunrui]Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
  • [ 19 ] [Hu, Tianyi]Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
  • [ 20 ] [Liu, Yupeng]Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
  • [ 21 ] [Jia, Chun -Lin]Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
  • [ 22 ] [Hu, Dengwei]Baoji Univ Arts & Sci, Fac Chem & Chem Engn, Engn Res Ctr Adv Ferroelectr Funct Mat, Key Lab Phytochemistry Shaanxi Prov, 1 Hitech Ave, Baoji 721013, Shaanxi, Peoples R China

Reprint Author's Address:

  • [Hu, G.]School of Microelectronics, China;;

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Source :

Chemical Engineering Journal

ISSN: 1385-8947

Year: 2022

Volume: 450

1 3 . 2 7 3

JCR@2020

ESI Discipline: ENGINEERING;

ESI HC Threshold:7

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 11

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

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