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With the rapid development of advanced electronic devices towards miniaturization and integration, silicon integrated lead-free ferroelectric film capacitors have attracted extensive attention due to their excellent energy storage performance and fast charge/discharge speed. In this study, the BaZr0.15Ti0.85O3 (BZT15) film capacitors have been epitaxially integrated on Si (0 0 1) substrate with the buffer layers of Graphene/La0.67Sr0.33MnO3/CeO2/Y2O3-stabilized ZrO2 (G/L-C-Y). The highly epitaxial crystalline quality improves significantly the energy storage performance. The layer of G has been found to further improve the high temperature energy storage performance due to its heat dissipation effect. The energy storage density (Wre) of the BZT15 film capacitor with the buffer layers reaches 112.35 J/cm3 with energy storage efficiency (η) of 76.7 % at room temperature, which is about 55.29 % and 9.18 % higher than that of the BZT15 film capacitor without buffer layers, respectively. Moreover, the BZT15 film capacitor with the buffer layer shows an ultra-high Wre of 70.36 J/cm3 and an ultra-high η of 81.22 % at 200 °C, which are 74.55 % and 17.13 % higher than that of BZT15 film capacitor without buffer layer. More importantly, the fluctuation of Wre and η of optimized BZT15 film capacitor is only 8.85 % and 1.30 % in the wide temperature range from −100 to 200 °C, respectively. Our studies provide an effective multi-strategy approach combining interface designing and thermal management for the epitaxially integration of dielectric film capacitors on Si substrates to obtain ultra-high energy storage performance in ultra-wide working temperature. © 2022 Elsevier B.V.
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Chemical Engineering Journal
ISSN: 1385-8947
Year: 2022
Volume: 450
1 3 . 2 7 3
JCR@2020
ESI Discipline: ENGINEERING;
ESI HC Threshold:7
Cited Count:
SCOPUS Cited Count: 11
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 8