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Author:

Deng, Ning (Deng, Ning.) | Zhu, Changchun (Zhu, Changchun.)

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Abstract:

The N+ ion implantation method was used to improve the field emission characteristics of polycrystalline diamond films. The emission characteristics after ion implantation were compared with those before implantation. It was found that there exist considerable differences in the threshold electric field and emission current density even for samples fabricated under the same process conditions before N+ ion implantation. These differences were eliminated by N+ ion implantation treatment. We believe these differences among the samples are due to the difference in distribution of the defect energy levels in the forbidden gap in the diamond films, and that the difference in distribution of the defect energy levels can be essentially eliminated by ion implantation. Emission current density under high field also increases after ion implantation. The improvement mechanism was analyzed theoretically, based on a model we have presented before. © 2002 Sage Publications.

Keyword:

Chemical vapor deposition Diamond films Electron emission Ion implantation

Author Community:

  • [ 1 ] [Deng, Ning]Xi'an Jiaotong University, Institute of Vacuum Microelectronics,Xi'an,China
  • [ 2 ] [Zhu, Changchun]Xi'an Jiaotong University, School of Electronics and Information Engineering,Xi'an,China

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Source :

Journal of Wide Bandgap Materials

ISSN: 1524-511X

Year: 2000

Issue: 2

Volume: 8

Page: 123-128

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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